JPS6048431A - Method for eliminating eddy flow in clean room - Google Patents

Abstract

PURPOSE:To eliminate an eddy air flow by a method wherein the air is sucked from the space below the grating floor by a high pressure blower, filtered with a primary filter and the high pressure air is injected from the bunker louver type blowing port to the step part of the working table through a high pressure blowing pipe acting also as a hunger. CONSTITUTION:Air blown to a duct D by a blower M is purified by a ceiling air filter F and blown into a compartment R. Eddy air flow (f) is generated at the step part (d) of a working table A and stays there, resulting in that a part of the air is sucked from below the grating floor G through a suction pipe 12, the air is made as a high pressure air and purified by a primary filter 13 and fed to a high pressure feeding pipe 9, secondarily filtered with a cartridge HEP filter, the high pressure air is injected to the step (d) of the desired working table A from the banker louver type blowing port 6 through SUS pipe to blow off the eddy air flow (f) staying while containing the dust therein from the region at the step (d) while removing the dust.

Description

[Detailed description of the invention] [Field of application of 1-a industry] This invention ← [, in a clean room where the painting room is purified]・1
The protrusion 1, which is placed on the workbench: eliminates the vortex airflow that occurs) 5712.

[Prior art]

- First, a conventional method for purifying a compartment to form a clean room will be explained.

Figure 1 is a schematic explanatory diagram showing an example of a down 70-type (full-scale laminar flow type) clean room, where (a) is a vertical cross-sectional view, and (middle) is an ilZ view of the ceiling mower. .

K refers to the structural frame R that forms the partition wall space of the building, and the grating floor G, groove D, and partition wall S that are formed over the whole of the ceiling space and the grating floor G in the partition wall space formed on the structural frame.
8 is the workbench formed by the RK of the room, H is the air outlet arranged on the entire ceiling at regular intervals, Air outlet H
Jl (V, lid 1 cut ceiling air filter, M phantom, separate room BK mowed under the grating floor G, surrounded by the partition wall S and the structural frame. Installation L" 7.・
In the beginning, IC1 is the fan, 2 is the air filter, and 3 is the fan.
1d Kucht D-\] is a blower pipe.

With this configuration, the air blown downward from the duct D is purified by the ceiling air filter F and sent to the compartment R, where it is contaminated with dust generated in the compartment R. The air is sucked out from the vents T of the grating floor G to below the floor by the blower M, purified by the air filter 2 (and then sent to the data point D). In this way, the compartment R is constantly purified. There is a clean room in the form of an IJV.

However, in this clean room, as shown in Figure 2, various work platforms A soil of the production line, especially points P, t,
By the airflow blown down to the step part d etc. formed by
Haki bff f is generated within the region r of the nuclear step d. This is a phenomenon that occurs uniquely when there is a <lr gap in the middle of the air flow f, and when the air flow hits the workbench A, the stage =
The vertex p of 1+ d is the quasi-point of the separation V (flow 11 saliva 1q stiffness, the discontinuous surface m of the momentum reaches the point sK from the point p. Therefore, connecting each point of p-t-5 The pressure in the region r is lower than the pressure in the compartment R, and the airflow near the air discontinuity surface m forms a hegemonic airflow f, bIf, in the above-mentioned '1ilJ:bρr.

Moreover, this flow of air engulfs the dust generated during production and stays there, so the removal of 11 μm is stopped, which is useful for improving semiconductor performance, as in the semiconductor industry, for example. Accordingly, there is a problem that the cleanliness level 2 in the clean room is that the stepped section d (7) area r of workbench A, which originally requires the most cleanliness, has a high history of contamination, even though it is quite severely infected. There is. Therefore, it is conceivable to install a blower as a means to eliminate the above-mentioned superfluous air flow F, but the blower itself not only causes dust generation, but also becomes a nuisance and causes objects to be placed under the ceiling air filter F. i&
<I don't like Kotoke.

[Purpose of the invention]

This invention was developed by focusing on these problems.The channel in which the ceiling air filter is mounted is suspended from the structural frame. A high-pressure blower pipe/hanger with a blowout function is provided, air is taken in from under the grating floor by a high-pressure blower, a portion of the air is filtered by a filter, and high-pressure air is drawn from the bunker louver-type outlet through the high-pressure blower pipe/hanger. 1-1 on the workbench! We have decided to provide a method to eliminate the air flow by injecting it into the area '.

