JPS6059536U - chatting table - Google Patents
chatting tableInfo
- Publication number
- JPS6059536U JPS6059536U JP15032283U JP15032283U JPS6059536U JP S6059536 U JPS6059536 U JP S6059536U JP 15032283 U JP15032283 U JP 15032283U JP 15032283 U JP15032283 U JP 15032283U JP S6059536 U JPS6059536 U JP S6059536U
- Authority
- JP
- Japan
- Prior art keywords
- chatting
- chucking
- vacuum hole
- wafer
- porous metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来技術のウェハ固定を説明する図、第２図は
本考案の一実施例のチャッキング・テーブルの一部切欠
き斜視図、第３図は第２図示のチャッキング・テーブル
の要部断面図、第４図及び第５図はウェハに臂開誘導溝
を形成したところを示す図である。
１０・・・バキューム穴、１１・・・テーブル、１２・
・・ウェハ・ホルダ、１３・・・多孔質金属、１４・・
・半導体ウェハ。FIG. 1 is a diagram for explaining wafer fixing in the prior art, FIG. 2 is a partially cutaway perspective view of a chucking table according to an embodiment of the present invention, and FIG. 3 is a diagram illustrating the chucking table shown in FIG. The main part sectional views, FIGS. 4 and 5, are views showing the state in which arm-opening guide grooves are formed in the wafer. 10... Vacuum hole, 11... Table, 12.
...Wafer holder, 13...Porous metal, 14...
・Semiconductor wafer.
Claims (1)
あって、バキューム穴を有するテーブルと、このテーブ
ル上に載置され前記バキューム穴に対応する部分に多孔
質金属を有するウェハ・ホルダとを具備することを特徴
とするチャッキングΦテーブル。A chucking table for suctioning and fixing a semiconductor wafer, comprising: a table having a vacuum hole; and a wafer holder placed on the table and having porous metal in a portion corresponding to the vacuum hole. Features a chucking Φ table.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15032283U JPS6059536U (en) | 1983-09-30 | 1983-09-30 | chatting table |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15032283U JPS6059536U (en) | 1983-09-30 | 1983-09-30 | chatting table |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6059536U true JPS6059536U (en) | 1985-04-25 |
Family
ID=30333438
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15032283U Pending JPS6059536U (en) | 1983-09-30 | 1983-09-30 | chatting table |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6059536U (en) |
-
1983
- 1983-09-30 JP JP15032283U patent/JPS6059536U/en active Pending
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