JPS58201A - Drying tank for vapor of "flon(r)" - Google Patents
Drying tank for vapor of "flon(r)"Info
- Publication number
- JPS58201A JPS58201A JP9675281A JP9675281A JPS58201A JP S58201 A JPS58201 A JP S58201A JP 9675281 A JP9675281 A JP 9675281A JP 9675281 A JP9675281 A JP 9675281A JP S58201 A JPS58201 A JP S58201A
- Authority
- JP
- Japan
- Prior art keywords
- liquid
- flon
- water
- fluorocarbon
- vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Drying Of Solid Materials (AREA)
- Extraction Or Liquid Replacement (AREA)
Abstract
Description
【発明の詳細な説明】
この兜明はフロン蒸気乾燥槽に関するものである。フロ
ン蒸気乾燥mFi超音波洗浄した精密す5・
部品の乾燥の為多く使用されているが、フロン液中に水
、アルコール等が混入し、これにょっ―
て被洗浄物にシミが付くことがあった。 〜第1図は従
来の代表的なフロン蒸気乾燥槽であり、槽本体1の下部
にはフロン液2が溜められており、この槽本体1の下面
に配設されたヒーター3によって、このフロン液2が加
温され蒸気を発生させる様になっていた。そして乾燥を
行うべき被洗浄物4は槽本体1の内部中央に位置される
様になっており、この被洗浄物4のる様になっていた。DETAILED DESCRIPTION OF THE INVENTION This article relates to a fluorocarbon vapor drying tank. Freon Vapor Drying mFi Ultrasonic Cleaned Precision Stool 5. It is often used for drying parts, but water, alcohol, etc. get mixed into the Freon liquid, and this can cause stains on the items being cleaned. there were. - Figure 1 shows a typical conventional fluorocarbon vapor drying tank, in which a fluorocarbon liquid 2 is stored at the bottom of the tank body 1, and a heater 3 disposed on the bottom of the tank body 1 removes this fluorocarbon. Liquid 2 was heated to generate steam. The object to be cleaned 4 to be dried is placed in the center of the tank body 1, and the object to be cleaned 4 is placed thereon.
更に槽本体1の上部側壁には冷却水を通した凝縮バイブ
ロが配役されてお様になっていた。そして前記受皿5、
及び71でフロン液とそれ以外のものに比重差により分
離され、フロン液のみが槽内に還流されf様になってい
た。Furthermore, a condensing vibro through which cooling water was passed was arranged on the upper side wall of the tank body 1. and the saucer 5,
At 71 and 71, the fluorocarbon liquid and other substances were separated due to the difference in specific gravity, and only the fluorocarbon liquid was refluxed into the tank, resulting in a condition similar to f.
し−i−Lこの従来σ50ン蒸気洗浄槽では−被洗浄物
4、及び凝縮コイル乙に凝縮した水分や被洗浄5勿4に
付着していたアルコール等の洗浄液が受皿5,7に滴下
する除その飛沫が構内のフロン液2中に落下したり、槽
の側壁に結露した水分が構内のフロン液2中に混入する
ことは避けられず、この槽内のフロン液2から水や洗浄
液を分離する手段も存在していなかった為、時間の経過
と共に構内のフロン液2中に次第にこれらが蓄積されそ
の量が増加することとなっていた。In this conventional steam cleaning tank, moisture condensed on the object to be cleaned 4 and the condensing coil B, and cleaning liquid such as alcohol adhering to the object to be cleaned 5 and 4 drip onto the trays 5 and 7. It is unavoidable that droplets from the removal fall into the Freon liquid 2 on the premises, and that water condensed on the side walls of the tank mixes with the Freon liquid 2 on the premises. Since there was no means to separate them, these were gradually accumulated in the fluorocarbon solution 2 in the premises and the amount thereof increased over time.
従って、この従来の装・直ではヒーター5の力0熱によ
ってフロン液中に混入した水や洗浄液も蒸発し、これら
が被洗浄′切4にシミを付ける原因となっていた。Therefore, in this conventional mounting/direction method, water and cleaning liquid mixed in the fluorocarbon liquid are also evaporated by the zero heat of the heater 5, which causes stains on the cutter 4 to be cleaned.
