JPS58200567A - Semiconductor integrated circuit device - Google Patents

Semiconductor integrated circuit device

Info

Publication number
JPS58200567A
JPS58200567A JP57083098A JP8309882A JPS58200567A JP S58200567 A JPS58200567 A JP S58200567A JP 57083098 A JP57083098 A JP 57083098A JP 8309882 A JP8309882 A JP 8309882A JP S58200567 A JPS58200567 A JP S58200567A
Authority
JP
Japan
Prior art keywords
bonding pad
output
region
integrated circuit
semiconductor integrated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP57083098A
Other languages
Japanese (ja)
Inventor
Kiwa Yanagiya
柳屋 喜和
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Microcomputer System Ltd
Hitachi Ltd
Original Assignee
Hitachi Ltd
Hitachi Microcomputer Engineering Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd, Hitachi Microcomputer Engineering Ltd filed Critical Hitachi Ltd
Priority to JP57083098A priority Critical patent/JPS58200567A/en
Publication of JPS58200567A publication Critical patent/JPS58200567A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/90Bond pads, in general
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers

Landscapes

  • Wire Bonding (AREA)
  • Bipolar Integrated Circuits (AREA)
  • Bipolar Transistors (AREA)

Abstract

PURPOSE:To contrive to reduce the size of semiconductor chips by a method wherein the collector terminal of an output transistor and a bonding pad are formed within an island region. CONSTITUTION:An N<+> type buried layer 8 in the output transistor element Q1 is extended immediately under the part serving as the bonding pad, and the P<+> diffused layer 9 for isolation is formed in the outer periphery, thus an island region of the same potential is constituted. An N<+> diffused region 10 is extended immediately under the bonding pad and made to contact the N<+> buried layer 8, and accordingly the part of element internal resistance is reduced. The N<+> diffused region 11 for collector electrode take-out is formed also within the same range and insulated by a SiO2 film 12. The output bonding pad is used to take out collector terminal voltage to the outside, and the potentials of the transistor element and the bonding pad are always equal, therefore it is not necessary at a ll to form them in separated island regions.

Description

【発明の詳細な説明】 (8)発明の利用分野 本発明は、半導体集積回路装置、特に′TT L(Tr
ans is ter−Transister−Log
ic)を構成する半導体集積回路装置(以下TTL−I
Cと呼ぶ)に関するものである。
Detailed Description of the Invention (8) Field of Application of the Invention The present invention relates to semiconductor integrated circuit devices, particularly 'TTL (Tr
ans is ter-Transister-Log
IC) constitutes a semiconductor integrated circuit device (hereinafter referred to as TTL-I
(referred to as C).

(bl従来技術 従来、第1図のような出力回路を有するTTしICに於
て、出力段として用いるトランジスタ素子Q、は、第2
図および第3図に示すように、その素子上をグランド配
線(GND)や電源配線(vco)等を通過させるため
、出力トランジスタQ。
(bl Prior Art) Conventionally, in a TT IC having an output circuit as shown in FIG. 1, the transistor element Q used as an output stage is
As shown in the figure and FIG. 3, the output transistor Q is used to pass ground wiring (GND), power supply wiring (VCO), etc. over the element.

の上段にあるダーリントン回路(DC)のエミッタ端子
に接続するためのコレクタ端子1と、出方用ポンデイン
グパツド5に接続するためのコレクタ端子402つの同
電位コレクタ端子が必rとなる。しかも、第3図から明
らかなように、出力ボンディングパッドのための領域6
と、出方トランジスタの領域7とが各々別位置に存在す
る構造となりている。
Two collector terminals with the same potential are required: a collector terminal 1 for connecting to the emitter terminal of the Darlington circuit (DC) in the upper stage of the circuit, and a collector terminal 40 for connecting to the output ponding pad 5. Moreover, as is clear from FIG. 3, the area 6 for the output bonding pad
The structure is such that the region 7 and the region 7 of the output transistor are located at different positions.

このようなこれまでのTTL−ICでは半導体ペレット
上での素子Q1が占有する領域が大きくなる構造である
ため、ペレットサイズが大きくなることが欠点である。
Such conventional TTL-ICs have a structure in which the area occupied by the element Q1 on the semiconductor pellet becomes large, so that the disadvantage is that the pellet size becomes large.

本発明はこのような欠点をなくすため、不必要なスペー
スとなる部分をQIJ除することによってチップサイズ
を小さくできるTTL−ICの提供を目的とする。
In order to eliminate such drawbacks, the present invention aims to provide a TTL-IC whose chip size can be reduced by QIJ-dividing the unnecessary space.

本発明の要旨とするところは、半導体表面に形成された
出力トランジスタのコレクタ端子とポンデイングパツド
を一つの島領域内に形成することにより、半導体チップ
サイズの低減をはがることにある。
The gist of the present invention is to reduce the size of a semiconductor chip by forming a collector terminal and a ponding pad of an output transistor formed on a semiconductor surface within one island region.

以下、本発明を実施例に従って、その内容を具体的に説
明する。
Hereinafter, the present invention will be specifically described in accordance with examples.

第4図、第5図に示すように、ポンディングパッドとな
る部分の直下に出力トランジスタ素子Q。
As shown in FIGS. 4 and 5, the output transistor element Q is placed directly below the portion that will become the bonding pad.

内部のN+ m込層8を延長し、ポンディングパッドと
トランジスタ素子の外周にアイソレージ■ン用P+拡散
層9を形成し、同電位の一つの島領域を構成する。
The internal N+ m-containing layer 8 is extended, and a P+ diffusion layer 9 for isolating is formed around the bonding pad and the outer periphery of the transistor element, thereby forming one island region having the same potential.

