JPS60347A - Laser continuous analysis of metal and insulator in fluidized state - Google Patents
Laser continuous analysis of metal and insulator in fluidized stateInfo
- Publication number
- JPS60347A JPS60347A JP10845683A JP10845683A JPS60347A JP S60347 A JPS60347 A JP S60347A JP 10845683 A JP10845683 A JP 10845683A JP 10845683 A JP10845683 A JP 10845683A JP S60347 A JPS60347 A JP S60347A
- Authority
- JP
- Japan
- Prior art keywords
- measured
- laser
- condenser lens
- lens
- molten material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004458 analytical method Methods 0.000 title claims description 21
- 239000002184 metal Substances 0.000 title claims description 9
- 229910052751 metal Inorganic materials 0.000 title claims description 9
- 239000012212 insulator Substances 0.000 title claims description 8
- 239000012530 fluid Substances 0.000 claims description 7
- 239000012768 molten material Substances 0.000 abstract description 7
- 238000000295 emission spectrum Methods 0.000 abstract description 4
- 230000001678 irradiating effect Effects 0.000 abstract description 2
- 238000004611 spectroscopical analysis Methods 0.000 abstract description 2
- 239000000463 material Substances 0.000 abstract 2
- 230000001105 regulatory effect Effects 0.000 abstract 1
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 28
- 229910052786 argon Inorganic materials 0.000 description 14
- 239000007789 gas Substances 0.000 description 12
- 238000000034 method Methods 0.000 description 9
- 230000003595 spectral effect Effects 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 6
- 238000005259 measurement Methods 0.000 description 6
- 238000001228 spectrum Methods 0.000 description 6
- 238000007796 conventional method Methods 0.000 description 5
- 229910000805 Pig iron Inorganic materials 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000001533 laser emission spectroscopy Methods 0.000 description 3
- 239000000155 melt Substances 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 239000002893 slag Substances 0.000 description 3
- 102100025490 Slit homolog 1 protein Human genes 0.000 description 2
- 101710123186 Slit homolog 1 protein Proteins 0.000 description 2
- 238000007664 blowing Methods 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 229910000914 Mn alloy Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/71—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
- G01N21/718—Laser microanalysis, i.e. with formation of sample plasma
Landscapes
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は溶銑、溶鋼、スラグ、ガラス、半導体などをは
じめとする各種の流動状態にある金属または絶縁物の多
成分元素を、これらに接触することなくレーザーにより
連続的にオンライン分析する方法に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention continuously collects multi-component elements of metals or insulators in various fluid states, including hot metal, molten steel, slag, glass, semiconductors, etc., using a laser without coming into contact with them. on how to analyze online.
溶融物の分析には従来 （１）試料をるつぼ等の閉容器内に静置して分析する。Conventional methods for analyzing melts (1) Analyze the sample by placing it in a closed container such as a crucible.
（２）試料を溶融物の流れから採取して分析する。(2) A sample is taken from the melt stream and analyzed.
（３）励起源や測定系の一部を溶融物の流れの中に浸漬
して分析する。(3) Part of the excitation source and measurement system is immersed in the flow of the melt for analysis.
のいずれか、もしくはこれらを組み合わせた方法が用い
られてきた。閉容器内に試料を静置して分析する方法は
製造工程の分析に直ちに適用することが困難であり、ま
た試料を流れから取り出したり、溶融物の流れ中に分析
具を浸漬する方法は被測定物の流れを乱したり、汚染す
るという短所を有していた。Either method or a combination of these methods have been used. The method of analysis by leaving the sample still in a closed container is difficult to immediately apply to analysis in the manufacturing process, and the method of removing the sample from the flow or immersing the analytical tool in the flow of molten material is difficult to apply. This has the disadvantage of disturbing the flow of the object to be measured and causing contamination.
