JPS6013742U - ウエ−ハ支持移動具 - Google Patents

ウエ−ハ支持移動具

Info

Publication number
JPS6013742U
JPS6013742U JP10605783U JP10605783U JPS6013742U JP S6013742 U JPS6013742 U JP S6013742U JP 10605783 U JP10605783 U JP 10605783U JP 10605783 U JP10605783 U JP 10605783U JP S6013742 U JPS6013742 U JP S6013742U
Authority
JP
Japan
Prior art keywords
moving device
wafer support
support moving
metal fitting
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10605783U
Other languages
English (en)
Other versions
JPS6322675Y2 (ja
Inventor
敦弘 筑根
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP10605783U priority Critical patent/JPS6013742U/ja
Publication of JPS6013742U publication Critical patent/JPS6013742U/ja
Application granted granted Critical
Publication of JPS6322675Y2 publication Critical patent/JPS6322675Y2/ja
Granted legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。

Description

【図面の簡単な説明】
第１図は従来のウェーハ挟持移動具、第２図及び第３図
は本考案の一実施例のウェーハ移動具の平面図及び正面
図である。図において２０はウェーハ挾持移動具、２１
は移動支持板、２２は摺動桿、２３はＴ字状金具、２４
は連結金具、２５は挟持金具、２６．２８は爪、２７は
固定挟持金具、２９．３０はガイド押え金具を示す。

Claims (1)

    【実用新案登録請求の範囲】
  1. ウェーハの挾持移動具を、摺動金具と、該摺動金具の支
    持板とで構成し、該支持板上で前記摺動金具を摺動せし
    めてウェーハを挟持、離脱するようにしたことを特徴と
    するウェーハ挟持移動具。
JP10605783U 1983-07-07 1983-07-07 ウエ−ハ支持移動具 Granted JPS6013742U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10605783U JPS6013742U (ja) 1983-07-07 1983-07-07 ウエ−ハ支持移動具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10605783U JPS6013742U (ja) 1983-07-07 1983-07-07 ウエ−ハ支持移動具

Publications (2)

Publication Number Publication Date
JPS6013742U true JPS6013742U (ja) 1985-01-30
JPS6322675Y2 JPS6322675Y2 (ja) 1988-06-22

Family

ID=30248349

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10605783U Granted JPS6013742U (ja) 1983-07-07 1983-07-07 ウエ−ハ支持移動具

Country Status (1)

Country Link
JP (1) JPS6013742U (ja)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5318389A (en) * 1976-08-04 1978-02-20 Matsushita Electric Ind Co Ltd Wafer holding and handling device
JPS5364362A (en) * 1976-11-22 1978-06-08 Hitachi Ltd Machine hand

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5318389A (en) * 1976-08-04 1978-02-20 Matsushita Electric Ind Co Ltd Wafer holding and handling device
JPS5364362A (en) * 1976-11-22 1978-06-08 Hitachi Ltd Machine hand

Also Published As

Publication number Publication date
JPS6322675Y2 (ja) 1988-06-22

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