JPS6083245U - Thin piece detection device for cassette type thin piece loading/unloading - Google Patents

Thin piece detection device for cassette type thin piece loading/unloading

Info

Publication number
JPS6083245U
JPS6083245U JP17708483U JP17708483U JPS6083245U JP S6083245 U JPS6083245 U JP S6083245U JP 17708483 U JP17708483 U JP 17708483U JP 17708483 U JP17708483 U JP 17708483U JP S6083245 U JPS6083245 U JP S6083245U
Authority
JP
Japan
Prior art keywords
cassette
thin piece
detection device
thin
type thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17708483U
Other languages
Japanese (ja)
Other versions
JPH0128683Y2 (en
Inventor
博美 村山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP17708483U priority Critical patent/JPS6083245U/en
Publication of JPS6083245U publication Critical patent/JPS6083245U/en
Application granted granted Critical
Publication of JPH0128683Y2 publication Critical patent/JPH0128683Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Sheets, Magazines, And Separation Thereof (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Controlling Sheets Or Webs (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図はウェハ送り出し部の一部切欠斜視図、第２図は
従来例を説明するための、ウェハ送り出□　し部の側断
面図、第３図は本考案の実施例で、第２図のＡ−Ａ断面
に該当する断面図を示し、第４図は第３図の要部側面図
を示す。 ２・・・ウェハ、３・・・カセット、８・・・投光部、
９・・・受光部。Fig. 1 is a partially cutaway perspective view of the wafer delivery unit, Fig. 2 is a side sectional view of the wafer delivery unit for explaining a conventional example, and Fig. 3 is an embodiment of the present invention. A sectional view corresponding to the AA section in the figure is shown, and FIG. 4 is a side view of the main part of FIG. 3. 2... Wafer, 3... Cassette, 8... Light projecting section,
9... Light receiving section.

Claims (2)

【実用新案登録請求の範囲】[Scope of utility model registration request] （１）複数の薄片を等間隔に収納できるカセットが載置
される上下動可能なエレベータテーブルと、該エレベー
タテーブル上に載置されたカセットに対向し、当該エレ
ベータテーブルの上下動と共動して薄片をカセットに給
排する一対の゛　搬送ベルトとから構成されたカセット
式薄片搬出人装置において、カセット下部内側面に近接
して対向させた、一対の投光部及び受光部から成る透過
センサーを、投光部からの光ビームがカセット内の最下
位に収納された薄片によってのみ遮断されるように配置
したカセット式薄片搬出入用薄片検知装置。(1) A vertically movable elevator table on which cassettes capable of storing a plurality of thin slices at equal intervals are placed; In the cassette-type thin film conveyor device, which is composed of a pair of conveyor belts that supply and discharge thin films to and from the cassette, a transmission sensor consisting of a pair of light emitting part and light receiving part is disposed close to and facing the inner surface of the lower part of the cassette. A cassette type thin piece detection device for carrying in and out of thin pieces, which is arranged so that the light beam from the light projecting part is blocked only by the thin piece stored at the lowest position in the cassette. （２）　　投光部または受光部の装備位置を薄片のサイ
ズに応じて変更可能にした実用新案登録請求の範囲第１
項に記載のカセット式薄片搬出入用薄片検知装置。(2) Claim 1 of the utility model registration that allows the installation position of the light emitting part or the light receiving part to be changed according to the size of the flake
The cassette type thin piece detection device for carrying in and out of thin pieces described in 2.
JP17708483U 1983-11-15 1983-11-15 Thin piece detection device for cassette type thin piece loading/unloading Granted JPS6083245U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17708483U JPS6083245U (en) 1983-11-15 1983-11-15 Thin piece detection device for cassette type thin piece loading/unloading

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17708483U JPS6083245U (en) 1983-11-15 1983-11-15 Thin piece detection device for cassette type thin piece loading/unloading

Publications (2)

Publication Number Publication Date
JPS6083245U true JPS6083245U (en) 1985-06-08
JPH0128683Y2 JPH0128683Y2 (en) 1989-08-31

Family

ID=30384811

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17708483U Granted JPS6083245U (en) 1983-11-15 1983-11-15 Thin piece detection device for cassette type thin piece loading/unloading

Country Status (1)

Country Link
JP (1) JPS6083245U (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6382248A (en) * 1986-09-26 1988-04-13 Canon Inc Conveyor system for water or the like
JP2846957B2 (en) * 1993-03-29 1999-01-13 イェノプティック ゲーエムベーハー Device for operating disk-shaped objects on the operating surface of a local clean room
JP2018177516A (en) * 2017-04-21 2018-11-15 株式会社日本キャリア工業 Food tray conveying apparatus having tray detection function

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6382248A (en) * 1986-09-26 1988-04-13 Canon Inc Conveyor system for water or the like
JP2846957B2 (en) * 1993-03-29 1999-01-13 イェノプティック ゲーエムベーハー Device for operating disk-shaped objects on the operating surface of a local clean room
JP2018177516A (en) * 2017-04-21 2018-11-15 株式会社日本キャリア工業 Food tray conveying apparatus having tray detection function

Also Published As

Publication number Publication date
JPH0128683Y2 (en) 1989-08-31

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