JPS58140445U - 静電容量型圧力検出器 - Google Patents

静電容量型圧力検出器

Info

Publication number
JPS58140445U
JPS58140445U JP3714082U JP3714082U JPS58140445U JP S58140445 U JPS58140445 U JP S58140445U JP 3714082 U JP3714082 U JP 3714082U JP 3714082 U JP3714082 U JP 3714082U JP S58140445 U JPS58140445 U JP S58140445U
Authority
JP
Japan
Prior art keywords
flat diaphragm
capacitive pressure
center portion
pressure detector
pressure sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3714082U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6326745Y2 (2
Inventor
昭男 古瀬
古瀬　智之
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Cosmo Instruments Co Ltd
Original Assignee
Cosmo Instruments Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cosmo Instruments Co Ltd filed Critical Cosmo Instruments Co Ltd
Priority to JP3714082U priority Critical patent/JPS58140445U/ja
Publication of JPS58140445U publication Critical patent/JPS58140445U/ja
Application granted granted Critical
Publication of JPS6326745Y2 publication Critical patent/JPS6326745Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP3714082U 1982-03-18 1982-03-18 静電容量型圧力検出器 Granted JPS58140445U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3714082U JPS58140445U (ja) 1982-03-18 1982-03-18 静電容量型圧力検出器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3714082U JPS58140445U (ja) 1982-03-18 1982-03-18 静電容量型圧力検出器

Publications (2)

Publication Number Publication Date
JPS58140445U true JPS58140445U (ja) 1983-09-21
JPS6326745Y2 JPS6326745Y2 (2) 1988-07-20

Family

ID=30048538

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3714082U Granted JPS58140445U (ja) 1982-03-18 1982-03-18 静電容量型圧力検出器

Country Status (1)

Country Link
JP (1) JPS58140445U (2)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5627630A (en) * 1979-08-16 1981-03-18 Matsushita Electric Ind Co Ltd Pressure sensitive element

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5627630A (en) * 1979-08-16 1981-03-18 Matsushita Electric Ind Co Ltd Pressure sensitive element

Also Published As

Publication number Publication date
JPS6326745Y2 (2) 1988-07-20

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