本発明は従来法のこのような問題点を解決し、流動状態
にある金属や絶縁物に接触することなくその成分分析を
オンラインで実施しようとするもので、流動状態の被測
定溶融物に大出力パルスレーザ−光を照射し、その時得
られる発光スペクトルを分光することにより、被測定物
に励起源、測定系を接触させずに、連続的にオンライン
分析することを目的としている。The present invention solves these problems of the conventional method and attempts to perform component analysis online without coming into contact with metals or insulators in a fluid state. The purpose of this method is to perform continuous online analysis without bringing an excitation source or measurement system into contact with the object to be measured by irradiating the output pulsed laser light and analyzing the resulting emission spectrum.
なおこのレーザー発光分析を溶融物に適用した例はこれ
までいくつかあるが、いずれも試料をるつぼ等の閉容器
内に静置することを前提にしており、溶融物が流動状態
にあってその表面が上下動するような製造工程における
オンライン分析に関するものではない。There have been several examples of applying this laser emission analysis to molten materials, but all of them are based on the premise that the sample is placed in a closed container such as a crucible, and the molten material is in a fluid state. It is not concerned with on-line analysis in manufacturing processes where surfaces move up and down.
本発明は被測定物が溶融状態で連続して流れてくるよう
な製造工程におけるオンライン分析に関するものであり
、レーザー発光分光分析を基本手法としている。レーザ
ー発光分光分析は、被測定物表面に強力なパルス状のレ
ーザー光を集光して被測定物表面層を瞬時に蒸発させ、
レーザー光でさらに励起して発光させ、その光を分光す
ることによって成分分析を行うもので、被測定物にレー
ザー系、分光器系を接触させる必要がない。The present invention relates to on-line analysis in a manufacturing process in which an object to be measured continuously flows in a molten state, and uses laser emission spectrometry as a basic method. Laser emission spectroscopy focuses a powerful pulsed laser beam on the surface of the object to be measured, instantly vaporizing the surface layer of the object.
The device is further excited with laser light to emit light, and the component analysis is performed by spectrally dispersing the light, and there is no need to bring the laser system or spectrometer system into contact with the object to be measured.
ところでこの分析手法を実際に現場分析に適用するに当
っては、被測定物の上下動の影響が最大の問題となる。However, when this analysis method is actually applied to on-site analysis, the biggest problem is the effect of vertical movement of the object to be measured.
本発明者らはこの間顕点を解明するだめに第１図に示す
装置を用いて、その調査を行った。レーザーとしては、
パルス幅１５ｎｓｅｃ、出力２Ｊ、波長１．０６ｐ、ｍ
の赤外線パルスレーザ−を用いた。The present inventors recently conducted an investigation using the apparatus shown in FIG. 1 in order to elucidate the focal point. As a laser,
Pulse width 15nsec, output 2J, wavelength 1.06p, m
An infrared pulsed laser was used.