この祐明はフロン蒸気乾燥槽に関する上記欠点金除去し
たものであり、フロン液をポンプ循環によりオーバーフ
ローさせて水分離器に強制に送り込み、フロン液中の水
分及び洗浄液を水分離器で除き、フロン蒸気のみを発生
させる様にしたものであり、被洗浄物にシミを付けるこ
となく乾燥を行うことができるすぐれたフロン蒸気乾燥
槽を提供することを目的とする。・以下第2図に示すこ
の発明の一実施例に基づいてその構成を詳細に説明する
。This Yumei eliminates the above-mentioned drawbacks of the fluorocarbon vapor drying tank.The fluorocarbon liquid is overflowed by pump circulation and is forcibly sent to the water separator, and the water and cleaning liquid in the fluorocarbon liquid are removed by the water separator. To provide an excellent fluorocarbon vapor drying tank which is designed to generate only steam and can dry objects to be cleaned without staining them. - Hereinafter, the configuration will be explained in detail based on an embodiment of the present invention shown in FIG.
凝縮コイル6の下方に位置する受皿7をパイプ9で水分
離器10に連通させ、被乾燥物4下方の受皿5はパイプ
11で水分離器10に連通液面と同じ高式に取水部12
を設けてオーバーフローしたフロン液を受入れるように
なっており、この取水部12は・くイブ12′で水分離
器10と連通させている0又、取水部12と対向した側
壁には液面に開口した吐出孔13が設けられており、そ
してこの吐出孔13はフィルター14及び加圧用ポンプ
15を介して前配水分離器10の排出孔16に接続され
ている。A saucer 7 located below the condensing coil 6 is communicated with a water separator 10 via a pipe 9, and a saucer 5 below the material to be dried 4 is communicated with a water separator 10 via a pipe 11.
This water intake part 12 is connected to the water separator 10 through a pipe 12', and the side wall facing the water intake part 12 has a wall that is connected to the liquid level. An open discharge hole 13 is provided, and this discharge hole 13 is connected via a filter 14 and a pressurizing pump 15 to a discharge hole 16 of the pre-water separator 10 .
なお、前記水分離器10はフロンと他の液体の比重差を
利用して分離を行なう比重差式水分離器であり、17.
18は入水側と排出側を分ける隔壁である。他は従来と
同様なので、同一符号を付し説明を省略する。Note that the water separator 10 is a specific gravity type water separator that performs separation using the difference in specific gravity between Freon and other liquids, and 17.
18 is a partition wall that separates the water inlet side and the discharge side. Since the rest is the same as the conventional one, the same reference numerals are given and the explanation is omitted.
この発明は紙上の襟な構成を再するものであり、従来の
ものと同様槽本体1下部のフロン液2fcヒーター3で
加温してフロン蒸気を発生きせこの蒸気によって洗浄工
程を終えた被洗浄物4を乾燥でせる。そして凝縮コイル
6及び被洗浄#4に触れて凝縮したフロン液及び水分は
受皿5,7で捕収され、水分離器10に送られフロン液
と水、洗浄液が分離されるフロン液のみがポンプ15に
よって加圧され、フィルター14によって濾過され吐出
孔16から槽1内のフロン液面に吐出される。This invention recreates the structure described in the paper, and similar to the conventional one, the fluorocarbon liquid 2 at the bottom of the tank body 1 is heated by the FC heater 3 to generate fluorocarbon vapor. Dry item 4. The fluorocarbon liquid and water that condensed on contact with the condensing coil 6 and #4 to be cleaned are collected in the trays 5 and 7, and sent to the water separator 10 where the fluorocarbon liquid, water, and cleaning liquid are separated. Only the fluorocarbon liquid is pumped. 15 , filtered by a filter 14 , and discharged from a discharge hole 16 onto the surface of the fluorocarbon liquid in the tank 1 .
一方、フロンは水や洗浄液より比重が極めて大きく、水
や洗浄液が混入(7ている場合はこれらはフロン液の上
部に浮んで鷹をなしているので、明記のように圧送され
たフロン液を吐出孔13から吐出させるとフロン液面上
に浮上している水と洗浄液はフロン液の上面を取水部1
2の方向へ押し流され、この取水部12で捕収され、水
分離器10に送られ分離が行われ、フロン液のみが槽本
体1へ還流される。On the other hand, Freon has a much higher specific gravity than water or cleaning liquid, and if water or cleaning liquid is mixed in (7), these will float on top of the Freon liquid and form a hawk. When discharged from the discharge hole 13, the water floating on the surface of the fluorocarbon liquid and the cleaning liquid are transferred to the upper surface of the fluorocarbon liquid at the water intake part 1.
2, is collected by the water intake part 12, and sent to the water separator 10 for separation, and only the fluorocarbon liquid is returned to the tank body 1.
