JPS5924809A - 光軸調整装置 - Google Patents

光軸調整装置

Info

Publication number
JPS5924809A
JPS5924809A JP13536582A JP13536582A JPS5924809A JP S5924809 A JPS5924809 A JP S5924809A JP 13536582 A JP13536582 A JP 13536582A JP 13536582 A JP13536582 A JP 13536582A JP S5924809 A JPS5924809 A JP S5924809A
Authority
JP
Japan
Prior art keywords
optical axis
laser beam
cylinder
cylindrical body
driver
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13536582A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0376441B2 (2
Inventor
Toru Takahama
高浜　亨
Susumu Hoshinouchi
星之内　進
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP13536582A priority Critical patent/JPS5924809A/ja
Publication of JPS5924809A publication Critical patent/JPS5924809A/ja
Publication of JPH0376441B2 publication Critical patent/JPH0376441B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
    • G01B11/272—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
JP13536582A 1982-08-03 1982-08-03 光軸調整装置 Granted JPS5924809A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13536582A JPS5924809A (ja) 1982-08-03 1982-08-03 光軸調整装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13536582A JPS5924809A (ja) 1982-08-03 1982-08-03 光軸調整装置

Publications (2)

Publication Number Publication Date
JPS5924809A true JPS5924809A (ja) 1984-02-08
JPH0376441B2 JPH0376441B2 (2) 1991-12-05

Family

ID=15150022

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13536582A Granted JPS5924809A (ja) 1982-08-03 1982-08-03 光軸調整装置

Country Status (1)

Country Link
JP (1) JPS5924809A (2)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6285837A (ja) * 1985-10-12 1987-04-20 Fuji Photo Optical Co Ltd レ−ザ測定器におけるピンホ−ル調整装置
JPH01291760A (ja) * 1988-05-20 1989-11-24 Shinkawaya:Kk 長麺茹で容器

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6285837A (ja) * 1985-10-12 1987-04-20 Fuji Photo Optical Co Ltd レ−ザ測定器におけるピンホ−ル調整装置
JPH01291760A (ja) * 1988-05-20 1989-11-24 Shinkawaya:Kk 長麺茹で容器

Also Published As

Publication number Publication date
JPH0376441B2 (2) 1991-12-05

Similar Documents

Publication Publication Date Title
US5861947A (en) Measuring device for measuring concentrated radiation of light
US4713533A (en) Concentric detector array and associated hybrid signal processing for coarse and fine electro-optical tracking
CN110431391B (zh) 针对极紫外光源的量测系统
TW201101939A (en) System, method and apparatus for aligning and synchronizing target material for optimum extreme ultraviolet light output
US10271414B2 (en) Droplet detector and extreme ultraviolet light generating apparatus
CN103185707B (zh) 光学材料高温透过率测试装置
JP2022526846A (ja) レーザビームの焦点位置を決定するための装置および方法
IT9067936A1 (it) Sistema optoelettrico di acquisizione di bersaglio a larghissimo campo
WO2015071066A1 (en) Radiation source
TW201715920A (zh) 用於在ｌｐｐ ｅｕｖ光源下控制源雷射發射之系統及方法
US20160336713A1 (en) Laser apparatus
US3235733A (en) Photosensitive radiation tracker using plural prisms
JPS5924809A (ja) 光軸調整装置
TW201515518A (zh) 具有光學切換器之用於返回射束度量的系統與方法
CN108139266B (zh) 自动化的延迟线对准
US9578730B2 (en) Extreme ultraviolet light generation apparatus and extreme ultraviolet light generation system
CN110954215A (zh) 一种全谱段光目标模拟器
US4547662A (en) Noninterference optical error sensing system
CN102901620A (zh) 通用型高精度激光合束系统装调检测装置及其应用
US3449758A (en) High speed photographic recorder
JPS6049849B2 (ja) 物体の表面温度と放射率の測定装置
RU2611604C1 (ru) Устройство автоматической юстировки двухзеркальной телескопической системы с заданным направлением выходного излучения
CN113865716A (zh) 一种红外热像仪测试系统
US12405209B2 (en) Apparatus and method for grazing angle measurement
DK0493256T3 (da) Fremgangsmåde og indretning til sektoriel detektering af et mål, samt ammunition der anvender indretningen