JPS60223119A - ２軸方向非接触駆動形精密移動台 - Google Patents

２軸方向非接触駆動形精密移動台

Info

Publication number
JPS60223119A
JPS60223119A JP59078434A JP7843484A JPS60223119A JP S60223119 A JPS60223119 A JP S60223119A JP 59078434 A JP59078434 A JP 59078434A JP 7843484 A JP7843484 A JP 7843484A JP S60223119 A JPS60223119 A JP S60223119A
Authority
JP
Japan
Prior art keywords
moving table
magnet
noncontacting
moving
joint
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59078434A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0516167B2 (mo
Inventor
Motoya Taniguchi
素也 谷口
Ryuichi Funatsu
隆一 船津
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP59078434A priority Critical patent/JPS60223119A/ja
Publication of JPS60223119A publication Critical patent/JPS60223119A/ja
Publication of JPH0516167B2 publication Critical patent/JPH0516167B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass

Landscapes

  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Atmospheric Sciences (AREA)
  • Toxicology (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Machine Tool Units (AREA)
JP59078434A 1984-04-20 1984-04-20 ２軸方向非接触駆動形精密移動台 Granted JPS60223119A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59078434A JPS60223119A (ja) 1984-04-20 1984-04-20 ２軸方向非接触駆動形精密移動台

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59078434A JPS60223119A (ja) 1984-04-20 1984-04-20 ２軸方向非接触駆動形精密移動台

Publications (2)

Publication Number Publication Date
JPS60223119A true JPS60223119A (ja) 1985-11-07
JPH0516167B2 JPH0516167B2 (mo) 1993-03-03

Family

ID=13661933

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59078434A Granted JPS60223119A (ja) 1984-04-20 1984-04-20 ２軸方向非接触駆動形精密移動台

Country Status (1)

Country Link
JP (1) JPS60223119A (mo)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61278913A (ja) * 1985-06-04 1986-12-09 Ntn Toyo Bearing Co Ltd 磁気浮上式位置決め装置
JPS63283835A (ja) * 1987-05-13 1988-11-21 Yaskawa Electric Mfg Co Ltd リニア移動装置
JP2010046725A (ja) * 2008-08-19 2010-03-04 Fanuc Ltd 往復直線駆動装置
CN102887341A (zh) * 2011-07-22 2013-01-23 大银微系统股份有限公司 悬臂式平台的横梁预拉模组
CN104370061A (zh) * 2014-11-12 2015-02-25 深圳博美柯自动化设备有限公司 一种齿型带传动的平面循环装置
CN106670955A (zh) * 2016-12-21 2017-05-17 上海集成电路研发中心有限公司 一种无旋转终结点的化学机械研磨装置

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5617341A (en) * 1979-07-23 1981-02-19 Nippon Telegr & Teleph Corp <Ntt> Alignment stage for step and repeat exposure
JPS56114012A (en) * 1980-02-13 1981-09-08 Telmec Co Ltd Precise positioning device
JPS57206926A (en) * 1981-06-16 1982-12-18 Nippon Telegr & Teleph Corp <Ntt> Positioning method for stage
JPS607726A (ja) * 1983-06-10 1985-01-16 エスヴィージー・リトグラフィー・システムズ・インコーポレイテッド 電磁アラインメント装置
JPS607725A (ja) * 1983-06-10 1985-01-16 エスヴィージー・リトグラフィー・システムズ・インコーポレイテッド 電磁アラインメント装置
JPS607724A (ja) * 1983-06-10 1985-01-16 エスヴィージー・リトグラフィー・システムズ・インコーポレイテッド 電磁アラインメント装置
JPS607727A (ja) * 1983-06-10 1985-01-16 エスヴィージー・リトグラフィー・システムズ・インコーポレイテッド 電磁アラインメント装置
JPS609726A (ja) * 1983-06-29 1985-01-18 Masahiko Kamimori 可撓性管状体の製造法及びその装置
JPS609727A (ja) * 1983-06-29 1985-01-18 Japan Steel Works Ltd:The 改良型二軸混練押出機

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5617341A (en) * 1979-07-23 1981-02-19 Nippon Telegr & Teleph Corp <Ntt> Alignment stage for step and repeat exposure
JPS56114012A (en) * 1980-02-13 1981-09-08 Telmec Co Ltd Precise positioning device
JPS57206926A (en) * 1981-06-16 1982-12-18 Nippon Telegr & Teleph Corp <Ntt> Positioning method for stage
JPS607726A (ja) * 1983-06-10 1985-01-16 エスヴィージー・リトグラフィー・システムズ・インコーポレイテッド 電磁アラインメント装置
JPS607725A (ja) * 1983-06-10 1985-01-16 エスヴィージー・リトグラフィー・システムズ・インコーポレイテッド 電磁アラインメント装置
JPS607724A (ja) * 1983-06-10 1985-01-16 エスヴィージー・リトグラフィー・システムズ・インコーポレイテッド 電磁アラインメント装置
JPS607727A (ja) * 1983-06-10 1985-01-16 エスヴィージー・リトグラフィー・システムズ・インコーポレイテッド 電磁アラインメント装置
JPS609726A (ja) * 1983-06-29 1985-01-18 Masahiko Kamimori 可撓性管状体の製造法及びその装置
JPS609727A (ja) * 1983-06-29 1985-01-18 Japan Steel Works Ltd:The 改良型二軸混練押出機

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61278913A (ja) * 1985-06-04 1986-12-09 Ntn Toyo Bearing Co Ltd 磁気浮上式位置決め装置
JPS63283835A (ja) * 1987-05-13 1988-11-21 Yaskawa Electric Mfg Co Ltd リニア移動装置
JP2010046725A (ja) * 2008-08-19 2010-03-04 Fanuc Ltd 往復直線駆動装置
US8097989B2 (en) 2008-08-19 2012-01-17 Fanuc Ltd Reciprocating linear actuator
CN102887341A (zh) * 2011-07-22 2013-01-23 大银微系统股份有限公司 悬臂式平台的横梁预拉模组
CN104370061A (zh) * 2014-11-12 2015-02-25 深圳博美柯自动化设备有限公司 一种齿型带传动的平面循环装置
CN104370061B (zh) * 2014-11-12 2017-04-05 深圳博美柯自动化设备有限公司 一种齿型带传动的平面循环装置
CN106670955A (zh) * 2016-12-21 2017-05-17 上海集成电路研发中心有限公司 一种无旋转终结点的化学机械研磨装置

Also Published As

Publication number Publication date
JPH0516167B2 (mo) 1993-03-03

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