JPS60201379A - 薄膜トランジスタ基板及びその製造方法 - Google Patents

薄膜トランジスタ基板及びその製造方法

Info

Publication number
JPS60201379A
JPS60201379A JP59057699A JP5769984A JPS60201379A JP S60201379 A JPS60201379 A JP S60201379A JP 59057699 A JP59057699 A JP 59057699A JP 5769984 A JP5769984 A JP 5769984A JP S60201379 A JPS60201379 A JP S60201379A
Authority
JP
Japan
Prior art keywords
substrate
thin film
display device
manufacturing
film transistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59057699A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0580677B2 (de
Inventor
裕一 正木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP59057699A priority Critical patent/JPS60201379A/ja
Publication of JPS60201379A publication Critical patent/JPS60201379A/ja
Publication of JPH0580677B2 publication Critical patent/JPH0580677B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Liquid Crystal (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
JP59057699A 1984-03-26 1984-03-26 薄膜トランジスタ基板及びその製造方法 Granted JPS60201379A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59057699A JPS60201379A (ja) 1984-03-26 1984-03-26 薄膜トランジスタ基板及びその製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59057699A JPS60201379A (ja) 1984-03-26 1984-03-26 薄膜トランジスタ基板及びその製造方法

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP19239892A Division JP2771074B2 (ja) 1992-07-20 1992-07-20 液晶表示装置
JP20913297A Division JPH10105080A (ja) 1997-08-04 1997-08-04 薄膜トランジスタ基板

Publications (2)

Publication Number Publication Date
JPS60201379A true JPS60201379A (ja) 1985-10-11
JPH0580677B2 JPH0580677B2 (de) 1993-11-09

Family

ID=13063178

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59057699A Granted JPS60201379A (ja) 1984-03-26 1984-03-26 薄膜トランジスタ基板及びその製造方法

Country Status (1)

Country Link
JP (1) JPS60201379A (de)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5630169A (en) * 1979-08-21 1981-03-26 Canon Kk Color display cell
JPS58143374A (ja) * 1982-02-19 1983-08-25 セイコーエプソン株式会社 液晶表示パネルの製造方法
JPS599941A (ja) * 1982-07-08 1984-01-19 Matsushita Electric Ind Co Ltd 薄膜半導体装置の製造方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5630169A (en) * 1979-08-21 1981-03-26 Canon Kk Color display cell
JPS58143374A (ja) * 1982-02-19 1983-08-25 セイコーエプソン株式会社 液晶表示パネルの製造方法
JPS599941A (ja) * 1982-07-08 1984-01-19 Matsushita Electric Ind Co Ltd 薄膜半導体装置の製造方法

Also Published As

Publication number Publication date
JPH0580677B2 (de) 1993-11-09

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