〔Example〕

Hereinafter, one embodiment of the present invention will be explained in detail with reference to FIG. 3 and subsequent figures. In the following, the same or equivalent part 5) as the conventional example will be exemplified by the same item A'), and its explanation will be /I:4tllii.

[Real/I^Example horizontal IJk]

ra Figure 3 (A) is a partial cross-sectional explanatory diagram showing the installation status 4 of the ceiling air filter F. Insert the ceiling air filter Fld into the channel C1C and insert the part F (1, Near j removable 1r (not installed, channel C, -eTL) ∆γ is set in J of 1
A bolt 4 equipped with a turnbuckle 4t is fixed to the solid π metal k and hangs from the blue ν section K of 1:i:++.

This flowering high-pressure feeding organ also serves as an internal tube... 1'jI, 1'jI, 1'jI, 1'jI, 1'jI, 1'jI, 1'jI, 1'jI, 1'jI, on the top 4 of the SUS vibrator 5p installed upright in the channel C near the 11i position 1i77 of the workbench A. Cartridge 1 is attached to the top of the SOS vibe 5p. High pressure air pipe 8 equipped with 18P A filter 7
However, the air g8 is supplied from the flexible tube IOK installed in the duct D.

It should be noted that there is one lighting device in L and one in channel C.

On the other hand, as shown in FIG. 4, part of the air from the grating floor G is sucked in through the intake pipe 12 by high-pressure air blower A. After 11, ``1,5 pressure delivery, I+'' to send air to +19! ]Road I4
I'm growing up.

[Effect of the embodiment]

Ventilation (Duc l-D VC supply by IVI) (Empty air filter I, purified by the ceiling air filter F, and blown into the painting room H'!), at the step d of the workbench A haki f5
1i: Since it generates f and has a surface quality, high pressure blower 11
Some air is taken in from under the grating floor G by the intake bone 12.
It is suctioned through the air, converted into high-pressure air, partially purified by the filter 13, and sent to the high-pressure delivery pipe 9.
High-pressure air is injected from the blower 1 of Pankar Parts W through the entire pipe 5p to step d of the next workbench A to remove the residual air flow f remaining at step d of the workbench A. Blow away and erase from area r.

[Effects of implementation f9] As explained above, this invention has the advantage that the grating L
A portion of the air is sucked in from below the imitation to create high-pressure air, which is then subjected to secondary purification and then sent to the next stage through bunker louver type blow-out 1].
Since we have provided a method to eliminate the accumulated air flow by injecting hand-sewn high-pressure air onto the workbench of No. 4, we have provided a method to eliminate the accumulated air flow by spraying hand-sewn high-pressure air onto the workbench.
This has the remarkable effect of preventing the generation of ft and not allowing the accumulation of l/c dust, allowing a clean state of 94F to be maintained at all times, and forming a true clean room.

[Brief explanation of the drawing]

Figure 1 is an explanatory diagram showing the 11a height of a conventional clean room. Figure 1 is an explanatory diagram showing the situation in which a superfluous airflow occurs; -Gunbe 101 diagram, Figure (The river is a perspective view of the interior of the room, Figure (c) is a plan view of the inside of the ceiling,
FIG. 4) is an enlarged sectional view of a portion related to the bunkerloo/dog-shaped air outlet, and FIG. 4 is an explanatory diagram showing the configuration related to the high IL blower of the present invention. H...... Air outlet F... Ceiling air filter R...
...Painting room G...Grate floor T...Vent hole A...Working table f...・Hakiryu C・・・・・・・・・Channel 5・・・・・・High pressure air pipe/no-gar 6・・・
...Bunker louver jg'! Speech bubble.

Claims (1)

[Claims] The air blown downward from the air outlets arranged at regular intervals along the entire curve of the ceiling is purified by an air filter and then supplied to the compartment. When purifying the artist by sucking it out from the floor with ventilation holes, the vortex airflow generated on the various work tables installed in the 5 houses was purified by sucking some air from under the floor and converting it into madder pressure air, +3fJ. A method of eliminating vortex air currents that occur in a clean room by ejecting air from a bunker louver-type outlet installed at the bottom of the high-pressure blow pipe and noker that suspends the chamber that holds the air filter.