JPS586149A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS586149A
JPS586149A JP56103529A JP10352981A JPS586149A JP S586149 A JPS586149 A JP S586149A JP 56103529 A JP56103529 A JP 56103529A JP 10352981 A JP10352981 A JP 10352981A JP S586149 A JPS586149 A JP S586149A
Authority
JP
Japan
Prior art keywords
insulating film
film
conductive film
semiconductor device
semiconductor substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56103529A
Other languages
English (en)
Japanese (ja)
Other versions
JPS637463B2 (de
Inventor
Kunio Aomura
青村　國男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP56103529A priority Critical patent/JPS586149A/ja
Publication of JPS586149A publication Critical patent/JPS586149A/ja
Publication of JPS637463B2 publication Critical patent/JPS637463B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Drying Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP56103529A 1981-07-02 1981-07-02 半導体装置の製造方法 Granted JPS586149A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56103529A JPS586149A (ja) 1981-07-02 1981-07-02 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56103529A JPS586149A (ja) 1981-07-02 1981-07-02 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS586149A true JPS586149A (ja) 1983-01-13
JPS637463B2 JPS637463B2 (de) 1988-02-17

Family

ID=14356416

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56103529A Granted JPS586149A (ja) 1981-07-02 1981-07-02 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS586149A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01125882A (ja) * 1987-08-21 1989-05-18 Nippon Denso Co Ltd 磁気検出装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52156375A (en) * 1976-06-22 1977-12-26 Nippon Electric Co Method of producing multilayer circuit substrate

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52156375A (en) * 1976-06-22 1977-12-26 Nippon Electric Co Method of producing multilayer circuit substrate

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01125882A (ja) * 1987-08-21 1989-05-18 Nippon Denso Co Ltd 磁気検出装置

Also Published As

Publication number Publication date
JPS637463B2 (de) 1988-02-17

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