JPS5870541A - 集積回路の不良解析装置 - Google Patents

集積回路の不良解析装置

Info

Publication number
JPS5870541A
JPS5870541A JP56168840A JP16884081A JPS5870541A JP S5870541 A JPS5870541 A JP S5870541A JP 56168840 A JP56168840 A JP 56168840A JP 16884081 A JP16884081 A JP 16884081A JP S5870541 A JPS5870541 A JP S5870541A
Authority
JP
Japan
Prior art keywords
data
circuit
integrated circuit
logical circuit
stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56168840A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0126536B2 (2
Inventor
Yoshiaki Goto
後藤　善朗
Akio Ito
昭夫 伊藤
Yasuo Furukawa
古川　泰男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP56168840A priority Critical patent/JPS5870541A/ja
Publication of JPS5870541A publication Critical patent/JPS5870541A/ja
Publication of JPH0126536B2 publication Critical patent/JPH0126536B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices

Landscapes

  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP56168840A 1981-10-23 1981-10-23 集積回路の不良解析装置 Granted JPS5870541A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56168840A JPS5870541A (ja) 1981-10-23 1981-10-23 集積回路の不良解析装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56168840A JPS5870541A (ja) 1981-10-23 1981-10-23 集積回路の不良解析装置

Publications (2)

Publication Number Publication Date
JPS5870541A true JPS5870541A (ja) 1983-04-27
JPH0126536B2 JPH0126536B2 (2) 1989-05-24

Family

ID=15875495

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56168840A Granted JPS5870541A (ja) 1981-10-23 1981-10-23 集積回路の不良解析装置

Country Status (1)

Country Link
JP (1) JPS5870541A (2)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6117075A (ja) * 1984-05-09 1986-01-25 ステイフテルセン　インスチツテツト　フオ−　ミクロベ−グステクニツク　ビツド　テクニスカ　ホ−グスコラン　アイ　ストツクホルム 集積回路の検査法
JPS61180445A (ja) * 1984-10-12 1986-08-13 イーツエーテー、インテグレイテツド、サーキツト、テスチング、ゲゼルシヤフト、フユア、ハルプライタープリユーフテヒニク、ミツト、ベシユレンクテル、ハフツング 集積回路の欠陥分析方法
JPS62276848A (ja) * 1985-11-15 1987-12-01 フエアチヤイルド　セミコンダクタコ−ポレ−シヨン 電子ビームテストプローブ方法及び装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS518314A (en) * 1974-07-11 1976-01-23 Sumitomo Shipbuild Machinery Sementokurinkaano seizohoho
JPS5596560U (2) * 1978-12-27 1980-07-04

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS518314A (en) * 1974-07-11 1976-01-23 Sumitomo Shipbuild Machinery Sementokurinkaano seizohoho
JPS5596560U (2) * 1978-12-27 1980-07-04

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6117075A (ja) * 1984-05-09 1986-01-25 ステイフテルセン　インスチツテツト　フオ−　ミクロベ−グステクニツク　ビツド　テクニスカ　ホ−グスコラン　アイ　ストツクホルム 集積回路の検査法
JPS61180445A (ja) * 1984-10-12 1986-08-13 イーツエーテー、インテグレイテツド、サーキツト、テスチング、ゲゼルシヤフト、フユア、ハルプライタープリユーフテヒニク、ミツト、ベシユレンクテル、ハフツング 集積回路の欠陥分析方法
JPS62276848A (ja) * 1985-11-15 1987-12-01 フエアチヤイルド　セミコンダクタコ−ポレ−シヨン 電子ビームテストプローブ方法及び装置

Also Published As

Publication number Publication date
JPH0126536B2 (2) 1989-05-24

Similar Documents

Publication Publication Date Title
US4706019A (en) Electron beam test probe system for analyzing integrated circuits
US4761607A (en) Apparatus and method for inspecting semiconductor devices
US5592100A (en) Method for detecting an IC defect using charged particle beam
US6373565B1 (en) Method and apparatus to detect a flaw in a surface of an article
US5204912A (en) Defect verification and marking system for use with printed circuit boards
JP2907146B2 (ja) メモリｌｓｉの特定箇所探索方法および探索装置
US20080040064A1 (en) Surface inspection apparatus and surface inspection method
US20070047800A1 (en) Method and apparatus for inspecting defects of circuit patterns
JP2571245B2 (ja) 表面検査装置
JPS5870541A (ja) 集積回路の不良解析装置
KR900002690B1 (ko) 반도체 집적회로 장치의 노출 패턴 데이타 조사 시스템
US5164666A (en) Method and apparatus for analyzing errors in integrated circuits
JP2002066771A (ja) レーザ装置
US6281024B1 (en) Semiconductor device inspection and analysis method and its apparatus and a method for manufacturing a semiconductor device
GB2069152A (en) Integrated circuit testing
JPH11325859A (ja) バンプ外観検査方法及び装置
JP2894078B2 (ja) 集積回路装置の故障解析装置及び故障解析方法
US6294918B1 (en) Method for locating weak circuit having insufficient driving current in IC chips
JPS5870542A (ja) 集積回路の不良解析装置
JPH0445046B2 (2)
JPS6211136A (ja) 異物検査装置
KR20250050739A (ko) 학습기반 다이 투 다이 마스크 검사 장치 및 방법
JPS61270841A (ja) 半導体ウエハの検査装置
JPS6314496B2 (2)
JPH0321881A (ja) Ｌｓｉ診断装置