JPS5892746U - 半導体圧力変換器 - Google Patents

半導体圧力変換器

Info

Publication number
JPS5892746U
JPS5892746U JP18624881U JP18624881U JPS5892746U JP S5892746 U JPS5892746 U JP S5892746U JP 18624881 U JP18624881 U JP 18624881U JP 18624881 U JP18624881 U JP 18624881U JP S5892746 U JPS5892746 U JP S5892746U
Authority
JP
Japan
Prior art keywords
pressure transducer
substrate
semiconductor pressure
diaphragm
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP18624881U
Other languages
English (en)
Other versions
JPS6246277Y2 (ja
Inventor
山内　治男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azbil Corp
Original Assignee
Azbil Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Azbil Corp filed Critical Azbil Corp
Priority to JP18624881U priority Critical patent/JPS5892746U/ja
Publication of JPS5892746U publication Critical patent/JPS5892746U/ja
Application granted granted Critical
Publication of JPS6246277Y2 publication Critical patent/JPS6246277Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。

Description

【図面の簡単な説明】
第１図ａおよびｂは従来の半導体圧力変換器の一例を示
す平面図および側断面図、第２図ａおよびｂは本考案の
一実施例を示す平面図および側断面図、第３図〜第８図
はそれぞれ本考案の他の実施例における静電接合用電極
を示す平面図、第９図ａおよびｂは本考案の更に他の実
施例を示す平・面図および断面図である。

Claims (1)

    【実用新案登録請求の範囲】
  1. ピエゾ抵抗領域を有するダイヤフラムおよびこのダイヤ
    フラム周縁部を支持する拘束部からなる半導体基板を前
    記拘束部において高温で固体電解質として作用する絶縁
    材からなる支持部に静電接合してなる半導体圧力変換器
    において、前記基板、周縁部に設ける静電接合用電極も
    しくはこれに接続して前記基板内に形彫する高導電性の
    接続部を、当該基板と前記支持部との接合面全体に対し
    てほぼ均等な分布となるように配置したことを特徴とす
    る半導体圧力変換器。
JP18624881U 1981-12-16 1981-12-16 半導体圧力変換器 Granted JPS5892746U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18624881U JPS5892746U (ja) 1981-12-16 1981-12-16 半導体圧力変換器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18624881U JPS5892746U (ja) 1981-12-16 1981-12-16 半導体圧力変換器

Publications (2)

Publication Number Publication Date
JPS5892746U true JPS5892746U (ja) 1983-06-23
JPS6246277Y2 JPS6246277Y2 (ja) 1987-12-12

Family

ID=29988026

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18624881U Granted JPS5892746U (ja) 1981-12-16 1981-12-16 半導体圧力変換器

Country Status (1)

Country Link
JP (1) JPS5892746U (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59150480A (ja) * 1983-02-04 1984-08-28 Toshiba Corp 半導体圧力変換装置
JP2013002942A (ja) * 2011-06-16 2013-01-07 Honda Motor Co Ltd 力覚センサチップ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54131892A (en) * 1978-04-05 1979-10-13 Hitachi Ltd Semiconductor pressure converter

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54131892A (en) * 1978-04-05 1979-10-13 Hitachi Ltd Semiconductor pressure converter

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59150480A (ja) * 1983-02-04 1984-08-28 Toshiba Corp 半導体圧力変換装置
JP2013002942A (ja) * 2011-06-16 2013-01-07 Honda Motor Co Ltd 力覚センサチップ

Also Published As

Publication number Publication date
JPS6246277Y2 (ja) 1987-12-12

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