JPS5773977A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5773977A
JPS5773977A JP56136445A JP13644581A JPS5773977A JP S5773977 A JPS5773977 A JP S5773977A JP 56136445 A JP56136445 A JP 56136445A JP 13644581 A JP13644581 A JP 13644581A JP S5773977 A JPS5773977 A JP S5773977A
Authority
JP
Japan
Prior art keywords
film
wire
gate
sio2
si3n4
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP56136445A
Other languages
English (en)
Inventor
Michitoku Kamatani
Minoru Araki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP56136445A priority Critical patent/JPS5773977A/ja
Publication of JPS5773977A publication Critical patent/JPS5773977A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W20/00—Interconnections in chips, wafers or substrates
    • H10W20/40—Interconnections external to wafers or substrates, e.g. back-end-of-line [BEOL] metallisations or vias connecting to gate electrodes

Landscapes

  • Semiconductor Integrated Circuits (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
JP56136445A 1981-08-31 1981-08-31 Manufacture of semiconductor device Pending JPS5773977A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56136445A JPS5773977A (en) 1981-08-31 1981-08-31 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56136445A JPS5773977A (en) 1981-08-31 1981-08-31 Manufacture of semiconductor device

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP6887072A Division JPS5550395B2 (ja) 1972-07-08 1972-07-08

Publications (1)

Publication Number Publication Date
JPS5773977A true JPS5773977A (en) 1982-05-08

Family

ID=15175276

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56136445A Pending JPS5773977A (en) 1981-08-31 1981-08-31 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5773977A (ja)

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