第１図について説明するとレーザー発振器１より発生し
たレーザー光は、プリズム２で下方に曲げられ、集光レ
ンズ３により被測定物４の表面に集光されるようになっ
ている。被測定物４としてここではＦ ｅ −０，３％
Ｍｎ合金を用い、この合金をタンマン炉５により溶解し
た。この時被測定物４の表面に酸化膜が生成される事が
予想されたので、アルゴンガス導入部６よりアルゴンガ
スを吹き込み、アルゴンガス排出部７より系外に放出さ
せ、酸化膜の生成を抑制した。レーザー光によって生じ
た光は凹面鏡８、平面鏡９ａ、９ｂからなる光導入系に
より分光器１０に導いた。分光器１０の内部では、通常
の方法により波長＞＞ａし、２７１．４ｎｍのＦｅスペ
クトル、２９３，３ｎｍｃ７）Ｍｎスペクトルの強度を
二つの光検出器１１によりｌ＋ｌ定した。被測定物４と
レーザー分光器光学系の距離を変えるためにタンマン炉
５をリフト１２の上に載せ、溶解炉全体を上下Ｓせた。Referring to FIG. 1, a laser beam generated by a laser oscillator 1 is bent downward by a prism 2 and condensed onto the surface of an object to be measured 4 by a condenser lens 3. Here, as the object to be measured 4, Fe -0.3%
A Mn alloy was used, and this alloy was melted in a Tammann furnace 5. At this time, it was predicted that an oxide film would be formed on the surface of the object to be measured 4, so argon gas was blown into the argon gas inlet 6 and discharged from the argon gas outlet 7 to the outside of the system to prevent the formation of an oxide film. suppressed. Light generated by the laser beam was guided to a spectrometer 10 by a light introduction system consisting of a concave mirror 8 and plane mirrors 9a and 9b. Inside the spectrometer 10, the wavelength >>a was determined using a conventional method, and the intensities of the Fe spectrum at 271.4 nm and the intensity of the Mn spectrum at 293.3 nm (l+l) were determined by two photodetectors 11. In order to change the distance between the object to be measured 4 and the laser spectrometer optical system, the Tammann furnace 5 was placed on a lift 12, and the entire melting furnace was moved up and down.
この際アルゴンガスの流れが乱れぬよう、光導入系とタ
ンマン炉５の間にすり合せ１３を設けた。しＬザーの集
光レンズ３としてはそれぞれ焦点距離２０．５０．１０
０．１５０．２００ｃｍの５種類を取りかえて用いた。At this time, a grating 13 was provided between the light introduction system and the Tammann furnace 5 so that the flow of argon gas was not disturbed. The focal length of the L laser condenser lens 3 is 20.50.10, respectively.
Five types of 0.150.200 cm were used in exchange.
なお集光レンズ３を交換した場合には、被測定物表面が
その焦点にある時に発生する光が分光器入口スリット１
４に結像するように凹面鏡８の半径を選び、平面鏡９ａ
、９ｂの角度を調整した。第２図に焦点距離１００ｃｍ
の集光レンズを用いた時の被測定物４の上下動によるＦ
ｅ 、 Ｍ ｎスペクトル強度およびその比の変化を
示す。被測定物表面が集光レンズ３の焦点からずれるに
従って、スペクトル強度が次第に減少しているが、分析
に使用するスペクトル強度の比は、被測定物表面が集光
レンズ３の焦点より上下５ｃｍはどずれても変化しない
。同様の測定を集光レンズ３を換えて行った結果をまと
めると第３図のようになり、集光レンズ３と被測定物表
面の間の距＃文が、集光レンズ３の焦点距離ｆに対し０
、９５ ｆ≦文≦１，０５ｆ ・・・・・・・・・（１
）であれば、スペクトル強度比は不変であり、′４Ｊ、
測定物の上下動にかかわらず、安定した分析値が得られ
ることが判明した。Note that when the condensing lens 3 is replaced, the light generated when the surface of the object to be measured is at its focal point is transferred to the spectrometer entrance slit 1.
The radius of the concave mirror 8 is selected so that the image is formed on the plane mirror 9a.
, 9b were adjusted. Figure 2 shows a focal length of 100cm.
F due to the vertical movement of the object to be measured 4 when using the condensing lens
e, Mn shows the change in spectral intensity and its ratio. The spectral intensity gradually decreases as the surface of the object to be measured shifts from the focal point of the condensing lens 3, but the ratio of spectral intensities used for analysis is as follows: It doesn't change no matter what happens. The results of similar measurements performed by changing the condenser lens 3 are summarized as shown in Figure 3, and the distance between the condenser lens 3 and the surface of the object to be measured is the focal length f of the condenser lens 3. 0 against
,95 f≦text≦1,05f ・・・・・・・・・(1
), the spectral intensity ratio remains unchanged and '4J,
It was found that stable analytical values could be obtained regardless of the vertical movement of the measured object.
