JPS5896871A - 真空蒸着装置の溶融金属蒸発炉 - Google Patents

真空蒸着装置の溶融金属蒸発炉

Info

Publication number: JPS5896871A
Authority: JP; Japan
Prior art keywords: furnace; zinc; heater; rate; vapor deposition
Prior art date: 1981-12-03
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP19368281A

Other languages

English (en)

Japanese (ja)

Other versions

JPH029106B2 (2

Inventor

Kenichi Yanagi

謙一柳

Toshio Taguchi

田口　俊夫

Naoyuki Hirazakura

平桜　直之

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Mitsubishi Heavy Industries Ltd

Original Assignee

Mitsubishi Heavy Industries Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1981-12-03

Filing date

1981-12-03

Publication date

1983-06-09

1981-12-03 Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd

1981-12-03 Priority to JP19368281A priority Critical patent/JPS5896871A/ja

1983-06-09 Publication of JPS5896871A publication Critical patent/JPS5896871A/ja

1990-02-28 Publication of JPH029106B2 publication Critical patent/JPH029106B2/ja

Status Granted legal-status Critical Current

Links

238000001771 vacuum deposition Methods 0.000 title abstract description 4
238000010438 heat treatment Methods 0.000 claims abstract description 12
OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 11
229910052799 carbon Inorganic materials 0.000 claims abstract description 11
238000007738 vacuum evaporation Methods 0.000 claims description 2
HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 abstract description 22
239000011701 zinc Substances 0.000 abstract description 22
229910052725 zinc Inorganic materials 0.000 abstract description 22
238000007740 vapor deposition Methods 0.000 abstract description 13
229910000831 Steel Inorganic materials 0.000 abstract description 7
239000007788 liquid Substances 0.000 abstract description 7
239000010959 steel Substances 0.000 abstract description 7
238000001704 evaporation Methods 0.000 abstract description 4
230000008020 evaporation Effects 0.000 abstract description 4
230000015572 biosynthetic process Effects 0.000 abstract description 2
239000002344 surface layer Substances 0.000 abstract description 2
230000004043 responsiveness Effects 0.000 abstract 1
238000000034 method Methods 0.000 description 7
RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 6
229910052802 copper Inorganic materials 0.000 description 6
239000010949 copper Substances 0.000 description 6
238000007747 plating Methods 0.000 description 4
238000010521 absorption reaction Methods 0.000 description 3
239000003795 chemical substances by application Substances 0.000 description 2
238000000151 deposition Methods 0.000 description 2
230000008021 deposition Effects 0.000 description 2
238000009835 boiling Methods 0.000 description 1
239000000919 ceramic Substances 0.000 description 1
238000007796 conventional method Methods 0.000 description 1
230000007797 corrosion Effects 0.000 description 1
238000005260 corrosion Methods 0.000 description 1
230000007547 defect Effects 0.000 description 1
230000000694 effects Effects 0.000 description 1
238000009713 electroplating Methods 0.000 description 1
238000005246 galvanizing Methods 0.000 description 1
239000011810 insulating material Substances 0.000 description 1
230000006641 stabilisation Effects 0.000 description 1
238000011105 stabilization Methods 0.000 description 1

Classifications

- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material

Landscapes

Chemical & Material Sciences (AREA)
Chemical Kinetics & Catalysis (AREA)
Engineering & Computer Science (AREA)
Materials Engineering (AREA)
Mechanical Engineering (AREA)
Metallurgy (AREA)
Organic Chemistry (AREA)
Physical Vapour Deposition (AREA)

JP19368281A 1981-12-03 1981-12-03 真空蒸着装置の溶融金属蒸発炉 Granted JPS5896871A (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP19368281A JPS5896871A (ja)	1981-12-03	1981-12-03	真空蒸着装置の溶融金属蒸発炉

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP19368281A JPS5896871A (ja)	1981-12-03	1981-12-03	真空蒸着装置の溶融金属蒸発炉

Publications (2)

Publication Number	Publication Date
JPS5896871A true JPS5896871A (ja)	1983-06-09
JPH029106B2 JPH029106B2 (2)	1990-02-28

Family

ID=16312027

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP19368281A Granted JPS5896871A (ja)	1981-12-03	1981-12-03	真空蒸着装置の溶融金属蒸発炉

Country Status (1)

Country	Link
JP (1)	JPS5896871A (2)

1981
- 1981-12-03 JP JP19368281A patent/JPS5896871A/ja active Granted

Also Published As

Publication number	Publication date
JPH029106B2 (2)	1990-02-28

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