JPS58110447A - ガラス封着体の製造方法 - Google Patents
ガラス封着体の製造方法Info
- Publication number
- JPS58110447A JPS58110447A JP20664881A JP20664881A JPS58110447A JP S58110447 A JPS58110447 A JP S58110447A JP 20664881 A JP20664881 A JP 20664881A JP 20664881 A JP20664881 A JP 20664881A JP S58110447 A JPS58110447 A JP S58110447A
- Authority
- JP
- Japan
- Prior art keywords
- glass
- holes
- sealed body
- tablet
- outer ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011521 glass Substances 0.000 title claims abstract description 78
- 238000004519 manufacturing process Methods 0.000 title claims description 11
- 239000000463 material Substances 0.000 claims abstract description 6
- 238000001816 cooling Methods 0.000 claims abstract description 5
- 239000002184 metal Substances 0.000 claims description 19
- 229910052751 metal Inorganic materials 0.000 claims description 19
- 238000000034 method Methods 0.000 claims description 8
- 238000007789 sealing Methods 0.000 abstract description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract description 5
- 229910002804 graphite Inorganic materials 0.000 abstract description 5
- 239000010439 graphite Substances 0.000 abstract description 5
- 238000010438 heat treatment Methods 0.000 abstract description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract description 3
- 229910052802 copper Inorganic materials 0.000 abstract description 3
- 239000010949 copper Substances 0.000 abstract description 3
- 239000006060 molten glass Substances 0.000 abstract description 3
- 239000011230 binding agent Substances 0.000 description 2
- 230000008602 contraction Effects 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000005394 sealing glass Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Landscapes
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Joining Of Glass To Other Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20664881A JPS58110447A (ja) | 1981-12-21 | 1981-12-21 | ガラス封着体の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20664881A JPS58110447A (ja) | 1981-12-21 | 1981-12-21 | ガラス封着体の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58110447A true JPS58110447A (ja) | 1983-07-01 |
| JPS6362464B2 JPS6362464B2 (cs) | 1988-12-02 |
Family
ID=16526825
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20664881A Granted JPS58110447A (ja) | 1981-12-21 | 1981-12-21 | ガラス封着体の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58110447A (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007007783A1 (ja) * | 2005-07-13 | 2007-01-18 | Tokyo Electron Limited | ガラス基板の穴あけ方法及び穴あけ装置 |
-
1981
- 1981-12-21 JP JP20664881A patent/JPS58110447A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007007783A1 (ja) * | 2005-07-13 | 2007-01-18 | Tokyo Electron Limited | ガラス基板の穴あけ方法及び穴あけ装置 |
| JPWO2007007783A1 (ja) * | 2005-07-13 | 2009-01-29 | 東京エレクトロン株式会社 | ガラス基板の穴あけ方法及び穴あけ装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6362464B2 (cs) | 1988-12-02 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5435965A (en) | Sputtering target and method for manufacturing same | |
| DK165178C (da) | Fremgangsmaade til fremstilling af sammensatte keramiske genstande med oensket form samt ved fremgangsmaaden fremstillede genstande | |
| US3220815A (en) | Process of bonding glass or ceramic to metal | |
| US4665611A (en) | Method of fabricating superconductive electrical conductor | |
| US3055465A (en) | Metal-to-ceramic joint and method of forming | |
| JPS60108350A (ja) | ガラス/金属融合によりブツシングを製造するための板金 | |
| US5538527A (en) | Method of sealing glass to aluminum, particularly for electrical feed-through connectors | |
| JPS6362464B2 (cs) | ||
| US2217398A (en) | Electric discharge tube | |
| EP1083594A3 (en) | Fired body for and manufacture of a substrate | |
| US2848801A (en) | Method of making ceramic metal seal | |
| JP3863591B2 (ja) | 金属粉末焼結体の製造方法 | |
| KR900008197B1 (ko) | 음극선관의 봉지방법 | |
| US3504411A (en) | Process for producing an electrode tip | |
| US3615325A (en) | Method of making a sleeve-type metal to glass to metal to metal seal | |
| JPS575851A (en) | Production of frame material for glass | |
| US2985946A (en) | Indirectly heated cathode | |
| US3577275A (en) | Semi-conductor crystal supports | |
| DE650446C (de) | Vakuumdichte Verbindung zwischen Quarz und Metall | |
| JP2006055892A (ja) | セラミックスストークおよびその製造方法 | |
| EP1043754A1 (en) | Lamp seal using functionally gradient material | |
| DE720064C (de) | Verfahren zur vakuumdichten Einfuehrung von Stromzufuehrungen usw. in die Wandung eines aus keramischem Werkstoff gefertigten Entladungsgefaesses | |
| JPS5775449A (en) | Manufacture of airtight terminal | |
| JPH0157063B2 (cs) | ||
| JPH0316238Y2 (cs) |