JPS604573U - 結晶引上げ装置 - Google Patents

結晶引上げ装置

Info

Publication number
JPS604573U
JPS604573U JP9563783U JP9563783U JPS604573U JP S604573 U JPS604573 U JP S604573U JP 9563783 U JP9563783 U JP 9563783U JP 9563783 U JP9563783 U JP 9563783U JP S604573 U JPS604573 U JP S604573U
Authority
JP
Japan
Prior art keywords
pulling device
crystal pulling
crystal
transparent plate
monitoring window
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9563783U
Other languages
English (en)
Inventor
志村 昭夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP9563783U priority Critical patent/JPS604573U/ja
Publication of JPS604573U publication Critical patent/JPS604573U/ja
Pending legal-status Critical Current

Links

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  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。

Description

【図面の簡単な説明】
第1図は結晶引上げ装置の概略断面図、第2図は目盛り
を刻んだ透明板の斜視概略図。 1・・・シャフト、2・・・チャンバ、3・・・結晶成
長監視窓、3′・・・目盛りを刻んだ透明石英板、4・
・・種結晶、5・・・結晶、6・・・保温筒、フ・・・
発熱体、8・・・サセプター、9・・・坩堝、10・・
・融液、11・・・電極、12・・・熱電対。

Claims (1)

    【実用新案登録請求の範囲】
  1. 結晶を引上げ法によって成長する装置において目盛りを
    刻んだ透明板を結晶成長監視窓に配置したことを特徴と
    する結晶引上げ装置。
JP9563783U 1983-06-21 1983-06-21 結晶引上げ装置 Pending JPS604573U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9563783U JPS604573U (ja) 1983-06-21 1983-06-21 結晶引上げ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9563783U JPS604573U (ja) 1983-06-21 1983-06-21 結晶引上げ装置

Publications (1)

Publication Number Publication Date
JPS604573U true JPS604573U (ja) 1985-01-14

Family

ID=30228302

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9563783U Pending JPS604573U (ja) 1983-06-21 1983-06-21 結晶引上げ装置

Country Status (1)

Country Link
JP (1) JPS604573U (ja)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55144497A (en) * 1979-04-27 1980-11-11 Toshiba Corp Preparing single crystal
JPS588781U (ja) * 1981-07-11 1983-01-20 日産自動車株式会社 液体用回転ポンプ

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55144497A (en) * 1979-04-27 1980-11-11 Toshiba Corp Preparing single crystal
JPS588781U (ja) * 1981-07-11 1983-01-20 日産自動車株式会社 液体用回転ポンプ

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