JPS6073321A - optical sensor device - Google Patents
optical sensor deviceInfo
- Publication number
- JPS6073321A JPS6073321A JP18027983A JP18027983A JPS6073321A JP S6073321 A JPS6073321 A JP S6073321A JP 18027983 A JP18027983 A JP 18027983A JP 18027983 A JP18027983 A JP 18027983A JP S6073321 A JPS6073321 A JP S6073321A
- Authority
- JP
- Japan
- Prior art keywords
- optical sensor
- polyimide resin
- sensor device
- insulating film
- glass substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Abstract] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
すに係り、特に多層配線絶縁膜としてのボリイミにおけ
る多層配線にポリイミド樹脂を用いたものがある。この
ような従来のものではポリイミド樹脂塗布の直前にアル
ミキレート処理を行なっていたが、異物等によるポリイ
ミド樹脂の膜欠陥が多く、Ｂ６ラインセンサのように大
面積を必要とす絶縁膜との密着性が良い光センサデバイ
スを提供２ス基板上にＡｔ２Ｑ３をペースコートし、こ
の上に下部配線を行なった後、ポリイミド樹脂絶縁膜間
する。DETAILED DESCRIPTION OF THE INVENTION In particular, polyimide resin is used for multilayer wiring in polyimide as a multilayer wiring insulating film. In such conventional products, aluminum chelate treatment was performed immediately before applying polyimide resin, but there were many defects in the polyimide resin film due to foreign particles, etc., and it was difficult to adhere to the insulating film, which requires a large area like the B6 line sensor. Providing an optical sensor device with good performance. After coating At2Q3 on a 2-substrate and forming lower wiring thereon, a polyimide resin insulating film is interposed.
スパッター装置によシ、ガラス基板１上にＡｔ２０Ｂベ
ースコート２を１５０ＯＡの厚さに付け、続イてｃｒを
２５０ＯＡの厚さに付ける。このＣｒで下部配線３を形
成する。さらにこの上にポリイミド樹脂を塗布し、２３
０℃で乾燥して絶縁Ｂ４を形成した後３５０℃で熱硬化
させる。ポリイミド樹脂絶縁膜４の上にＡｔを１μｍの
厚さで蒸着し、−ヒ部配線５ことによシガラス基板とポ
リイミド樹脂絶縁膜との密着性を良くシ、且つポリイミ
ド樹脂膜を無欠陥で大面積化できる効果がある。Using a sputtering device, an At20B base coat 2 is applied to a thickness of 150 OA on a glass substrate 1, and then a CR is applied to a thickness of 250 OA. The lower wiring 3 is formed using this Cr. Furthermore, polyimide resin is applied on top of this, and 23
After drying at 0°C to form insulation B4, it is thermally cured at 350°C. At is deposited to a thickness of 1 μm on the polyimide resin insulating film 4 to improve the adhesion between the glass substrate and the polyimide resin insulating film, and to form the polyimide resin film without defects. It has the effect of increasing the area.
第１図は本発明の光センサデノ（イスにおける多層配線
部の平面図、第２図は第１図のＡ−Ａ’の断面図である
。
１・・・・ガラス基板、２・・・・ＡＡ２０３ベースコ
ート、３・・・・下部配線、４・・・Φポリイミド樹脂
絶縁膜、５・・・・上部配ｍ。
代理人 弁理士 高 橋 −〜 夫
７・ ＼。
（、；′
第１ＩＩ
第２図FIG. 1 is a plan view of a multilayer wiring section in an optical sensor denomination (chair) of the present invention, and FIG. 2 is a cross-sectional view taken along line AA' in FIG. 1. 1...Glass substrate, 2... AA203 base coat, 3... lower wiring, 4... Φ polyimide resin insulating film, 5... upper wiring m. Agent: Patent Attorney Takahashi - ~ Husband 7. \. (,;' 1st II. Figure 2
Claims (1)
絶縁膜としてポリイミド樹脂膜を形成する多層配線構造
を有することを特徴とする光センサデバイス。An optical sensor device characterized by having a multilayer wiring structure in which At203 is paste-coated on a glass substrate and a polyimide resin film is formed as an insulating film thereon.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18027983A JPS6073321A (en) | 1983-09-30 | 1983-09-30 | optical sensor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18027983A JPS6073321A (en) | 1983-09-30 | 1983-09-30 | optical sensor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6073321A true JPS6073321A (en) | 1985-04-25 |
Family
ID=16080440
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18027983A Pending JPS6073321A (en) | 1983-09-30 | 1983-09-30 | optical sensor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6073321A (en) |
-
1983
- 1983-09-30 JP JP18027983A patent/JPS6073321A/en active Pending
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