JPS60133716A - 磁気異方性パーマロイ層の生成方法 - Google Patents

磁気異方性パーマロイ層の生成方法

Info

Publication number
JPS60133716A
JPS60133716A JP59246962A JP24696284A JPS60133716A JP S60133716 A JPS60133716 A JP S60133716A JP 59246962 A JP59246962 A JP 59246962A JP 24696284 A JP24696284 A JP 24696284A JP S60133716 A JPS60133716 A JP S60133716A
Authority
JP
Japan
Prior art keywords
gas
nitrogen
sputtering
permalloy
permalloy layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP59246962A
Other languages
English (en)
Japanese (ja)
Inventor
ハンス、ウエルナー、ペツルベルガー
ジークフリート、ボツク
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Schuckertwerke AG
Siemens Corp
Original Assignee
Siemens Schuckertwerke AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Schuckertwerke AG, Siemens Corp filed Critical Siemens Schuckertwerke AG
Publication of JPS60133716A publication Critical patent/JPS60133716A/ja
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/14Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
    • H01F41/18Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates by cathode sputtering

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Thin Magnetic Films (AREA)
  • Physical Vapour Deposition (AREA)
  • Magnetic Heads (AREA)
JP59246962A 1983-11-24 1984-11-21 磁気異方性パーマロイ層の生成方法 Pending JPS60133716A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3342533.7 1983-11-24
DE19833342533 DE3342533A1 (de) 1983-11-24 1983-11-24 Aufstaeubung von permalloy-schichten

Publications (1)

Publication Number Publication Date
JPS60133716A true JPS60133716A (ja) 1985-07-16

Family

ID=6215167

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59246962A Pending JPS60133716A (ja) 1983-11-24 1984-11-21 磁気異方性パーマロイ層の生成方法

Country Status (3)

Country Link
EP (1) EP0144851B1 (fr)
JP (1) JPS60133716A (fr)
DE (2) DE3342533A1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6324030A (ja) * 1986-06-26 1988-02-01 Res Dev Corp Of Japan 異方性希土類磁石材料およびその製造方法
GB2194965B (en) * 1986-09-12 1991-01-09 Sharp Kk A process for preparing a soft magnetic film of ni-fe based alloy
JP2778494B2 (ja) * 1994-12-26 1998-07-23 日本電気株式会社 電極薄膜およびその電極薄膜を用いた磁気抵抗効果型ヘッド
AU6733196A (en) * 1995-08-30 1997-03-19 Danfoss A/S Method of producing magnetic poles on a base member, and rotor of an electrical machine

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4094761A (en) * 1977-07-25 1978-06-13 Motorola, Inc. Magnetion sputtering of ferromagnetic material
US4271232A (en) * 1978-08-28 1981-06-02 International Business Machines Corporation Amorphous magnetic film
JPS5571006A (en) * 1978-11-22 1980-05-28 Matsushita Electric Ind Co Ltd Magnetic thin film and its manufacturing method
JPS57149706A (en) * 1981-03-12 1982-09-16 Tdk Corp Magnetic recording medium
JPS5987622A (ja) * 1982-11-09 1984-05-21 Ulvac Corp 磁気記録体並にその製造法

Also Published As

Publication number Publication date
EP0144851B1 (fr) 1989-02-08
DE3342533A1 (de) 1985-06-05
EP0144851A3 (en) 1985-07-17
DE3476718D1 (en) 1989-03-16
EP0144851A2 (fr) 1985-06-19

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