JPS5910232A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS5910232A
JPS5910232A JP57119310A JP11931082A JPS5910232A JP S5910232 A JPS5910232 A JP S5910232A JP 57119310 A JP57119310 A JP 57119310A JP 11931082 A JP11931082 A JP 11931082A JP S5910232 A JPS5910232 A JP S5910232A
Authority
JP
Japan
Prior art keywords
type
layer
scribe line
region
insulating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57119310A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6343893B2 (it
Inventor
Nobuaki Yamamori
山盛　信彰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP57119310A priority Critical patent/JPS5910232A/ja
Publication of JPS5910232A publication Critical patent/JPS5910232A/ja
Publication of JPS6343893B2 publication Critical patent/JPS6343893B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)
  • Local Oxidation Of Silicon (AREA)
JP57119310A 1982-07-09 1982-07-09 半導体装置の製造方法 Granted JPS5910232A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57119310A JPS5910232A (ja) 1982-07-09 1982-07-09 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57119310A JPS5910232A (ja) 1982-07-09 1982-07-09 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS5910232A true JPS5910232A (ja) 1984-01-19
JPS6343893B2 JPS6343893B2 (it) 1988-09-01

Family

ID=14758263

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57119310A Granted JPS5910232A (ja) 1982-07-09 1982-07-09 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS5910232A (it)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0286892U (it) * 1988-12-26 1990-07-10

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49114367A (it) * 1973-02-28 1974-10-31

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49114367A (it) * 1973-02-28 1974-10-31

Also Published As

Publication number Publication date
JPS6343893B2 (it) 1988-09-01

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