次に被測定物４として絶縁物系の５ｉ０２ ・Ａ文２０
３を用い、Ｓ ｉ （２８８，２ｎｍ） 、 Ａｎ（３
０９，３ｎｍ）の線スペクトルについて、第２図と同様
の測定を行った。その結果を第４図に示す。この場合に
も、被測定物表面が集光レンズ３の焦点より５ｃｍずれ
ても、スペクトル強度比はほぼ一定となっている。さら
に、集光レンズ３を換えて行った測定結果も第３図とほ
ぼ同様であり、」−記（１）式が満たされれば、被測定
物・表面の上下動の影響を受けないことが明らかとなっ
た。Next, as the object to be measured 4, insulator-based 5i02 ・A sentence 20
3, S i (288, 2 nm), An (3
Measurements similar to those in FIG. 2 were made for the line spectrum of 0.09.3 nm). The results are shown in FIG. In this case as well, even if the surface of the object to be measured is shifted by 5 cm from the focal point of the condenser lens 3, the spectral intensity ratio remains almost constant. Furthermore, the measurement results obtained by changing the condenser lens 3 are almost the same as those shown in Fig. 3, and if Equation (1) is satisfied, it will not be affected by the vertical movement of the object/surface to be measured. It became clear.
本発明はこのような知見に基づくもので、その要旨とす
るところは流動状態の金属または絶縁物の表面から距離
文の位置に焦点距離がｆである集光レンズを配設し、文
とｆとの関係が常に０、９５ ｆ≦文≦１，０５ｆ
となるように制御し、前記流動物表面に照射した大出力
パルスレーザ−の放出光を分光分析することを特徴とす
る流動状態の金属または絶縁物のレーザ一連続分析方法
である。The present invention is based on this knowledge, and its gist is that a condensing lens with a focal length f is disposed at a distance from the surface of a metal or insulator in a fluid state, and A metal in a fluid state, characterized in that the relationship between Alternatively, it is a continuous laser analysis method for insulators.
本発明は、被測定物が連続して流れており、その表面の
上ド動が避けがたい製造工程においても、上記（１）式
を満たずような場所にレーザー分光器系を設置し、適切
な焦点距離を持った集光レンズ３を選定することにより
、安定したレーザー発光分光分析をはじめてＯｆ能にし
たものである。焦点距離ｉｏｏ〜２００ｃｍの集光レン
ズを用いれば、被測定物表面の１０〜２０ｃｍの上下動
を許容することができ、通常の製造工程において上下動
の変動幅がこのような範囲内に限定される場所を見い出
すことや、被測定物の表面変動をこの範囲内に制御する
ことにより、本発明を容易に実施することができる。こ
の制御は例えば製造工程を改良し、上記（１）式が常に
成立するような樋等を特別に用意し、これを制御するこ
とでも良く、また溶解炉の傾斜を制御して、そこから流
出する被測定物流が上記（１）式を満たすようにするこ
とでも良い。The present invention installs a laser spectrometer system in a place where the above formula (1) is not satisfied even in the manufacturing process where the object to be measured is continuously flowing and upward movement of the surface is unavoidable. By selecting a condensing lens 3 with an appropriate focal length, stable laser emission spectroscopy can be performed for the first time. If a condenser lens with a focal length of ~200 cm is used, vertical movement of 10~20 cm on the surface of the object to be measured can be tolerated, and the fluctuation range of vertical movement is limited within this range in normal manufacturing processes. The present invention can be easily implemented by finding a location where the surface of the object to be measured falls within this range and by controlling surface variations of the object to be measured within this range. This control can be achieved, for example, by improving the manufacturing process and specially preparing and controlling a gutter so that the above equation (1) always holds true, or by controlling the inclination of the melting furnace so that the flow will flow out from there. The flow to be measured may satisfy the above equation (1).
