JPS597557A - 炭酸ガスレ−ザ用透明光学部品の製造方法 - Google Patents
炭酸ガスレ−ザ用透明光学部品の製造方法Info
- Publication number
- JPS597557A JPS597557A JP11680782A JP11680782A JPS597557A JP S597557 A JPS597557 A JP S597557A JP 11680782 A JP11680782 A JP 11680782A JP 11680782 A JP11680782 A JP 11680782A JP S597557 A JPS597557 A JP S597557A
- Authority
- JP
- Japan
- Prior art keywords
- carbon dioxide
- laser
- optical component
- transparent optical
- ethanol
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 title claims description 26
- 230000003287 optical effect Effects 0.000 title claims description 18
- 229910002092 carbon dioxide Inorganic materials 0.000 title claims description 13
- 239000001569 carbon dioxide Substances 0.000 title claims description 13
- WCUXLLCKKVVCTQ-UHFFFAOYSA-M Potassium chloride Chemical compound [Cl-].[K+] WCUXLLCKKVVCTQ-UHFFFAOYSA-M 0.000 claims abstract description 16
- DNIAPMSPPWPWGF-UHFFFAOYSA-N Propylene glycol Chemical compound CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 claims abstract description 15
- 239000012530 fluid Substances 0.000 claims abstract description 10
- 235000011164 potassium chloride Nutrition 0.000 claims abstract description 8
- 239000001103 potassium chloride Substances 0.000 claims abstract description 8
- 229910003460 diamond Inorganic materials 0.000 claims abstract description 4
- 239000010432 diamond Substances 0.000 claims abstract description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 9
- 238000012545 processing Methods 0.000 claims description 9
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 3
- 238000005498 polishing Methods 0.000 abstract description 11
- 239000000126 substance Substances 0.000 abstract description 8
- 239000007788 liquid Substances 0.000 abstract description 4
- 238000000034 method Methods 0.000 abstract description 4
- 239000000725 suspension Substances 0.000 abstract description 4
- 238000003754 machining Methods 0.000 abstract 3
- 239000004744 fabric Substances 0.000 abstract 2
- 238000002835 absorbance Methods 0.000 abstract 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- 238000010521 absorption reaction Methods 0.000 description 11
- 239000010410 layer Substances 0.000 description 7
- 230000005540 biological transmission Effects 0.000 description 6
- 239000007789 gas Substances 0.000 description 5
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 4
- 239000006061 abrasive grain Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 230000010355 oscillation Effects 0.000 description 4
- 238000002474 experimental method Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 2
- 239000000872 buffer Substances 0.000 description 2
- 230000002925 chemical effect Effects 0.000 description 2
- 238000012993 chemical processing Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000020169 heat generation Effects 0.000 description 2
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- YPFDHNVEDLHUCE-UHFFFAOYSA-N propane-1,3-diol Chemical compound OCCCO YPFDHNVEDLHUCE-UHFFFAOYSA-N 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- 101100027969 Caenorhabditis elegans old-1 gene Proteins 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000013590 bulk material Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000003670 easy-to-clean Effects 0.000 description 1
- 235000011187 glycerol Nutrition 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11680782A JPS597557A (ja) | 1982-07-07 | 1982-07-07 | 炭酸ガスレ−ザ用透明光学部品の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11680782A JPS597557A (ja) | 1982-07-07 | 1982-07-07 | 炭酸ガスレ−ザ用透明光学部品の製造方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62035728A Division JPS62188670A (ja) | 1987-02-20 | 1987-02-20 | 炭酸ガスレ−ザ用透明光学部品の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS597557A true JPS597557A (ja) | 1984-01-14 |
| JPS6243831B2 JPS6243831B2 (2) | 1987-09-17 |
Family
ID=14696141
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11680782A Granted JPS597557A (ja) | 1982-07-07 | 1982-07-07 | 炭酸ガスレ−ザ用透明光学部品の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS597557A (2) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06304858A (ja) * | 1993-04-09 | 1994-11-01 | Chiyoda Kk | 研磨パットの処理剤 |
| CN103897607A (zh) * | 2014-03-25 | 2014-07-02 | 山东天岳晶体材料有限公司 | 一种碳化硅用机械抛光液及采用其进行机械抛光的方法 |
-
1982
- 1982-07-07 JP JP11680782A patent/JPS597557A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06304858A (ja) * | 1993-04-09 | 1994-11-01 | Chiyoda Kk | 研磨パットの処理剤 |
| CN103897607A (zh) * | 2014-03-25 | 2014-07-02 | 山东天岳晶体材料有限公司 | 一种碳化硅用机械抛光液及采用其进行机械抛光的方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6243831B2 (2) | 1987-09-17 |
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