JPS5820536U - 半導体装置 - Google Patents
半導体装置Info
- Publication number
- JPS5820536U JPS5820536U JP1981116358U JP11635881U JPS5820536U JP S5820536 U JPS5820536 U JP S5820536U JP 1981116358 U JP1981116358 U JP 1981116358U JP 11635881 U JP11635881 U JP 11635881U JP S5820536 U JPS5820536 U JP S5820536U
- Authority
- JP
- Japan
- Prior art keywords
- bonded
- semiconductor equipment
- alloy
- holding plate
- main surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/30—Die-attach connectors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W70/00—Package substrates; Interposers; Redistribution layers [RDL]
- H10W70/60—Insulating or insulated package substrates; Interposers; Redistribution layers
- H10W70/67—Insulating or insulated package substrates; Interposers; Redistribution layers characterised by their insulating layers or insulating parts
- H10W70/68—Shapes or dispositions thereof
- H10W70/681—Shapes or dispositions thereof comprising holes not having chips therein, e.g. for outgassing, underfilling or bond wire passage
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/073—Connecting or disconnecting of die-attach connectors
- H10W72/07351—Connecting or disconnecting of die-attach connectors characterised by changes in properties of the die-attach connectors during connecting
- H10W72/07353—Connecting or disconnecting of die-attach connectors characterised by changes in properties of the die-attach connectors during connecting changes in shapes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/30—Die-attach connectors
- H10W72/331—Shapes of die-attach connectors
- H10W72/334—Cross-sectional shape, i.e. in side view
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/90—Bond pads, in general
- H10W72/931—Shapes of bond pads
Landscapes
- Die Bonding (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
め要約のデータは記録されません。
Description
第1図は従来の電力用半導体素子の要部断面図、第2図
Aはこの考案の一実施例の要部断面図、第2図Bはこの
実施例に用いる基板保持板の斜視図、第3図はこの実施
例の完成品の断面図である。 図において、1はSiウェハー(半導体基板)、3はろ
う材、5は基板保持板、6は貫通孔である。 なお、図中同一符号は同一または相当部分を示す。
Aはこの考案の一実施例の要部断面図、第2図Bはこの
実施例に用いる基板保持板の斜視図、第3図はこの実施
例の完成品の断面図である。 図において、1はSiウェハー(半導体基板)、3はろ
う材、5は基板保持板、6は貫通孔である。 なお、図中同一符号は同一または相当部分を示す。
Claims (1)
- 半導体基板と、金属からなり上記半導体基板を保持する
基板保持板とをろう材を介して合金固着してなるものに
おいて、上記基板保持板にその一方の主面から他方の主
面に達己上記合金固着時に上記ろう材から発生するガス
を放出させる置溝孔を設けたことを特徴とする半導体装
置。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981116358U JPS5820536U (ja) | 1981-08-03 | 1981-08-03 | 半導体装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1981116358U JPS5820536U (ja) | 1981-08-03 | 1981-08-03 | 半導体装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5820536U true JPS5820536U (ja) | 1983-02-08 |
Family
ID=29910583
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1981116358U Pending JPS5820536U (ja) | 1981-08-03 | 1981-08-03 | 半導体装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5820536U (ja) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6376461A (ja) * | 1986-09-19 | 1988-04-06 | Hitachi Ltd | 半導体装置の製造方法 |
| JPH0390855U (ja) * | 1989-12-28 | 1991-09-17 | ||
| JP2013179103A (ja) * | 2012-02-28 | 2013-09-09 | Nissan Motor Co Ltd | 半導体装置の製造方法 |
-
1981
- 1981-08-03 JP JP1981116358U patent/JPS5820536U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6376461A (ja) * | 1986-09-19 | 1988-04-06 | Hitachi Ltd | 半導体装置の製造方法 |
| JPH0390855U (ja) * | 1989-12-28 | 1991-09-17 | ||
| JP2013179103A (ja) * | 2012-02-28 | 2013-09-09 | Nissan Motor Co Ltd | 半導体装置の製造方法 |
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