本発明を実施するに当っては、まず装置を設置する場所
における被測定物表面の上下動の変動範囲を適当な方法
により測定する。この時の変動幅の１０倍以上の長さの
焦点距離を持つ集光レンズを用意すれば、（１）式が常
に成立し、被測定物と集光レンズとの距離の制御は不要
となる。また、条件に応じて、被測定物表面の上下動の
変動範囲が集光レンズの焦点距離の１０′分の１以下と
なるような表面位置制御方法を講する。In carrying out the present invention, first, the range of variation in the vertical movement of the surface of the object to be measured at the location where the device is installed is measured by an appropriate method. If you prepare a condensing lens with a focal length that is at least 10 times longer than the fluctuation width at this time, equation (1) will always hold, and there will be no need to control the distance between the object to be measured and the condensing lens. . Further, depending on the conditions, a surface position control method is adopted so that the variation range of the vertical movement of the surface of the object to be measured is 1/10' or less of the focal length of the condenser lens.
次いで、この被測定物表面から放出された光が分光器入
口スリットに結像するように光導入系を調整する。レー
ザーとしては赤外線パルスレーザ−が適しているが、可
視光の得られるルヒーレーザーも使用することができる
。レーザー照射によって放出された光の分光や特定スペ
クトルの強度の測定は公知の手法による。Next, the light introduction system is adjusted so that the light emitted from the surface of the object to be measured is focused on the spectrometer entrance slit. An infrared pulsed laser is suitable as the laser, but a Luhy laser that emits visible light can also be used. The spectroscopy of the light emitted by laser irradiation and the measurement of the intensity of a specific spectrum are performed using known methods.
なお被測定物表面に酸化膜等の別の物質が存在する時は
、これをアルゴンガスや窒素ガスを吹き付けて除去する
か、または被測定物と分離する適当な障害物等を設け、
レーザー光を被測定物に直接照射できるようにす・・る
。If there is another substance such as an oxide film on the surface of the object to be measured, remove it by spraying argon gas or nitrogen gas, or install an appropriate obstacle to separate it from the object to be measured.
Allows laser light to be directly irradiated onto the object to be measured.
実施例
第５図は本発明の実施に係る装置の側面図を示したもの
である。被測定物４は溶鉱炉の出銑樋を流れる銑鉄であ
る。銑鉄の表面には通常スラグが載っているが、スキマ
ーによりこれを除去した直後の位置にレーザー分光器を
設置した。レーザーとしてはパルス幅１５ｎｓｅｃ、出
力２Ｊの赤外線パルスレーザ−を用いた。レーザー発振
器ｌと分光器１０は分析台１５」二に固定した。レーザ
ー光はプリズム２で被測定物方向に垂直に曲げ、集光レ
ンズ３で収束した。この分析地点における銑鉄表面の」
−下動は最大で１０ｃｍと計測されたので、集光レンズ
３としては焦点距離がその１０倍以上すなわち１００ｃ
ｍ以上のものを用いれば良いが、光導入系等が銑鉄の輻
射熱を過度に受けないように、焦点距離１７０ ｃ ｍ
のレンズを用いた。Embodiment FIG. 5 shows a side view of an apparatus according to the embodiment of the present invention. The object to be measured 4 is pig iron flowing through a tap pipe of a blast furnace. There is usually slag on the surface of the pig iron, but a laser spectrometer was installed immediately after slag was removed using a skimmer. As the laser, an infrared pulsed laser with a pulse width of 15 nsec and an output of 2 J was used. The laser oscillator 1 and the spectrometer 10 were fixed to an analysis table 15''. The laser beam was bent perpendicularly to the direction of the object to be measured by a prism 2 and converged by a condenser lens 3. of the pig iron surface at this analysis point.
- Since the maximum downward movement was measured to be 10cm, the focal length of the condenser lens 3 should be 10 times or more, that is, 100cm.
It is sufficient to use a lens with a focal length of 170 cm or more, but in order to prevent the light introduction system etc. from receiving excessive radiant heat from the pig iron, the focal length should be 170 cm.
lens was used.
