JPH0252774B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a method for eliminating vortex airflow generated on a workbench located in a clean room with a purified compartment.

[Prior art]

First, a conventional method for purifying a compartment to create a clean room will be explained.

FIG. 1 is a schematic explanatory diagram showing an example of a down-flow type (full-scale laminar flow type) clean room, where A is a vertical sectional view and B is a plan view of the ceiling.

K is the structural frame that forms the bulkhead space of the building;
R is a compartment surrounded by a grating floor G, a duct D formed over the entire attic, and a partition wall S in a partition space formed by the structural frame K, and A is placed in the compartment R. A workbench constituting the production line, H is an air outlet provided on the entire ceiling at regular intervals, F is a ceiling air filter attached to the outlet H, and M is the partition wall S. A grating floor G surrounded by a structural frame K
A blower is placed in a separate room B that leads to the bottom, where I is the fan, 2 is the air filter, and 3 is the air pipe that leads to the duct D.

With this configuration, the air blown downward from the duct D is purified by the ceiling air filter F and sent to the compartment R.
The air contaminated with dust generated in the air is sucked out from the ventilation hole T of the grating floor G to the underfloor by the blower M, purified by the air filter 2, and sent to the duct D again. In this way, the compartment R is constantly purified and a clean room is formed therein.

However, in this clean room, the second
As shown in the figure, the airflow blowing down on the steps d, etc. formed on the various workbenches A of the production line, especially points p, t, and s, causes a vortex air flow in the region r of the steps d. f occurs. The generation of this vortex airflow f is a phenomenon that occurs uniquely when there is a depression in the middle of the flow.When the airflow hits the workbench A, the apex of the stepped portion d
becomes a separation point, separation of the airflow occurs, and a discontinuous surface m of air velocity reaches point S from point p. For this reason, p
The pressure in the region r connecting each point of -ts is lower than the pressure in the compartment R, and the airflow near the air velocity discontinuity surface m flows into the region r and forms a vortex airflow f. Moreover, this vortex air current f entrains dust generated during production and stays there without separating, preventing the removal of dust. Industry A requires the highest level of cleanliness, even though it has become quite strict.
The problem is that the region r of the stepped portion d is highly contaminated. Therefore, it is conceivable to install a blower as a means to eliminate the vortex airflow f, but not only does the blower itself become a cause of dust generation,
It is not preferable to place anything under the ceiling air filter F as it may get in the way.

[Purpose of the invention]

This invention was made in view of these problems, and involves modifying a part of the hanger that hangs the channel on which the ceiling air filter is mounted from the structural frame, and equipping the lower end with a panker louver type air outlet. A high-pressure blower pipe/hanger is installed, and air is taken in from under the grating floor by a high-pressure blower, passed through a primary filter, and then the high-pressure air is injected from a panker louver-type outlet to the step part of the workbench through the high-pressure blower pipe/hanger. The purpose of this invention is to provide a method for eliminating eddy air currents.

〔Example〕

Hereinafter, one embodiment of the present invention will be described based on FIG. 3 and subsequent figures. Note that the same or equivalent parts as in the conventional example are given the same reference numerals, and the explanation thereof will be omitted.

[Configuration of Example]

Figure 3A is a partial cross-sectional explanatory diagram showing the installation state of the ceiling air filter F, in which the ceiling air filter F is removably placed by inserting its leg parts Fl and Fl into channels C and C. , the channels C are suspended from the upper structural frame K by fixing hangers 4 having turnbuckles 4t to fixing fittings k erected on the bottom surfaces of the channels.

The high-pressure air pipe/hanger 5 of this invention is installed upright in the channel C near the location of the workbench A.
A short hanger 4 is fixed to the upper end of the SUS pipe 5p, and a punker louver type outlet 6 is installed through the channel C. and
Cartridge HEPA is installed at the top of SUS pipe 5p.
A high-pressure air pipe 8 equipped with a filter 7 is installed, and the air pipe 8 is connected by a flexible tube 10 to a high-pressure delivery pipe 9 installed in the duct D.

Note that L is a lighting device placed on channel C.

On the other hand, as shown in Fig. 4, the grating floor G
A circuit is constructed in which a part of the air is sucked in from below via an intake pipe 12 by a high-pressure blower 11, passed through a primary filter 13, and then sent to a high-pressure distribution pipe 9.

[Effect of the embodiment]

The air sent to the duct D by the blower M is
The air is purified by the ceiling air filter F and blown into the compartment R, where it generates a vortex air flow f and stagnates at the step d of the workbench A.The high-pressure blower 11 blows some of the air from below the grating floor G to the intake pipe. 12, and converts it into high pressure air to the primary filter 1.
3, the air is sent to the high-pressure distribution pipe 9, and then passed through the cartridge HEPA filter 7 for a second time, and is then sent through the SUS pipe 5p from the panker louver type outlet 6 to the step d of the workbench A. The vortex air current f, which is injected and remains holding dust, is blown away from the region r of the stepped portion d and eliminated.

[Effects of Examples]

As explained above, this invention sucks a portion of the air from under the grating floor and converts it into high-pressure air.
This method provides the highest level of cleanliness by performing primary and secondary purification and injecting a small amount of high-pressure air onto the required workbench using a panker louver type outlet. The remarkable effect is that it prevents the generation of vortex air currents in the step section where the actual work is performed, does not allow dust to accumulate, maintains a clean state at all times, and creates a true clean room. It is something that plays.

[Brief explanation of the drawing]

Figure 1 is an explanatory diagram showing the outline of a conventional clean room. Figure A is a vertical sectional view, Figure B is a plan view of the attic, and Figure 2 is a diagram showing the vortex airflow generated at the step of the workbench. An explanatory diagram showing the situation, FIG. 3 is an explanatory diagram showing the configuration related to the high pressure air pipe and hanger of the present invention,
Figure A is a partial cross-sectional view showing the installed state of the ceiling filter, Figure B is a perspective view of the interior of the compartment, Figure C is a plan view of the inside of the ceiling, Figure D is an enlarged cross-sectional view of the part related to the panker louver type air outlet, FIG. 4 is an explanatory diagram showing a configuration related to the high-pressure blower of the present invention. H...Air outlet, F...Ceiling air filter, R...Groom, G...Grating floor, T...
Ventilation hole, A...workbench, f...vortex airflow, C...channel, 5...high-pressure air pipe/hanger, 6...panker louver type outlet.

Claims (1)

[Claims] 1. The air blown downward from the air outlets placed on the entire surface of the ceiling at regular intervals is purified by an air filter and supplied to the compartment, and the air contaminated with dust generated in the compartment is removed from the grating floor, etc. When purifying the drawing room by sucking air out from the floor that has ventilation holes, the vortex airflow generated on various work tables installed in the drawing room is purified by sucking some air from under the floor and converting it into high-pressure air, and then holding the air filter. A method of eliminating vortex airflow that occurs in a clean room by ejecting air from a panker louver-shaped outlet installed at the bottom of the high-pressure air pipe/hanger that hangs the channel.