JPS60167337A - ダイスボンデイング装置 - Google Patents
ダイスボンデイング装置Info
- Publication number
- JPS60167337A JPS60167337A JP59023110A JP2311084A JPS60167337A JP S60167337 A JPS60167337 A JP S60167337A JP 59023110 A JP59023110 A JP 59023110A JP 2311084 A JP2311084 A JP 2311084A JP S60167337 A JPS60167337 A JP S60167337A
- Authority
- JP
- Japan
- Prior art keywords
- die
- collet
- film
- bonding
- pin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/073—Connecting or disconnecting of die-attach connectors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/0711—Apparatus therefor
- H10W72/07141—Means for applying energy, e.g. ovens or lasers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/071—Connecting or disconnecting
- H10W72/073—Connecting or disconnecting of die-attach connectors
- H10W72/07331—Connecting techniques
- H10W72/07337—Connecting techniques using a polymer adhesive, e.g. an adhesive based on silicone or epoxy
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10W72/00—Interconnections or connectors in packages
- H10W72/30—Die-attach connectors
- H10W72/351—Materials of die-attach connectors
- H10W72/353—Materials of die-attach connectors not comprising solid metals or solid metalloids, e.g. ceramics
- H10W72/354—Materials of die-attach connectors not comprising solid metals or solid metalloids, e.g. ceramics comprising polymers
Landscapes
- Die Bonding (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59023110A JPS60167337A (ja) | 1984-02-09 | 1984-02-09 | ダイスボンデイング装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59023110A JPS60167337A (ja) | 1984-02-09 | 1984-02-09 | ダイスボンデイング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60167337A true JPS60167337A (ja) | 1985-08-30 |
| JPH0554261B2 JPH0554261B2 (2) | 1993-08-12 |
Family
ID=12101330
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59023110A Granted JPS60167337A (ja) | 1984-02-09 | 1984-02-09 | ダイスボンデイング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60167337A (2) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011192927A (ja) * | 2010-03-16 | 2011-09-29 | Shibaura Mechatronics Corp | 電子部品の実装装置及び実装方法 |
| JP2019041007A (ja) * | 2017-08-25 | 2019-03-14 | 上野精機株式会社 | 電子部品受渡し装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56120136A (en) * | 1980-02-28 | 1981-09-21 | Toshiba Corp | Pellet mounting method |
-
1984
- 1984-02-09 JP JP59023110A patent/JPS60167337A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56120136A (en) * | 1980-02-28 | 1981-09-21 | Toshiba Corp | Pellet mounting method |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011192927A (ja) * | 2010-03-16 | 2011-09-29 | Shibaura Mechatronics Corp | 電子部品の実装装置及び実装方法 |
| JP2019041007A (ja) * | 2017-08-25 | 2019-03-14 | 上野精機株式会社 | 電子部品受渡し装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0554261B2 (2) | 1993-08-12 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4381601A (en) | Apparatus for mounting electronic components | |
| TWI639210B (zh) | 半導體製造裝置及半導體裝置的製造方法 | |
| KR100330937B1 (ko) | 복수의 초소형 전자소자를 리드변형을 이용하여 접속하는 방법 및 장치 | |
| US7047632B2 (en) | Method of mounting electronic components | |
| JP7217605B2 (ja) | 半導体製造装置、突上げ治具および半導体装置の製造方法 | |
| US3738560A (en) | Semiconductor die bonder | |
| KR102003130B1 (ko) | 반도체 제조 장치 및 반도체 장치의 제조 방법 | |
| JP2019047089A (ja) | 半導体製造装置および半導体装置の製造方法 | |
| JPS60167337A (ja) | ダイスボンデイング装置 | |
| US3855034A (en) | Method and apparatus for bonding in miniaturized electrical circuits | |
| JPS59113639A (ja) | 半導体デバイスの自動組立用ダイ選択機構 | |
| KR100309942B1 (ko) | 전자부품의 설치방법 및 설치장치 | |
| JP4230178B2 (ja) | 半導体チップ剥離装置およびその方法 | |
| KR102127695B1 (ko) | 반도체 다이 분리장치 | |
| JPH02222155A (ja) | ダイボンデイング装置 | |
| JP2765190B2 (ja) | フリップチップのボンディング装置 | |
| KR0161436B1 (ko) | 다이 본딩 장치 | |
| US7198479B2 (en) | Ejector with multi-ejection pins | |
| JPH08203962A (ja) | チップ位置決め装置、チップステージおよびインナリードボンディング装置ならびに方法 | |
| JP2765201B2 (ja) | 熱圧着用ボンディングヘッド | |
| KR950000559Y1 (ko) | 분리기능을 갖는 칩 이송장치 | |
| JPS5933975B2 (ja) | 半導体搭載装置 | |
| JP2514697Y2 (ja) | マウンタ | |
| JP2765202B2 (ja) | 熱圧着用ボンディングヘッド | |
| JPH03165530A (ja) | 半田付け治具及び半田付け方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |