JPS57178511A - Controller for flow rate of received water - Google Patents

Controller for flow rate of received water

Info

Publication number
JPS57178511A
JPS57178511A JP6257981A JP6257981A JPS57178511A JP S57178511 A JPS57178511 A JP S57178511A JP 6257981 A JP6257981 A JP 6257981A JP 6257981 A JP6257981 A JP 6257981A JP S57178511 A JPS57178511 A JP S57178511A
Authority
JP
Japan
Prior art keywords
remaining
control
received water
time
generator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6257981A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6336526B2 (cs
Inventor
Atsushi Shinozaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyo Denki Seizo KK
Toyo Electric Manufacturing Ltd
Original Assignee
Toyo Denki Seizo KK
Toyo Electric Manufacturing Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyo Denki Seizo KK, Toyo Electric Manufacturing Ltd filed Critical Toyo Denki Seizo KK
Priority to JP6257981A priority Critical patent/JPS57178511A/ja
Publication of JPS57178511A publication Critical patent/JPS57178511A/ja
Publication of JPS6336526B2 publication Critical patent/JPS6336526B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00Control of flow
    • G05D7/06Control of flow characterised by the use of electric means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Flow Control (AREA)
JP6257981A 1981-04-27 1981-04-27 Controller for flow rate of received water Granted JPS57178511A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6257981A JPS57178511A (en) 1981-04-27 1981-04-27 Controller for flow rate of received water

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6257981A JPS57178511A (en) 1981-04-27 1981-04-27 Controller for flow rate of received water

Publications (2)

Publication Number Publication Date
JPS57178511A true JPS57178511A (en) 1982-11-02
JPS6336526B2 JPS6336526B2 (cs) 1988-07-20

Family

ID=13204358

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6257981A Granted JPS57178511A (en) 1981-04-27 1981-04-27 Controller for flow rate of received water

Country Status (1)

Country Link
JP (1) JPS57178511A (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020009423A (ja) * 2018-07-02 2020-01-16 東京エレクトロン株式会社 流量制御器、ガス供給系及び流量制御方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020009423A (ja) * 2018-07-02 2020-01-16 東京エレクトロン株式会社 流量制御器、ガス供給系及び流量制御方法

Also Published As

Publication number Publication date
JPS6336526B2 (cs) 1988-07-20

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