JPS6035530A - Positioning device - Google Patents

Abstract

PURPOSE:To enable to shorten the exchange time of a housing jig for matters to be bonded in a semiconductor pellet bonding device by a method wherein a positioning of the housing jig is performed just after an exchange of the housing jig ended. CONSTITUTION:As an X-Y table 1 is shifted, a contact pin 14 is made to contact to the inclined plane 16 of a contact block 15 and is made to slide, a link bar 9 is rotated and a positioning pin 4 is made to vertically moved. While the X-Y table 1 is being made to shift to a pellet jig exchange position, the contact pin 14 is made to contact to the inclined plane 16, and at the same time, the tip of the positioning pin 4 is made to descend to a position lower than the lower surface of a housing jig 7, and the jig 7 is housed in the X-Y table 1 by a drive system 6 through a jig pusher 5 and an exchange of the jig is performed. Just after the accomodation and exchange ended, the X-Y table 1 is made to shift, the positioning pin 4 is made to ascend up to a position higher than the jig 7 and a positioning of the jig 7 is performed.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field] The present invention relates to positioning technology, particularly to a technology that is effective when applied to bonding technology for attaching a pellet to a substrate such as a lead frame.

[71st Background Art] As a bullet bonding device for attaching a semiconductor bullet to a substrate such as a lead frame, a structure as shown in FIG. 1+8) and (b) can be considered.

When replacing the pellet jig in this bullet bonding apparatus, the XY table 1 moves to the pellet jig replacement position and stops, then the shaft 2 moves and contacts the ball bearing 3. When the shaft 2 moves further beyond the contact point, the positioning pin 4 is lowered by the link mechanism. Further, the jig pusher 5 moves in the same direction as the shaft 2 by the same drive system 6, and stores the pellet jig 7 on the XY table 1 on which the positioning pin 4 is lowered. After storing the pellet jig 7, the jig busher 5
and the shaft 2 move in the opposite direction, and the positioning pin 4 finishes rising when the shaft 2 leaves the ball bearing 3.

At this point, the pellet positioning when exchanging the pellet jig is completed and the XY table 1 begins to move to the pellet bonding position, but even though the pellet jig 7 has been stored in the XY table 1, the axis 2 is in contact with the ball bearing 3, the positioning pin 4 of the pellet jig 7
has not risen, positioning has not been completed, and XY
The inventors have discovered that there are problems such as the table 1 cannot be moved, the jig replacement time becomes long, and the work efficiency is poor.

[Object of the Invention] An object of the present invention is to provide a positioning technique that can efficiently replace a storage jig for a bonded object in a short time.

The above and other objects and novel features of the present invention will become apparent from the description of this specification and the accompanying drawings.

[Summary of the Invention] A brief overview of typical inventions disclosed in this application is as follows.

That is, the jig replacement time can be shortened by configuring the storage jig so that the positioning of the storage jig can be performed immediately after the replacement of the storage jig is completed.

[Embodiment 1] Fig. 2 is a schematic explanatory diagram of a bonding device which is an embodiment of the present invention, and Fig. 3 (al) and (b) are respectively a perspective view and a side view of an embodiment of the positioning block. It is.

In this first embodiment, the bonding apparatus is used for bonding semiconductor pellets, and parts corresponding to those of the apparatus in FIG. 1 are designated by the same reference numerals and redundant explanation will be omitted.

In this pellet bonding apparatus, a semiconductor pellet (not shown), which is an object to be bonded, is placed on an XY table 1 and positioned by a pellet jig 7 (
It is stored in a storage jig).

This pellet jig 7 has positioning pins 4 extending in the vertical direction.
It is positioned on the XY table 1 by (positioning means). The lower end of this positioning pin 4 is connected through a pin 11 into a long hole 10 formed in a link part 9 of the link mechanism 8. The linker 9 is rotatably attached to a block 13 by a pin 12, and the block 13 is coupled to an XY table 1 and can move together with the XY table 1 in the XY directions. Further, a contact pin 14 (contact member) for positioning is fixed to the lower surface of one # (left end in FIG. 2) of the linker 9.

This contact pin 14 slides in contact with the inclined surface 16 of the contact block 15 as the XY table l moves in the XY direction, and the vertical movement of the contact pin 14 at the time of sliding causes the contact pin 14 to move around the pin 12 as the center. The linker 9 is rotated to move the positioning pin 4 up and down.

That is, for example, the contact pin 14 is connected to the contact block 15.
When the right end of the link par 9 (as seen in FIG. 2) rotates counterclockwise around the pin 12, the right end of the link par 9 (as seen in FIG. 2) rotates counterclockwise around the pin 12 for comparison. The positioning pin 4 rises above the pellet jig 7 as shown by the two-dot chain line 4a in FIG. Perform positioning of L7. On the other hand, what about contact pin 14? 'Ji When sliding to a relatively high position on the slope I6, the right end of the link par 9 is connected to the pin 12.
The positioning pin 4 rotates clockwise around the center, and the positioning pin 4 descends to a position where the tip thereof is lower than the lower surface of the pellet jig 7. This allows the drive system 6 to move the pellet jig 7 on the XY table 1 via the jig pusher 5.

Therefore, the contact block 15 of this embodiment has a substantially fan-shaped shape when viewed from the top, and the contact pins 14 are
When the table 1 moves in either the X or Y directions, it can easily ride on the inclined surface of the contact block 15.

Next, the operation of this embodiment will be explained.

When exchanging the pellet jig 7 in the bonding apparatus of this embodiment, first, when the XY table 1 moves to the pellet jig exchange position and stops, the positioning pin 4
In order to complete the descent of XY table 1,
While the contact pin 14 is being moved to the vereso 1-jig exchange position, the contact pin 14 is brought into contact with the inclined surface 16 of the contact block 15 and slid, and the positioning pin 4 is lowered by the link mechanism 8. Next, the jig pusher 5 is moved by the drive system 6, the pellet jig 7 is stored in the XY table l, the pellet jig is exchanged, and immediately after the storage exchange, the XY table l is moved to determine the position. The pin 4 is raised and positioned.

Therefore, according to this embodiment, the pellet jig can be positioned immediately after replacing the pellet jig, so that the time for replacing the pellet jig can be shortened, and the number of man-hours during pellet bonding can be reduced.

[Embodiment 2] Figures 4+a) and 4(b) are a perspective view and a side view, respectively, of another embodiment of a contact block that can be used in the present invention.

In this embodiment, the contact block 15a has the shape of a sector in plan view and a right triangle in side view, and the contact pin 14a has a shape of a right triangle in side view.
has an inclined surface 16a on which it slides.

In this case as well, the contact bin 14 can ride on the inclined surface 16a from any direction in the XY direction, and the pellet jig 7 can be positioned immediately after replacing the pellet jig.
It is possible to shorten the pellet jig replacement time.

[Embodiment 3] FIG. 5(a) and fbl are a perspective view and a side view, respectively, of still another embodiment of a contact block that can be used in the present invention.

In this embodiment, (LQ f, 1
The surface 16b has a substantially fan-shaped or substantially triangular shape when viewed from a plan view, and has a slightly arcuate and raised shape at the center side in the direction of inclination.

This curved shape allows the contact bottle I4 to ride on the inclined surface 16b more easily from any direction in the XY direction.

[Effects] (l) Since the storage jig can be positioned immediately after the storage jig is replaced, the time for replacing the storage jig can be shortened and work efficiency can be improved.

(2) The contact member can contact the slope of the contact block from any direction in the XY direction and move along the slope, making it easier to position the storage jig in a shorter time. It can be done with

Although the invention made by the present inventor has been specifically explained based on examples above, the present invention is not limited to the above-mentioned examples - it goes without saying that various changes can be made without departing from the gist of the invention. Nor.

For example, as the contact member, a contact ball bearing or the like can be used in addition to the contact bottle. Furthermore, the structure of the contact block can be modified in various ways, such as making it square in plan view.

[Field of Application] In the above explanation, the invention made by the present inventor was mainly explained in the case where it was applied to pellet positioning in a bonding device, which is the field of application that formed the background of the invention.
The present invention is not limited thereto, and can be widely applied to bonding techniques for other minute articles, for example.

[Brief explanation of the drawing]

Figures 1+a) and (b) are schematic explanatory diagrams showing the raised and lowered states of the positioning pin of a pellet bonding device devised by the present inventor, respectively, and Figure 2 is a bonding device that is an embodiment of the present invention. 3 (01, (b) are respectively a perspective view and a side view of one embodiment of the contact block 1. Figure 4 (al, fbl are respectively the contact block 1.'J7) FIG. 5 is a perspective view and a side view showing still another embodiment of the (al and bl are contact blocks L, respectively). 1... XY table, 2...shaft, 3...ball bearing,
4, 4a... positioning pin (positioning means), 5...
・Jig pusher, 6... Drive system, 7... Pellet jig (storage jig), 8... Link 8M tli, 9.
... Links\-110... Long hole, 11... Pin,
12...Pin, 13...Block for installation, 14...
・・Contact pin (contact member>, 15.15a, 1.5b-
--Contact) 'Log 1G, 16a, 16b・-・jq
slope. Figure 1/ Figure 2 Figure 3 Figure 4 Figure 5

Claims (1)

[Claims] 1. In an apparatus for bonding an object to be bonded stored in a storage jig to an object to be bonded, a positioning means for positioning the storage jig placed on an XY table, and operating the positioning means. a contact member provided at one end of the link mechanism, a contact block having an inclined surface with which the contact member comes into contact, and on which the contact member operates along the inclined surface; A positioning device comprising a moving means for storing the tool on the XY table. 2. The contact member contacts the inclined surface from any direction in the XY direction to reach the pJ! 2. The positioning device according to claim 1, wherein the positioning device is operable along a slope. 3. The positioning device according to claim 1 or 2, wherein the inclined surface has a substantially fan-shaped planar shape.