レーザー照射によって放出された光は凹面鏡８、平面鏡
９ａ、９ｂからなる光導入系で分光器入ロスリッｉ・１
４に結像するようにした。この光導入系がガス、粉塵で
汚染されないようアルゴンガス導入部６よりアルゴンガ
スを吹き込んだが、さらに安全を期するために、光導入
系ｆ部にアルゴン吹き付は管１６を取り付け、アルゴン
ガス追加導入部１７よりさらにアルゴンガスを吹き込ん
だ。The light emitted by the laser irradiation is passed through a light introduction system consisting of a concave mirror 8 and plane mirrors 9a and 9b to a spectrometer input Rosli-1.
The image is now focused on 4. Argon gas was blown into the light introduction system from the argon gas introduction part 6 to prevent it from being contaminated with gas and dust, but for further safety, an argon blowing pipe 16 was attached to the light introduction system f part, and argon gas was added. Further argon gas was blown into the inlet 17.
分光器１０は焦点距離２００ ｃ ｍで、２４００ｕ／
ｍｍの回折格子で分光し、光電子増倍管１８によりスペ
クトル強度をめた。分析した元素、スペクトル線の波長
、分析結果を第１表に示す。この表には従来法により試
料を採取し、るつぼ内に静置して分析した結果も併せて
示したが、本発明による分析結果は従来法と良く一致し
ている。The spectrometer 10 has a focal length of 200 cm and a 2400 u/
The spectrum was analyzed using a mm diffraction grating, and the spectral intensity was determined using a photomultiplier tube 18. Table 1 shows the analyzed elements, wavelengths of spectral lines, and analysis results. This table also shows the results of samples taken by the conventional method and analyzed after being placed in a crucible, and the analysis results according to the present invention are in good agreement with the conventional method.
本発明方法によって、流動状Ｊｕｌの金属または絶縁物
をレーザーを用いて精度よくオンライン分析することが
可能となり、オンラインの工程管理や品質管理の精度を
著しく高めることが可能となった。By the method of the present invention, it has become possible to accurately conduct on-line analysis of fluidized metals or insulators using a laser, and it has become possible to significantly improve the precision of on-line process control and quality control.
第１表Table 1
第１図は被測定物表面の上下動の影響を調査したレーザ
ー分光分析装置の模式的側面図、第２図はＦｅ−０，３
％Ｍｎの表面の上下動によるスペクトル強度の変化を示
すグラフ、第３図はスペクトル強度比が一定となる範囲
を示すグラフ、第４図はＳ ｉ ０２−Ａｕ２０３の表
面の」二下動によるスペクトル強度の変化を示すグラフ
、第５図は溶銑樋」；における本発明を実施する装置例
の側面図を示す。
ｌ・・・レーザー発振器、２・・・プリズム、３・・・
集光レンズ、４・・・被測定物、５・・・タンマン炉、
６・・・アルゴンガス導入部、７・・・アルゴン力スリ
１山部、８・・・凹面鏡、９ａ、９ｂ・・・平面鏡、１
０・・・分光器、１１・・・光検出器、１２・・・リフ
ト、１３・・・すり合せ、１４・・・分光器人Ｉ」スリ
ット、１５・・・分析台、１６・・・アルゴン吹き付は
管、１７・・・アルゴンガス追加導入部、１８・・・光
電子増倍管
出願人 川崎製鉄株式会社
日本分光Ｔ業株式会社
分光計器株式会社
代理人 弁理士 小杉佳男
第１図
侭 第２図
個
吠
下−焦由 −上
第３図
、集光レンスの焦真距敲 （Ｃｍ）
第４図
侭
悩
暉
下← 焦負→上Figure 1 is a schematic side view of a laser spectrometer that investigated the effects of vertical movement on the surface of the object to be measured, and Figure 2 is a schematic side view of a laser spectrometer that investigated the effects of vertical movement on the surface of the object to be measured.
