JPS58133375A - 連続真空蒸着装置 - Google Patents

連続真空蒸着装置

Info

Publication number: JPS58133375A
Authority: JP; Japan
Prior art keywords: guide; steel strip; shaft; boss; guides
Prior art date: 1982-02-01
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP1338382A

Other languages

English (en)

Japanese (ja)

Other versions

JPH029109B2 (cs

Inventor

Heizaburo Furukawa

古川　平三郎

Kanji Wake

和気　完治

Kenichi Yanagi

謙一柳

Toshio Taguchi

田口　俊夫

Tetsuyoshi Wada

哲義和田

Shigeo Itano

板野　重夫

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Mitsubishi Heavy Industries Ltd

Original Assignee

Mitsubishi Heavy Industries Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1982-02-01

Filing date

1982-02-01

Publication date

1983-08-09

1982-02-01 Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd

1982-02-01 Priority to JP1338382A priority Critical patent/JPS58133375A/ja

1983-08-09 Publication of JPS58133375A publication Critical patent/JPS58133375A/ja

1990-02-28 Publication of JPH029109B2 publication Critical patent/JPH029109B2/ja

Status Granted legal-status Critical Current

Links

238000007740 vapor deposition Methods 0.000 title description 4
238000001704 evaporation Methods 0.000 claims abstract description 11
230000008020 evaporation Effects 0.000 claims abstract description 11
RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 14
229910052802 copper Inorganic materials 0.000 claims description 14
239000010949 copper Substances 0.000 claims description 14
230000007246 mechanism Effects 0.000 claims description 7
238000007738 vacuum evaporation Methods 0.000 claims description 6
229910000831 Steel Inorganic materials 0.000 abstract description 31
239000010959 steel Substances 0.000 abstract description 31
230000015572 biosynthetic process Effects 0.000 abstract 1
239000002184 metal Substances 0.000 description 11
229910052751 metal Inorganic materials 0.000 description 11
238000007747 plating Methods 0.000 description 6
238000000151 deposition Methods 0.000 description 4
230000008021 deposition Effects 0.000 description 4
HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 3
238000010586 diagram Methods 0.000 description 3
238000000034 method Methods 0.000 description 3
239000011701 zinc Substances 0.000 description 3
229910052725 zinc Inorganic materials 0.000 description 3
239000002699 waste material Substances 0.000 description 2
241000270295 Serpentes Species 0.000 description 1
238000013459 approach Methods 0.000 description 1
239000003795 chemical substances by application Substances 0.000 description 1
230000000694 effects Effects 0.000 description 1
238000009713 electroplating Methods 0.000 description 1
238000005246 galvanizing Methods 0.000 description 1
238000007654 immersion Methods 0.000 description 1
230000002401 inhibitory effect Effects 0.000 description 1
238000009434 installation Methods 0.000 description 1
239000007788 liquid Substances 0.000 description 1
230000001681 protective effect Effects 0.000 description 1
238000007789 sealing Methods 0.000 description 1
238000001771 vacuum deposition Methods 0.000 description 1

Classifications

- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation

Landscapes

Chemical & Material Sciences (AREA)
Chemical Kinetics & Catalysis (AREA)
Engineering & Computer Science (AREA)
Materials Engineering (AREA)
Mechanical Engineering (AREA)
Metallurgy (AREA)
Organic Chemistry (AREA)
Physical Vapour Deposition (AREA)

JP1338382A 1982-02-01 1982-02-01 連続真空蒸着装置 Granted JPS58133375A (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP1338382A JPS58133375A (ja)	1982-02-01	1982-02-01	連続真空蒸着装置

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP1338382A JPS58133375A (ja)	1982-02-01	1982-02-01	連続真空蒸着装置

Publications (2)

Publication Number	Publication Date
JPS58133375A true JPS58133375A (ja)	1983-08-09
JPH029109B2 JPH029109B2 (cs)	1990-02-28

Family

ID=11831565

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP1338382A Granted JPS58133375A (ja)	1982-02-01	1982-02-01	連続真空蒸着装置

Country Status (1)

Country	Link
JP (1)	JPS58133375A (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
EP2103709A1 (en) *	2008-02-28	2009-09-23	Applied Materials, Inc.	Backside coating prevention device and method.

1982
- 1982-02-01 JP JP1338382A patent/JPS58133375A/ja active Granted

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
EP2103709A1 (en) *	2008-02-28	2009-09-23	Applied Materials, Inc.	Backside coating prevention device and method.
WO2009144255A1 (en) *	2008-02-28	2009-12-03	Applied Materials, Inc.	Backside coating prevention device and method

Also Published As

Publication number	Publication date
JPH029109B2 (cs)	1990-02-28

Publication	Publication Date	Title
US4476805A (en)	1984-10-16	Apparatus for coating one side only of steel strip with molten coating metal
JP3779272B2 (ja)	2006-05-24	金属ストリップの浸漬コーティング装置
FR2391779A1 (fr)	1978-12-22	Machine pour l'application d'une couche protectrice sur le joint de soudure des corps de boite
JPS58133375A (ja)	1983-08-09	連続真空蒸着装置
US5496588A (en)	1996-03-05	Method and apparatus for galvanizing linear materials
AU1369888A (en)	1988-09-26	A method for controlling the thickness of an intermetallic layer on a continuous steel product in a continuous hot-dip galvanizing process
BR0100009B1 (pt)	2012-02-07	instalação de revestimento à imersão a quente e em contìnuo de uma cinta metálica.
US5527563A (en)	1996-06-18	Flow coat galvanizing
JPS6179755A (ja)	1986-04-23	溶融めつき真空蒸着めつき兼用の連続めつき装置
JPS5562153A (en)	1980-05-10	Hot dipping unit in two modes
JP2655929B2 (ja)	1997-09-24	金属ストリップの浴上サポートロール装置
JP2999597B2 (ja)	2000-01-17	エッジオーバーコートの防止装置
JPH02298247A (ja)	1990-12-10	溶融金属のメッキ方法
EP0701004B1 (en)	1998-10-28	Method of galvanizing linear materials
US2888901A (en)	1959-06-02	Coating control apparatus
JPS5940237B2 (ja)	1984-09-28	ストリツプのラジアルセル通板めつき法
JPS6036598Y2 (ja)	1985-10-30	連続溶融めつき装置における鋼帯の振れ防止装置
JPH062942B2 (ja)	1994-01-12	真空蒸着装置
JPS5938382A (ja)	1984-03-02	真空蒸着装置
JP2564272Y2 (ja)	1998-03-04	縦向き帯状材表面処理用液槽
JPS6038668Y2 (ja)	1985-11-19	溶融亜鉛メツキ装置
JP2537106B2 (ja)	1996-09-25	可動式槽内流速調整枠付電解処理装置
JPH0533112A (ja)	1993-02-09	合金化溶融亜鉛めつき鋼板の製造方法及び装置
JPH0151544B2 (cs)	1989-11-06
JPS6036600Y2 (ja)	1985-10-30	連続溶融めつき装置における鋼帯の振れ防止装置