JPS5998294A - 半導体工場などにおける警報および制御装置 - Google Patents

半導体工場などにおける警報および制御装置

Info

Publication number
JPS5998294A
JPS5998294A JP20688982A JP20688982A JPS5998294A JP S5998294 A JPS5998294 A JP S5998294A JP 20688982 A JP20688982 A JP 20688982A JP 20688982 A JP20688982 A JP 20688982A JP S5998294 A JPS5998294 A JP S5998294A
Authority
JP
Japan
Prior art keywords
alarm
fire
detector
control device
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20688982A
Other languages
English (en)
Japanese (ja)
Inventor
木村　敞一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nohmi Bosai Ltd
Original Assignee
Nohmi Bosai Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nohmi Bosai Kogyo Co Ltd filed Critical Nohmi Bosai Kogyo Co Ltd
Priority to JP20688982A priority Critical patent/JPS5998294A/ja
Priority to EP19830111571 priority patent/EP0112491B1/de
Priority to DE8383111571T priority patent/DE3381098D1/de
Priority to ES527815A priority patent/ES8505124A1/es
Publication of JPS5998294A publication Critical patent/JPS5998294A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G08—SIGNALLING
    • G08B—SIGNALLING SYSTEMS, e.g. PERSONAL CALLING SYSTEMS; ORDER TELEGRAPHS; ALARM SYSTEMS
    • G08B17/00—Fire alarms; Alarms responsive to explosion
    • G08B17/10—Actuation by presence of smoke or gases, e.g. automatic alarm devices for analysing flowing fluid materials by the use of optical means
    • G08B17/117—Actuation by presence of smoke or gases, e.g. automatic alarm devices for analysing flowing fluid materials by the use of optical means by using a detection device for specific gases, e.g. combustion products, produced by the fire

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Business, Economics & Management (AREA)
  • Emergency Management (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Emergency Alarm Devices (AREA)
  • Fire-Detection Mechanisms (AREA)
  • Fire-Extinguishing By Fire Departments, And Fire-Extinguishing Equipment And Control Thereof (AREA)
  • Fire Alarms (AREA)
  • Incineration Of Waste (AREA)
JP20688982A 1982-11-27 1982-11-27 半導体工場などにおける警報および制御装置 Pending JPS5998294A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP20688982A JPS5998294A (ja) 1982-11-27 1982-11-27 半導体工場などにおける警報および制御装置
EP19830111571 EP0112491B1 (de) 1982-11-27 1983-11-19 Alarm- und Steuerungssystem einer Herstellungsanlage für Halbleiter
DE8383111571T DE3381098D1 (de) 1982-11-27 1983-11-19 Alarm- und steuerungssystem einer herstellungsanlage fuer halbleiter.
ES527815A ES8505124A1 (es) 1982-11-27 1983-11-25 Sistema de alarma y control para plantas de fabricacion de semiconductores

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20688982A JPS5998294A (ja) 1982-11-27 1982-11-27 半導体工場などにおける警報および制御装置

Publications (1)

Publication Number Publication Date
JPS5998294A true JPS5998294A (ja) 1984-06-06

Family

ID=16530723

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20688982A Pending JPS5998294A (ja) 1982-11-27 1982-11-27 半導体工場などにおける警報および制御装置

Country Status (4)

Country Link
EP (1) EP0112491B1 (de)
JP (1) JPS5998294A (de)
DE (1) DE3381098D1 (de)
ES (1) ES8505124A1 (de)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5323195A (en) * 1976-08-16 1978-03-03 Otsuka Kagaku Yakuhin Method of treating flame resistance for inflammable organic material and flame resisting composition
JPS5721350A (en) * 1980-05-28 1982-02-04 Naarden International Nv Perfume composition and use

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2226813A5 (en) * 1973-04-04 1974-11-15 Cifal Inflammable product fire prevention system - has IR radiation detector injecting cooling fluid and operating alarm
US4069018A (en) * 1976-09-28 1978-01-17 Weyerhaeuser Company Explosive gas monitoring method and apparatus
US4267889A (en) * 1978-12-27 1981-05-19 Williams Robert M Explosion suppression system for fire or explosion susceptible enclosure

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5323195A (en) * 1976-08-16 1978-03-03 Otsuka Kagaku Yakuhin Method of treating flame resistance for inflammable organic material and flame resisting composition
JPS5721350A (en) * 1980-05-28 1982-02-04 Naarden International Nv Perfume composition and use

Also Published As

Publication number Publication date
DE3381098D1 (de) 1990-02-15
EP0112491A2 (de) 1984-07-04
EP0112491B1 (de) 1990-01-10
ES527815A0 (es) 1985-04-16
EP0112491A3 (en) 1987-09-16
ES8505124A1 (es) 1985-04-16

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