JPS5995157U - イオンプレ−テイング装置 - Google Patents

イオンプレ−テイング装置

Info

Publication number
JPS5995157U
JPS5995157U JP19133182U JP19133182U JPS5995157U JP S5995157 U JPS5995157 U JP S5995157U JP 19133182 U JP19133182 U JP 19133182U JP 19133182 U JP19133182 U JP 19133182U JP S5995157 U JPS5995157 U JP S5995157U
Authority
JP
Japan
Prior art keywords
substrate
electrodes
ion plating
evaporation
plating device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19133182U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6321572Y2 (2
Inventor
正治 石垣
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP19133182U priority Critical patent/JPS5995157U/ja
Publication of JPS5995157U publication Critical patent/JPS5995157U/ja
Application granted granted Critical
Publication of JPS6321572Y2 publication Critical patent/JPS6321572Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Physical Vapour Deposition (AREA)
JP19133182U 1982-12-20 1982-12-20 イオンプレ−テイング装置 Granted JPS5995157U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19133182U JPS5995157U (ja) 1982-12-20 1982-12-20 イオンプレ−テイング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19133182U JPS5995157U (ja) 1982-12-20 1982-12-20 イオンプレ−テイング装置

Publications (2)

Publication Number Publication Date
JPS5995157U true JPS5995157U (ja) 1984-06-28
JPS6321572Y2 JPS6321572Y2 (2) 1988-06-14

Family

ID=30412044

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19133182U Granted JPS5995157U (ja) 1982-12-20 1982-12-20 イオンプレ−テイング装置

Country Status (1)

Country Link
JP (1) JPS5995157U (2)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63170458U (2) * 1987-04-23 1988-11-07
JP2007314891A (ja) * 2001-03-13 2007-12-06 Kiyousera Opt Kk 金属酸化膜被覆部材

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5969964U (ja) * 1982-10-28 1984-05-12 日本電子株式会社 成膜装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5969964U (ja) * 1982-10-28 1984-05-12 日本電子株式会社 成膜装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63170458U (2) * 1987-04-23 1988-11-07
JP2007314891A (ja) * 2001-03-13 2007-12-06 Kiyousera Opt Kk 金属酸化膜被覆部材

Also Published As

Publication number Publication date
JPS6321572Y2 (2) 1988-06-14

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