JPS5743424A - Electron beam exposure system - Google Patents

Electron beam exposure system

Info

Publication number
JPS5743424A
JPS5743424A JP55119343A JP11934380A JPS5743424A JP S5743424 A JPS5743424 A JP S5743424A JP 55119343 A JP55119343 A JP 55119343A JP 11934380 A JP11934380 A JP 11934380A JP S5743424 A JPS5743424 A JP S5743424A
Authority
JP
Japan
Prior art keywords
stages
electron beam
beam exposure
exposure system
parallel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP55119343A
Other languages
English (en)
Inventor
Toshihiko Osada
Takayuki Miyazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP55119343A priority Critical patent/JPS5743424A/ja
Publication of JPS5743424A publication Critical patent/JPS5743424A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. program control

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
JP55119343A 1980-08-29 1980-08-29 Electron beam exposure system Pending JPS5743424A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55119343A JPS5743424A (en) 1980-08-29 1980-08-29 Electron beam exposure system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55119343A JPS5743424A (en) 1980-08-29 1980-08-29 Electron beam exposure system

Publications (1)

Publication Number Publication Date
JPS5743424A true JPS5743424A (en) 1982-03-11

Family

ID=14759129

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55119343A Pending JPS5743424A (en) 1980-08-29 1980-08-29 Electron beam exposure system

Country Status (1)

Country Link
JP (1) JPS5743424A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59204626A (ja) * 1983-05-06 1984-11-20 Asahi Chem Ind Co Ltd 無孔層を有する合成樹脂微多孔膜
JPH02159014A (ja) * 1988-12-13 1990-06-19 Toshiba Corp 荷電ビーム描画用データの作成方法及び作成装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59204626A (ja) * 1983-05-06 1984-11-20 Asahi Chem Ind Co Ltd 無孔層を有する合成樹脂微多孔膜
JPH02159014A (ja) * 1988-12-13 1990-06-19 Toshiba Corp 荷電ビーム描画用データの作成方法及び作成装置

Similar Documents

Publication Publication Date Title
JPS5743424A (en) Electron beam exposure system
EP0539010A3 (en) Method and device for generating sum information/rounding control signal
TW353161B (en) Charged particle beam exposure method and apparatus
JPS5430380A (en) Pseude-operation method of calculation controlling system
JPS5636702A (en) Terminal control system of sequence controller
JPS55110328A (en) Interrupt processing system
JPS5710872A (en) Instruction control device
JPS556669A (en) Buffer memory unit
JPS523317A (en) Manual board display control system
JPS5492064A (en) Electron beam exposure device
JPS6476660A (en) Electron beam exposure equipment
JPS5471947A (en) Pattern normalizing unit
JPS5222846A (en) Data processing unit
JPS5470073A (en) Image distortion correcion calculator
JPS5710873A (en) Instruction control device
JPS56135249A (en) Interruption control system
JPS56127275A (en) Time interrupting device
JPH01245522A (ja) パターンデータ補正方法
JPS51138340A (en) Memory system
JPS57132245A (en) Testing system for arithmetic circuit
JPS5733500A (en) Information inspecting device of nonvolatile storage circuit
JPS57161904A (en) Programmable logic array
JPS5365036A (en) Data inspecting and processing method for electronic cash registers
JPS55136943A (en) Inspection apparatus for surface condition
JPS5710870A (en) Matrix operation system