JPS6336526B2 - - Google Patents
Info
- Publication number
- JPS6336526B2 JPS6336526B2 JP6257981A JP6257981A JPS6336526B2 JP S6336526 B2 JPS6336526 B2 JP S6336526B2 JP 6257981 A JP6257981 A JP 6257981A JP 6257981 A JP6257981 A JP 6257981A JP S6336526 B2 JPS6336526 B2 JP S6336526B2
- Authority
- JP
- Japan
- Prior art keywords
- pulse
- input
- output
- flow rate
- water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Flow Control (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6257981A JPS57178511A (en) | 1981-04-27 | 1981-04-27 | Controller for flow rate of received water |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6257981A JPS57178511A (en) | 1981-04-27 | 1981-04-27 | Controller for flow rate of received water |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57178511A JPS57178511A (en) | 1982-11-02 |
| JPS6336526B2 true JPS6336526B2 (cs) | 1988-07-20 |
Family
ID=13204358
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6257981A Granted JPS57178511A (en) | 1981-04-27 | 1981-04-27 | Controller for flow rate of received water |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57178511A (cs) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7398886B2 (ja) * | 2018-07-02 | 2023-12-15 | 東京エレクトロン株式会社 | 流量制御器、ガス供給系及び流量制御方法 |
-
1981
- 1981-04-27 JP JP6257981A patent/JPS57178511A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57178511A (en) | 1982-11-02 |
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