JPS59229727A - 薄膜の微細加工法 - Google Patents

薄膜の微細加工法

Info

Publication number
JPS59229727A
JPS59229727A JP58103943A JP10394383A JPS59229727A JP S59229727 A JPS59229727 A JP S59229727A JP 58103943 A JP58103943 A JP 58103943A JP 10394383 A JP10394383 A JP 10394383A JP S59229727 A JPS59229727 A JP S59229727A
Authority
JP
Japan
Prior art keywords
film
layer
low
boiling point
melting point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58103943A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0572006B2 (fr
Inventor
Yuji Komata
雄二 小俣
Nobumasa Kaminaka
紙中　伸征
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP58103943A priority Critical patent/JPS59229727A/ja
Publication of JPS59229727A publication Critical patent/JPS59229727A/ja
Publication of JPH0572006B2 publication Critical patent/JPH0572006B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Magnetic Heads (AREA)
  • Weting (AREA)
  • Chemically Coating (AREA)
  • Physical Vapour Deposition (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • ing And Chemical Polishing (AREA)
JP58103943A 1983-06-09 1983-06-09 薄膜の微細加工法 Granted JPS59229727A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58103943A JPS59229727A (ja) 1983-06-09 1983-06-09 薄膜の微細加工法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58103943A JPS59229727A (ja) 1983-06-09 1983-06-09 薄膜の微細加工法

Publications (2)

Publication Number Publication Date
JPS59229727A true JPS59229727A (ja) 1984-12-24
JPH0572006B2 JPH0572006B2 (fr) 1993-10-08

Family

ID=14367521

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58103943A Granted JPS59229727A (ja) 1983-06-09 1983-06-09 薄膜の微細加工法

Country Status (1)

Country Link
JP (1) JPS59229727A (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4964945A (en) * 1988-12-09 1990-10-23 Minnesota Mining And Manufacturing Company Lift off patterning process on a flexible substrate
JPH03287789A (ja) * 1990-04-02 1991-12-18 Matsushita Electric Ind Co Ltd 薄膜の徴細加工用材料の製造方法
US5296270A (en) * 1991-09-05 1994-03-22 Custom Training Aids, Inc. Process for making a thermally radiant surface
US5547557A (en) * 1993-10-20 1996-08-20 Matsushita Electric Industrial Co., Ltd. Formation of electroconductive thin-film pattern

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5676592A (en) * 1979-11-26 1981-06-24 Sony Corp Method of forming metallic layer pattern

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5676592A (en) * 1979-11-26 1981-06-24 Sony Corp Method of forming metallic layer pattern

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4964945A (en) * 1988-12-09 1990-10-23 Minnesota Mining And Manufacturing Company Lift off patterning process on a flexible substrate
US5294476A (en) * 1988-12-09 1994-03-15 Minnesota Mining And Manufacturing Company Patterning process and microparticles of substantially the same geometry and shape
JPH03287789A (ja) * 1990-04-02 1991-12-18 Matsushita Electric Ind Co Ltd 薄膜の徴細加工用材料の製造方法
US5296270A (en) * 1991-09-05 1994-03-22 Custom Training Aids, Inc. Process for making a thermally radiant surface
US5547557A (en) * 1993-10-20 1996-08-20 Matsushita Electric Industrial Co., Ltd. Formation of electroconductive thin-film pattern

Also Published As

Publication number Publication date
JPH0572006B2 (fr) 1993-10-08

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