JPS5846153U - 半導体単結晶軸合わせ装置 - Google Patents

半導体単結晶軸合わせ装置

Info

Publication number
JPS5846153U
JPS5846153U JP1981142952U JP14295281U JPS5846153U JP S5846153 U JPS5846153 U JP S5846153U JP 1981142952 U JP1981142952 U JP 1981142952U JP 14295281 U JP14295281 U JP 14295281U JP S5846153 U JPS5846153 U JP S5846153U
Authority
JP
Japan
Prior art keywords
crystal
plane
light
screen
reflecting mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1981142952U
Other languages
English (en)
Japanese (ja)
Other versions
JPS643064Y2 (2
Inventor
研二 丸山
伊藤　道春
吉河　満男
知史 上田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP1981142952U priority Critical patent/JPS5846153U/ja
Publication of JPS5846153U publication Critical patent/JPS5846153U/ja
Application granted granted Critical
Publication of JPS643064Y2 publication Critical patent/JPS643064Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP1981142952U 1981-09-25 1981-09-25 半導体単結晶軸合わせ装置 Granted JPS5846153U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981142952U JPS5846153U (ja) 1981-09-25 1981-09-25 半導体単結晶軸合わせ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981142952U JPS5846153U (ja) 1981-09-25 1981-09-25 半導体単結晶軸合わせ装置

Publications (2)

Publication Number Publication Date
JPS5846153U true JPS5846153U (ja) 1983-03-28
JPS643064Y2 JPS643064Y2 (2) 1989-01-26

Family

ID=29935963

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981142952U Granted JPS5846153U (ja) 1981-09-25 1981-09-25 半導体単結晶軸合わせ装置

Country Status (1)

Country Link
JP (1) JPS5846153U (2)

Also Published As

Publication number Publication date
JPS643064Y2 (2) 1989-01-26

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