従って被洗浄物に付着した洗浄液や凝縮した水分が受皿
に衝突して飛沫となって槽本体のフロン液中に落下し7
たり、凝縮コイルや槽本体の側壁に水分が凝縮してフロ
ン液中に滴下してフロン液中に水や洗浄液等の不純物が
混入してもこれらの不純物は絶えずフロン液から分離は
れる為、極めて純度の高いフロン蒸気を発生させること
ができ、従来の゛フロン蒸気乾燥槽の様に被洗浄物にシ
ミを付けることなく乾燥を行うことができるすぐれた効
果を有するものである・Therefore, the cleaning liquid and condensed water adhering to the object to be cleaned collide with the saucer, become droplets, and fall into the Freon liquid in the tank body.
Even if water condenses on the condensing coil or the side wall of the tank body and drips into the Freon liquid, and impurities such as water or cleaning liquid get mixed into the Freon liquid, these impurities are constantly separated from the Freon liquid. It can generate extremely high-purity fluorocarbon vapor, and has the excellent effect of drying the items to be cleaned without staining them, unlike conventional ``fluorocarbon vapor drying tanks.''
第1図は従来のフロン蒸気乾燥槽の断面図、第2図はこ
の発明の一実施例の断面図である。
父、図中1は乾燥槽本体、2はフロン液、3はヒーター
′、4は被洗浄物、5は受皿、6は凝縮コイル、7は受
皿、8は水分離器、9はパイプ、10は水分離器、11
はパイプ、12は取水部、13は吐出孔、14はフィル
ター、15は加圧用ポンプ、−16は排出孔、17は隔
壁を夫々表わす。
特許出願人 島田理化工業株式会社
第1図
第2図FIG. 1 is a sectional view of a conventional fluorocarbon vapor drying tank, and FIG. 2 is a sectional view of an embodiment of the present invention. In the figure, 1 is the drying tank body, 2 is the Freon liquid, 3 is the heater', 4 is the object to be cleaned, 5 is the saucer, 6 is the condensing coil, 7 is the saucer, 8 is the water separator, 9 is the pipe, 10 is a water separator, 11
12 is a pipe, 12 is a water intake part, 13 is a discharge hole, 14 is a filter, 15 is a pressurizing pump, -16 is a discharge hole, and 17 is a partition wall. Patent applicant Shimada Rika Kogyo Co., Ltd. Figure 1 Figure 2
Claims (1)
ロン蒸気を発生させ、槽内の被洗浄物4を乾燥させ、被
洗浄物4の下方に位tiシた受皿5及び上部の凝縮コイ
ル6の下方に位置し九受皿7を水分離器10に連通させ
たフロン蒸気乾燥槽において、フロン液2の液面と同じ
高ざの一側にオーバーフローしたフロン液を受は加圧ポ
ンプ15を介して連通ずる吐出孔13を開口したことを
特徴とするフロン蒸気乾燥槽。A fluorocarbon solution 2 is stored in the lower part of the tank body 1, heated to generate fluorocarbon vapor, and the object 4 to be cleaned in the tank is dried. In a fluorocarbon vapor drying tank located below the condensing coil 6 and having a nine receiving tray 7 connected to a water separator 10, the overflowing fluorocarbon liquid is pressurized on one side at the same height as the liquid level of the fluorocarbon liquid 2. A fluorocarbon vapor drying tank characterized in that a discharge hole 13 is opened and communicated with through a pump 15.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9675281A JPS595326B2 (en) | 1981-06-24 | 1981-06-24 | Steam drying tank using fluorinated chlorinated hydrocarbons |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9675281A JPS595326B2 (en) | 1981-06-24 | 1981-06-24 | Steam drying tank using fluorinated chlorinated hydrocarbons |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58201A true JPS58201A (en) | 1983-01-05 |
| JPS595326B2 JPS595326B2 (en) | 1984-02-03 |
Family
ID=14173393
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9675281A Expired JPS595326B2 (en) | 1981-06-24 | 1981-06-24 | Steam drying tank using fluorinated chlorinated hydrocarbons |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS595326B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07222902A (en) * | 1994-02-15 | 1995-08-22 | Tokyo Electron Ltd | Processor |
| JPH11285601A (en) * | 1999-02-05 | 1999-10-19 | Tokyo Electron Ltd | Processing equipment |
-
1981
- 1981-06-24 JP JP9675281A patent/JPS595326B2/en not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07222902A (en) * | 1994-02-15 | 1995-08-22 | Tokyo Electron Ltd | Processor |
| JPH11285601A (en) * | 1999-02-05 | 1999-10-19 | Tokyo Electron Ltd | Processing equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS595326B2 (en) | 1984-02-03 |
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