JPS5980462U - 蒸着装置 - Google Patents

蒸着装置

Info

Publication number
JPS5980462U
JPS5980462U JP17638882U JP17638882U JPS5980462U JP S5980462 U JPS5980462 U JP S5980462U JP 17638882 U JP17638882 U JP 17638882U JP 17638882 U JP17638882 U JP 17638882U JP S5980462 U JPS5980462 U JP S5980462U
Authority
JP
Japan
Prior art keywords
vapor deposition
vacuum container
deposition equipment
substrate holder
deposition apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17638882U
Other languages
English (en)
Inventor
亀谷　実
渡辺　源一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
Original Assignee
TDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TDK Corp filed Critical TDK Corp
Priority to JP17638882U priority Critical patent/JPS5980462U/ja
Publication of JPS5980462U publication Critical patent/JPS5980462U/ja
Pending legal-status Critical Current

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  • Physical Vapour Deposition (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。

Description

【図面の簡単な説明】
第１図は従来の蒸着装置の一例を示す断面図、第２図は
本考案に係る蒸着装置の実施例を示す断面図である。 １．１０・・・ベルジャ、３・・・電子銃式蒸発源、４
゜１２・・・基板ホルダ、６・・・真空排気系、１１・
・・フラッシュガン、１３・・・ノズル、１４・・・蒸
発物質線材。

Claims (1)

    【実用新案登録請求の範囲】
  1. 底面を除きほぼ球形に形成した真空容器の底面中央にフ
    ラッシュガンを配置するとともに、前記真空容器の上面
    及び側面を覆う球形であって断面がｃｏｓ曲線を成して
    いる基板ホルダを前記真空容器内側に回転自在に設けた
    ことを特徴とする蒸着装置。　　　゛
JP17638882U 1982-11-20 1982-11-20 蒸着装置 Pending JPS5980462U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17638882U JPS5980462U (ja) 1982-11-20 1982-11-20 蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17638882U JPS5980462U (ja) 1982-11-20 1982-11-20 蒸着装置

Publications (1)

Publication Number Publication Date
JPS5980462U true JPS5980462U (ja) 1984-05-31

Family

ID=30383506

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17638882U Pending JPS5980462U (ja) 1982-11-20 1982-11-20 蒸着装置

Country Status (1)

Country Link
JP (1) JPS5980462U (ja)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5690973A (en) * 1979-12-21 1981-07-23 Ulvac Corp Planatary type vacuum deposition apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5690973A (en) * 1979-12-21 1981-07-23 Ulvac Corp Planatary type vacuum deposition apparatus

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