この場合N+塊込層8と同様、ポンディングパッド直下
までN+拡散領域10を広げ、r厘込層8に接触させ、
素子内部抵抗分を減少させる。
In this case, similarly to the N+ lump layer 8, the N+ diffusion region 10 is expanded to just below the bonding pad, brought into contact with the r lump layer 8,
Reduce element internal resistance.

また、コレクタ電極取り出し用虻拡散領域11も同範囲
内に形成し、SiQ、l[12により絶縁させた状態で
ポンディングパッド配線を行なう位置にコンタクトホー
ルなあけてコレクタ端子とポンディングパッドとを共有
:したトランジスタ素子を形成する。
In addition, a dovetail diffusion region 11 for taking out the collector electrode is also formed within the same range, and a contact hole is made at the position where the bonding pad wiring is to be performed while insulated by SiQ, L [12] to connect the collector terminal and the bonding pad. Shared: Forms a transistor element.

以上、実施例で述べた本発明によるTTL−ICにおい
て、出力用ポンディングパッドは、トランジスタ素子の
コレクタ端子に生じる電圧を外部へ取り出すためのもの
であり、トランジスタ素子とポンディングパッドの電位
は常に等しい。
As mentioned above, in the TTL-IC according to the present invention described in the embodiments, the output bonding pad is for taking out the voltage generated at the collector terminal of the transistor element to the outside, and the potential of the transistor element and the bonding pad is always equal.

故に、ポンディングパッドとトランジスタ素子を別個の
島領域とする必要性は全くなく、これまでの半導体装置
で用いたレイプラトルールはこの発明の素子の場合には
不要となり、そのためペレットサイズを低減することが
可能となる。という効果が得られる。
Therefore, there is no need for the bonding pad and the transistor element to be separate island regions, and the lay plate rule used in conventional semiconductor devices is unnecessary in the case of the device of the present invention, thereby reducing the pellet size. becomes possible. This effect can be obtained.

本発明はこれ以外に変形例・応用例として、出力インパ
ークトランシスタ素子の面積が大きい素子を使用したバ
ッファ系や、出力趨子数が多いTTL−LSI等に有効
である。
In addition to this, the present invention is also effective in buffer systems using output impact transistor elements having a large area, TTL-LSIs having a large number of output traces, etc. as modifications and applications.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は、TTL−1cの出力回路図である。 #!2図は、第1図の出力回路中の出力トランジンタQ
、を構成する従来の半導体集積回路装置の一部を示す部
分平面図である。 第3図は、第2図に示した半導体集積回路装置のh−A
切断断面図である。 第4図は、出力トランジスタQ1を構成する本発明の半
導体集積回路装置の一部を示す部分平面図である。 第5図は、第4図に示した半導体集積回路装置のB −
B’切断断面図である。 1・・・コレクタ端子、2・・・ベース端子、3・・・
エミッタ端子、4・・・コレクタ端子、5・・・出力用
ポンディングパッド、6・・・出力用ポンディングパッ
ドのための領域、7・・・出力トランジスタ領域、8・
・・N+埋込層、9・・・アイソレージlン用P+拡散
層、lO・・・虻拡散領域、11・・・コレクタ電極取
り出し用N+拡散層、12・・・SiO意属。 代理人 弁理士  薄 1)利 幸 第  1  図 L−−0,−」
FIG. 1 is an output circuit diagram of TTL-1c. #! Figure 2 shows the output transistor Q in the output circuit of Figure 1.
1 is a partial plan view showing a part of a conventional semiconductor integrated circuit device that constitutes a semiconductor integrated circuit device. FIG. 3 shows the h-A of the semiconductor integrated circuit device shown in FIG.
FIG. FIG. 4 is a partial plan view showing a part of the semiconductor integrated circuit device of the present invention that constitutes the output transistor Q1. FIG. 5 shows B − of the semiconductor integrated circuit device shown in FIG.
B' is a cut sectional view. 1... Collector terminal, 2... Base terminal, 3...
Emitter terminal, 4... Collector terminal, 5... Output bonding pad, 6... Area for output bonding pad, 7... Output transistor area, 8...
. . . N+ buried layer, 9 . . . P+ diffusion layer for isolation, 1O . . . Latch diffusion region, 11 . Agent Patent Attorney Susuki 1) Toshiyuki Dai 1 Figure L--0,-"

Claims (1)

【特許請求の範囲】[Claims] 半導体基体表面に形成された一つの島(領域)内に出力
用トランジスタが構成され、その島(領域)上にそのト
ランジスタの所定領域に電気的に接続される出力用ポン
デイングパツドが設けられていることを特徴とする半導
体集積回路装置。
An output transistor is formed within one island (region) formed on the surface of the semiconductor substrate, and an output ponding pad is provided on the island (region) to be electrically connected to a predetermined region of the transistor. A semiconductor integrated circuit device characterized by:
JP57083098A 1982-05-19 1982-05-19 Semiconductor integrated circuit device Pending JPS58200567A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57083098A JPS58200567A (en) 1982-05-19 1982-05-19 Semiconductor integrated circuit device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57083098A JPS58200567A (en) 1982-05-19 1982-05-19 Semiconductor integrated circuit device

Publications (1)

Publication Number Publication Date
JPS58200567A true JPS58200567A (en) 1983-11-22

Family

ID=13792705

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57083098A Pending JPS58200567A (en) 1982-05-19 1982-05-19 Semiconductor integrated circuit device

Country Status (1)

Country Link
JP (1) JPS58200567A (en)

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