JPS6321572Y2 - - Google Patents

Info

Publication number
JPS6321572Y2
JPS6321572Y2 JP1982191331U JP19133182U JPS6321572Y2 JP S6321572 Y2 JPS6321572 Y2 JP S6321572Y2 JP 1982191331 U JP1982191331 U JP 1982191331U JP 19133182 U JP19133182 U JP 19133182U JP S6321572 Y2 JPS6321572 Y2 JP S6321572Y2
Authority
JP
Japan
Prior art keywords
substrate
multipactor
ion plating
discharge
evaporation source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982191331U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5995157U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19133182U priority Critical patent/JPS5995157U/ja
Publication of JPS5995157U publication Critical patent/JPS5995157U/ja
Application granted granted Critical
Publication of JPS6321572Y2 publication Critical patent/JPS6321572Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
  • Physical Vapour Deposition (AREA)
JP19133182U 1982-12-20 1982-12-20 イオンプレ−テイング装置 Granted JPS5995157U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19133182U JPS5995157U (ja) 1982-12-20 1982-12-20 イオンプレ−テイング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19133182U JPS5995157U (ja) 1982-12-20 1982-12-20 イオンプレ−テイング装置

Publications (2)

Publication Number Publication Date
JPS5995157U JPS5995157U (ja) 1984-06-28
JPS6321572Y2 true JPS6321572Y2 (2) 1988-06-14

Family

ID=30412044

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19133182U Granted JPS5995157U (ja) 1982-12-20 1982-12-20 イオンプレ−テイング装置

Country Status (1)

Country Link
JP (1) JPS5995157U (2)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH057238Y2 (2) * 1987-04-23 1993-02-24
JP2007314891A (ja) * 2001-03-13 2007-12-06 Kiyousera Opt Kk 金属酸化膜被覆部材

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5969964U (ja) * 1982-10-28 1984-05-12 日本電子株式会社 成膜装置

Also Published As

Publication number Publication date
JPS5995157U (ja) 1984-06-28

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