JPS5776461A - Device for maintaining constant temperature of flat body - Google Patents

Device for maintaining constant temperature of flat body

Info

Publication number
JPS5776461A
JPS5776461A JP15220880A JP15220880A JPS5776461A JP S5776461 A JPS5776461 A JP S5776461A JP 15220880 A JP15220880 A JP 15220880A JP 15220880 A JP15220880 A JP 15220880A JP S5776461 A JPS5776461 A JP S5776461A
Authority
JP
Japan
Prior art keywords
plate
flat body
temp
thermomodules
maintained
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15220880A
Other languages
English (en)
Other versions
JPS6334989B2 (ja
Inventor
Tomoshiro Horiguchi
Toshio Yokota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ushio Denki KK
Ushio Inc
Original Assignee
Ushio Denki KK
Ushio Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ushio Denki KK, Ushio Inc filed Critical Ushio Denki KK
Priority to JP15220880A priority Critical patent/JPS5776461A/ja
Publication of JPS5776461A publication Critical patent/JPS5776461A/ja
Publication of JPS6334989B2 publication Critical patent/JPS6334989B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2642—Testing semiconductor operation lifetime or reliability, e.g. by accelerated life tests

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
JP15220880A 1980-10-31 1980-10-31 Device for maintaining constant temperature of flat body Granted JPS5776461A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15220880A JPS5776461A (en) 1980-10-31 1980-10-31 Device for maintaining constant temperature of flat body

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15220880A JPS5776461A (en) 1980-10-31 1980-10-31 Device for maintaining constant temperature of flat body

Publications (2)

Publication Number Publication Date
JPS5776461A true JPS5776461A (en) 1982-05-13
JPS6334989B2 JPS6334989B2 (ja) 1988-07-13

Family

ID=15535425

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15220880A Granted JPS5776461A (en) 1980-10-31 1980-10-31 Device for maintaining constant temperature of flat body

Country Status (1)

Country Link
JP (1) JPS5776461A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0460723U (ja) * 1990-10-03 1992-05-25

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5441078A (en) * 1977-09-08 1979-03-31 Kobatoron Kk Device for inspecting semiconductor
JPS5521158A (en) * 1978-08-01 1980-02-15 Nec Corp Checking method for semiconductor device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5441078A (en) * 1977-09-08 1979-03-31 Kobatoron Kk Device for inspecting semiconductor
JPS5521158A (en) * 1978-08-01 1980-02-15 Nec Corp Checking method for semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0460723U (ja) * 1990-10-03 1992-05-25

Also Published As

Publication number Publication date
JPS6334989B2 (ja) 1988-07-13

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