Figure 3 is a graph showing the range where the spectral intensity ratio is constant. Figure 4 is the spectrum due to the vertical movement of the surface of Si02-Au203. FIG. 5 shows a side view of an example of an apparatus for carrying out the present invention in a hot metal sluice. l...laser oscillator, 2...prism, 3...
Condensing lens, 4... Object to be measured, 5... Tammann furnace,
6... Argon gas introduction part, 7... Argon force slit 1 mountain part, 8... Concave mirror, 9a, 9b... Plane mirror, 1
0... Spectrometer, 11... Photodetector, 12... Lift, 13... Grinding, 14... Spectrometer I" slit, 15... Analysis table, 16... Argon blowing tube, 17... Argon gas additional introduction part, 18... Photomultiplier tube Applicant: Kawasaki Steel Corporation, JASCO T-Gyo Co., Ltd., Spectrometer Co., Ltd. Agent, Patent attorney Yoshio Kosugi, Figure 1 Fig. 2: Lowering - Jiaoyu - Upper Fig. 3: Focusing distance of the condensing lens (Cm) Fig. 4: Convergence of light ← - Upper
Claims (1)
置に焦点距離がｆである集光レンズを配設し、文とｆと
の関係が常に ０、９５ ｆ≦文≦１．０５ｆ となるように制御しつつ、前記流動状態の被測定物表面
に照射した大出力パルスレーザ−による放出光を分光分
析することを特徴とする流動状態の金属、絶縁物のレー
ザ一連続分析方法。[Claims] l A condensing lens with a focal length f is disposed at a distance from the surface of a metal or an insulator in a fluid state, and the relationship between the focal length and f is always 0, 95 f≦mm. ≦1.05f, and spectroscopically analyzes the light emitted by a high-output pulsed laser irradiated onto the surface of the object to be measured in the fluid state. Continuous analysis method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10845683A JPS60347A (en) | 1983-06-16 | 1983-06-16 | Laser continuous analysis of metal and insulator in fluidized state |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10845683A JPS60347A (en) | 1983-06-16 | 1983-06-16 | Laser continuous analysis of metal and insulator in fluidized state |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60347A true JPS60347A (en) | 1985-01-05 |
| JPH0145017B2 JPH0145017B2 (en) | 1989-10-02 |
Family
ID=14485228
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10845683A Granted JPS60347A (en) | 1983-06-16 | 1983-06-16 | Laser continuous analysis of metal and insulator in fluidized state |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60347A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4885960A (en) * | 1987-09-07 | 1989-12-12 | Aisin Seiki Kabushiki Kaisha | Control system for automatic transmission |
| US6439269B1 (en) | 2000-06-28 | 2002-08-27 | Burlington Industries, Inc. | Room darkener fabric with solution dyed black yarn |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS547593A (en) * | 1977-06-20 | 1979-01-20 | Sumitomo Electric Ind Ltd | Through-under-bridg cable placing from ship |
| JPS57100323A (en) * | 1980-12-15 | 1982-06-22 | Kawasaki Steel Corp | Method for spectrochemical analysis of steel by using laser beam |
-
1983
- 1983-06-16 JP JP10845683A patent/JPS60347A/en active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS547593A (en) * | 1977-06-20 | 1979-01-20 | Sumitomo Electric Ind Ltd | Through-under-bridg cable placing from ship |
| JPS57100323A (en) * | 1980-12-15 | 1982-06-22 | Kawasaki Steel Corp | Method for spectrochemical analysis of steel by using laser beam |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4885960A (en) * | 1987-09-07 | 1989-12-12 | Aisin Seiki Kabushiki Kaisha | Control system for automatic transmission |
| US6439269B1 (en) | 2000-06-28 | 2002-08-27 | Burlington Industries, Inc. | Room darkener fabric with solution dyed black yarn |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0145017B2 (en) | 1989-10-02 |
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