JPS6221013Y2 - - Google Patents

Description

[Detailed Description of the Invention] [Technical Field of the Invention] The present invention relates to a storage cassette, and more particularly to a storage cassette used for storing thin disk-shaped wafers such as silicon wafers of semiconductor materials and optical disks.

[Technical background of the invention]

1 to 3 show a conventional storage cassette, in which a plurality of cassettes (for example, 10, 25, 30
etc.) are provided, and a stopper groove 3 orthogonal to these grooves 2, 2... is provided in the vicinity of about 1/3 from one end of the groove 2. A round bar-shaped stopper 4 is engaged and fixed in the stopper groove 3. The two side plates 1, 1 are arranged so that the surfaces provided with the grooves 2 face each other and have a gap slightly smaller than the diameter of the wafer.
The two upper end portions and the lower central portion are connected and fixed by struts 5, 5, and 5, respectively.

In the storage cassette, the wafer 6 is stored by engaging the edges of the wafer 6 in the opposing grooves 2, 2 of the side plates 1, 1 and sliding from the right side in FIG. The edge of the wafer 6 comes into contact with the wafer 6, thereby preventing it from coming off to the opposite side.

[Problems with background technology]

The storage cassette described above is moved or transported while storing a plurality of wafers, but since the stopper 4 is provided only on one side, if the storage cassette is tilted toward the wafer insertion side, the storage cassette may This has the disadvantage that the wafer that has been removed may slip out and be damaged. The silicon wafers, optical disks, etc. stored in this storage cassette are extremely expensive, and damage to the wafers will result in great damage.

[Purpose of invention]

The present invention was devised in view of the above-mentioned drawbacks, and it is an object of the present invention to provide a storage cassette that can easily prevent wafers from slipping out.

[Summary of the invention] In order to achieve the above object, the storage cassette according to the present invention has a plurality of horizontal grooves on one side of the side plate, a stopper groove perpendicular to the groove, and the two side plates are In a storage cassette in which the grooves are fixed so as to face each other with a constant gap, and a stopper is engaged and fixed to the stopper groove, the storage cassette has a storage object insertion end on the lower surface of each groove of at least one of the side plates. It is constructed by providing a slightly raised stepped portion, and the stepped portion serves as a stopper.

[Example of idea]

Hereinafter, embodiments of the present invention will be described with reference to FIGS. 4 to 7, in which the same parts as in FIGS. 1 to 3 are given the same reference numerals.

4 to 6 show an embodiment of the present invention. On the wafer insertion side of the lower surface of the grooves 2, 2... provided in the side plate 1, the insertion end side is slightly elevated. Sections 7, 7... are provided, respectively.
As shown in FIG. 6, this stepped portion 7 has an arcuate end, and is substantially the same shape as the outer circumferential arc of the wafer 6. As shown in FIG. Further, the stepped portion 7 is located at a position where the wafer 6 is accommodated in the groove 2 inside the stepped portion 7, that is, the length of the chord of the edge where the wafer 6 engages with the groove 2 is longer than the stopper 4. It is provided so that the distance between it and the section 7 becomes longer. Furthermore, the seventh
As shown in the figure, the height d of the stepped portion 7 is approximately half the thickness t of the wafer 6, and does not need to exceed t.

Since the other configurations are the same as those in FIGS. 1 to 3, their explanation will be omitted.

In this embodiment, the wafer 6 is inserted by sliding the upper surface of the stepped portion 7, and when further inserted, the wafer 6
falls from the stepped portion 7 into the groove 2 and comes into contact with the stopper 4. With the wafers 6 stored in this manner, the stepped portion 7 serves as a stopper. Therefore, even if the storage cassette is tilted toward the wafer insertion side, the wafers 6 are held against the end surface of the stepped portion 7. in contact with
This prevents the wafer from coming off. Moreover, since the width D of the groove 2 is set to be 5 to 6 times the thickness t of the wafer 6, the stepped portion 7 does not prevent the wafer 6 from being taken in and out.

In this embodiment, the end portion of the stepped portion is formed in an arc shape, but it may be formed in a straight line shape. Furthermore, even if the stepped portion is provided in the groove of one side plate, the edge of the wafer contacts the end face of the stepped portion and the side surface of the groove of the other side plate, thereby preventing the wafer from slipping out.

[Effect of idea]

As described above, the storage cassette according to the present invention has a side plate having a plurality of horizontal grooves on one side, and a stepped portion with a slightly higher end for inserting stored items on the bottom surface of each groove on at least one side. It is composed of
Since the stepped portion functions as a stopper, even if the storage cassette is tilted toward the storage side, the wafers can be prevented from falling out.
As a result, damage to the wafer can be prevented. Further, since the height of the stepped portion is small, it is possible to easily take in and take out wafers.

[Brief explanation of the drawing]

Figures 1, 2, and 3 are a front view, a side sectional view, a plan view, and a side sectional view, respectively, showing a conventional storage cassette.
4 to 7 show an embodiment of the present invention, in which FIG. 4 is a front sectional view of a part of the side plate, FIG. 5 is a side view of FIG. 4, and FIG. 7 is an enlarged view of a part of FIG. 4. FIG. 1... Side plate, 2... Groove, 3... Stopper groove, 4
...stopper, 5...post, 6...wafer, 7...
...Danbe.

Claims (1)

[Scope of utility model registration request] A plurality of horizontal grooves are provided on one side of the side plate, and a stopper groove is provided perpendicular to the groove, and the two side plates are fixed with a constant gap so that the grooves face each other, and the stopper groove is fixed to the stopper groove. In a storage cassette in which a stopper is engaged and fixed, a stepped portion is formed on the lower surface of each groove of at least one of the side plates at a slightly higher end for inserting the stored item, and comes into contact with the outer periphery of the stored item when the stored item is inserted. A storage cassette characterized by being provided with.