JPS5776880A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number: JPS5776880A
Authority: JP; Japan
Prior art keywords: gate; polycrystalline silicon; drain; saturation current; source
Prior art date: 1980-10-31
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Pending

Application number

JP15224980A

Other languages

English (en)

Inventor

Junichi Okano

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Toshiba Corp

Original Assignee

Toshiba Corp

Tokyo Shibaura Electric Co Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1980-10-31

Filing date

1980-10-31

Publication date

1982-05-14

1980-10-31 Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp

1980-10-31 Priority to JP15224980A priority Critical patent/JPS5776880A/ja

1982-05-14 Publication of JPS5776880A publication Critical patent/JPS5776880A/ja

Status Pending legal-status Critical Current

Links

238000004519 manufacturing process Methods 0.000 title 1
239000004065 semiconductor Substances 0.000 title 1
238000009792 diffusion process Methods 0.000 abstract 3
229910021420 polycrystalline silicon Inorganic materials 0.000 abstract 3
238000009413 insulation Methods 0.000 abstract 1
238000005259 measurement Methods 0.000 abstract 1
238000000034 method Methods 0.000 abstract 1
239000000523 sample Substances 0.000 abstract 1
239000000758 substrate Substances 0.000 abstract 1

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2607—Circuits therefor
- G01R31/2621—Circuits therefor for testing field effect transistors, i.e. FET's

Landscapes

Engineering & Computer Science (AREA)
Microelectronics & Electronic Packaging (AREA)
Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Junction Field-Effect Transistors (AREA)

JP15224980A 1980-10-31 1980-10-31 Manufacture of semiconductor device Pending JPS5776880A (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP15224980A JPS5776880A (en)	1980-10-31	1980-10-31	Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP15224980A JPS5776880A (en)	1980-10-31	1980-10-31	Manufacture of semiconductor device

Publications (1)

Publication Number	Publication Date
JPS5776880A true JPS5776880A (en)	1982-05-14

Family

ID=15536350

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP15224980A Pending JPS5776880A (en)	1980-10-31	1980-10-31	Manufacture of semiconductor device

Country Status (1)

Country	Link
JP (1)	JPS5776880A (ja)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS492485A (ja) *	1972-04-19	1974-01-10
JPS49123289A (ja) *	1973-03-28	1974-11-26

1980
- 1980-10-31 JP JP15224980A patent/JPS5776880A/ja active Pending

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS492485A (ja) *	1972-04-19	1974-01-10
JPS49123289A (ja) *	1973-03-28	1974-11-26

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