JPS6037239U - 半導体ウエハ - Google Patents

半導体ウエハ

Info

Publication number
JPS6037239U
JPS6037239U JP12918283U JP12918283U JPS6037239U JP S6037239 U JPS6037239 U JP S6037239U JP 12918283 U JP12918283 U JP 12918283U JP 12918283 U JP12918283 U JP 12918283U JP S6037239 U JPS6037239 U JP S6037239U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
facet
exposed
silicon oxide
utility
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12918283U
Other languages
English (en)
Inventor
芳夫 佐々木
Original Assignee
ロ−ム株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ロ−ム株式会社 filed Critical ロ−ム株式会社
Priority to JP12918283U priority Critical patent/JPS6037239U/ja
Publication of JPS6037239U publication Critical patent/JPS6037239U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。

Description

【図面の簡単な説明】
第１図は本考案に係る半導体ウェハの一実施例を、第２
図は他の実施例をそれぞれ示す平面図である。 １・・・半導体ウェハ本体、２・・・アルミニウムバタ
ン部、３・・・ファセット部。

Claims (1)

    【実用新案登録請求の範囲】
  1. アルミニウム層をファセット部所定域を除いて形成し、
    前記ファセット部所定域の酸化シリコン層を露出させた
    ことを特徴とする半導体ウェハ。
JP12918283U 1983-08-19 1983-08-19 半導体ウエハ Pending JPS6037239U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12918283U JPS6037239U (ja) 1983-08-19 1983-08-19 半導体ウエハ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12918283U JPS6037239U (ja) 1983-08-19 1983-08-19 半導体ウエハ

Publications (1)

Publication Number Publication Date
JPS6037239U true JPS6037239U (ja) 1985-03-14

Family

ID=30292789

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12918283U Pending JPS6037239U (ja) 1983-08-19 1983-08-19 半導体ウエハ

Country Status (1)

Country Link
JP (1) JPS6037239U (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62147438U (ja) * 1986-03-08 1987-09-17
JPS6327246U (ja) * 1986-07-31 1988-02-23

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54129974A (en) * 1978-03-31 1979-10-08 Toshiba Corp Semiconductor device
JPS5575229A (en) * 1978-12-01 1980-06-06 Mitsubishi Electric Corp Semiconductor device
JPS55165625A (en) * 1979-06-12 1980-12-24 Fujitsu Ltd Manufacture of semiconductor device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54129974A (en) * 1978-03-31 1979-10-08 Toshiba Corp Semiconductor device
JPS5575229A (en) * 1978-12-01 1980-06-06 Mitsubishi Electric Corp Semiconductor device
JPS55165625A (en) * 1979-06-12 1980-12-24 Fujitsu Ltd Manufacture of semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62147438U (ja) * 1986-03-08 1987-09-17
JPS6327246U (ja) * 1986-07-31 1988-02-23

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