JPS5913607A - 金属窒化物薄膜の製造方法 - Google Patents

金属窒化物薄膜の製造方法

Info

Publication number
JPS5913607A
JPS5913607A JP11991382A JP11991382A JPS5913607A JP S5913607 A JPS5913607 A JP S5913607A JP 11991382 A JP11991382 A JP 11991382A JP 11991382 A JP11991382 A JP 11991382A JP S5913607 A JPS5913607 A JP S5913607A
Authority
JP
Japan
Prior art keywords
nitride film
nitrogen
hydrogen
thin metallic
metallic nitride
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11991382A
Other languages
English (en)
Japanese (ja)
Other versions
JPS629667B2 (de
Inventor
Shuichi Kanamori
金森　周一
Tadashi Matsumoto
忠 松本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP11991382A priority Critical patent/JPS5913607A/ja
Publication of JPS5913607A publication Critical patent/JPS5913607A/ja
Publication of JPS629667B2 publication Critical patent/JPS629667B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C23C14/0057—Reactive sputtering using reactive gases other than O2, H2O, N2, NH3 or CH4

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
JP11991382A 1982-07-12 1982-07-12 金属窒化物薄膜の製造方法 Granted JPS5913607A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11991382A JPS5913607A (ja) 1982-07-12 1982-07-12 金属窒化物薄膜の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11991382A JPS5913607A (ja) 1982-07-12 1982-07-12 金属窒化物薄膜の製造方法

Publications (2)

Publication Number Publication Date
JPS5913607A true JPS5913607A (ja) 1984-01-24
JPS629667B2 JPS629667B2 (de) 1987-03-02

Family

ID=14773287

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11991382A Granted JPS5913607A (ja) 1982-07-12 1982-07-12 金属窒化物薄膜の製造方法

Country Status (1)

Country Link
JP (1) JPS5913607A (de)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04365965A (ja) * 1991-06-12 1992-12-17 Toyota Autom Loom Works Ltd エンジンの保護装置
JPH0514217U (ja) * 1991-08-07 1993-02-23 日本機械工業株式会社 傾斜スライド式洗掘防止装置
JPH0514218U (ja) * 1991-08-08 1993-02-23 日本機械工業株式会社 傾斜スライド式洗掘防止装置
US5466522A (en) * 1992-06-26 1995-11-14 Eastman Kodak Company Cobalt platinum magnetic film and method of fabrication thereof

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5428390A (en) * 1977-08-05 1979-03-02 Kuraray Co Ltd Preparation of modified polyvinyl alcohol-type polymer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5428390A (en) * 1977-08-05 1979-03-02 Kuraray Co Ltd Preparation of modified polyvinyl alcohol-type polymer

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04365965A (ja) * 1991-06-12 1992-12-17 Toyota Autom Loom Works Ltd エンジンの保護装置
JPH0514217U (ja) * 1991-08-07 1993-02-23 日本機械工業株式会社 傾斜スライド式洗掘防止装置
JPH0514218U (ja) * 1991-08-08 1993-02-23 日本機械工業株式会社 傾斜スライド式洗掘防止装置
US5466522A (en) * 1992-06-26 1995-11-14 Eastman Kodak Company Cobalt platinum magnetic film and method of fabrication thereof

Also Published As

Publication number Publication date
JPS629667B2 (de) 1987-03-02

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