JPS60133716A - 磁気異方性パーマロイ層の生成方法 - Google Patents
磁気異方性パーマロイ層の生成方法Info
- Publication number
- JPS60133716A JPS60133716A JP59246962A JP24696284A JPS60133716A JP S60133716 A JPS60133716 A JP S60133716A JP 59246962 A JP59246962 A JP 59246962A JP 24696284 A JP24696284 A JP 24696284A JP S60133716 A JPS60133716 A JP S60133716A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- nitrogen
- sputtering
- permalloy
- permalloy layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
- H01F41/18—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates by cathode sputtering
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Thin Magnetic Films (AREA)
- Physical Vapour Deposition (AREA)
- Magnetic Heads (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE3342533.7 | 1983-11-24 | ||
| DE19833342533 DE3342533A1 (de) | 1983-11-24 | 1983-11-24 | Aufstaeubung von permalloy-schichten |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60133716A true JPS60133716A (ja) | 1985-07-16 |
Family
ID=6215167
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59246962A Pending JPS60133716A (ja) | 1983-11-24 | 1984-11-21 | 磁気異方性パーマロイ層の生成方法 |
Country Status (3)
| Country | Link |
|---|---|
| EP (1) | EP0144851B1 (fr) |
| JP (1) | JPS60133716A (fr) |
| DE (2) | DE3342533A1 (fr) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6324030A (ja) * | 1986-06-26 | 1988-02-01 | Res Dev Corp Of Japan | 異方性希土類磁石材料およびその製造方法 |
| GB2194965B (en) * | 1986-09-12 | 1991-01-09 | Sharp Kk | A process for preparing a soft magnetic film of ni-fe based alloy |
| JP2778494B2 (ja) * | 1994-12-26 | 1998-07-23 | 日本電気株式会社 | 電極薄膜およびその電極薄膜を用いた磁気抵抗効果型ヘッド |
| AU6733196A (en) * | 1995-08-30 | 1997-03-19 | Danfoss A/S | Method of producing magnetic poles on a base member, and rotor of an electrical machine |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4094761A (en) * | 1977-07-25 | 1978-06-13 | Motorola, Inc. | Magnetion sputtering of ferromagnetic material |
| US4271232A (en) * | 1978-08-28 | 1981-06-02 | International Business Machines Corporation | Amorphous magnetic film |
| JPS5571006A (en) * | 1978-11-22 | 1980-05-28 | Matsushita Electric Ind Co Ltd | Magnetic thin film and its manufacturing method |
| JPS57149706A (en) * | 1981-03-12 | 1982-09-16 | Tdk Corp | Magnetic recording medium |
| JPS5987622A (ja) * | 1982-11-09 | 1984-05-21 | Ulvac Corp | 磁気記録体並にその製造法 |
-
1983
- 1983-11-24 DE DE19833342533 patent/DE3342533A1/de not_active Withdrawn
-
1984
- 1984-11-19 EP EP84113992A patent/EP0144851B1/fr not_active Expired
- 1984-11-19 DE DE8484113992T patent/DE3476718D1/de not_active Expired
- 1984-11-21 JP JP59246962A patent/JPS60133716A/ja active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| EP0144851B1 (fr) | 1989-02-08 |
| DE3342533A1 (de) | 1985-06-05 |
| EP0144851A3 (en) | 1985-07-17 |
| DE3476718D1 (en) | 1989-03-16 |
| EP0144851A2 (fr) | 1985-06-19 |
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