JPS608568B2 - Vacuum equipment manufacturing method - Google Patents
Vacuum equipment manufacturing methodInfo
- Publication number
- JPS608568B2 JPS608568B2 JP12840280A JP12840280A JPS608568B2 JP S608568 B2 JPS608568 B2 JP S608568B2 JP 12840280 A JP12840280 A JP 12840280A JP 12840280 A JP12840280 A JP 12840280A JP S608568 B2 JPS608568 B2 JP S608568B2
- Authority
- JP
- Japan
- Prior art keywords
- metal
- vacuum
- seal
- insulating cylinder
- less
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 229910052751 metal Inorganic materials 0.000 claims description 39
- 239000002184 metal Substances 0.000 claims description 39
- 239000011521 glass Substances 0.000 claims description 23
- 238000005219 brazing Methods 0.000 claims description 8
- 239000002994 raw material Substances 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 4
- 238000002844 melting Methods 0.000 claims description 2
- 230000008018 melting Effects 0.000 claims description 2
- 229910044991 metal oxide Inorganic materials 0.000 claims description 2
- 150000004706 metal oxides Chemical class 0.000 claims description 2
- 239000012255 powdered metal Substances 0.000 claims description 2
- 238000005304 joining Methods 0.000 claims 1
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 8
- 238000005245 sintering Methods 0.000 description 6
- 229910052759 nickel Inorganic materials 0.000 description 4
- 238000007747 plating Methods 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- 229910001316 Ag alloy Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910000423 chromium oxide Inorganic materials 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- APTZNLHMIGJTEW-UHFFFAOYSA-N pyraflufen-ethyl Chemical compound C1=C(Cl)C(OCC(=O)OCC)=CC(C=2C(=C(OC(F)F)N(C)N=2)Cl)=C1F APTZNLHMIGJTEW-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Joining Of Glass To Other Materials (AREA)
Description
【発明の詳細な説明】
本発明は真空しや断器、真空ヒューズ、真空リレーおよ
び真空ァレスター等の真空機器の製造方法に関するもの
である。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing vacuum equipment such as a vacuum circuit breaker, a vacuum fuse, a vacuum relay, and a vacuum arrester.
従来、真空機器においてはその構成部品である絶縁筒に
ガラス絶縁筒やアルミナセラミツク絶縁筒を用いていた
が、その後新たにガラスを高温にて結晶化させて製造す
る結晶化ガラス絶縁筒が考えられた。Traditionally, vacuum equipment used glass insulating tubes or alumina ceramic insulating tubes for the insulating tubes that are its component parts, but later on, a new type of insulating tube made of crystallized glass, which is manufactured by crystallizing glass at high temperatures, was developed. Ta.
この結晶化ガラス絶縁筒は機械的強度および価格におい
てガラス絶縁筒とアルミナセラミツク絶縁筒の中間にあ
るもので、又８５０００まで高温熱負荷をかけられる長
所を有している。上記の結晶化ガラス絶縁筒を用いて真
空機器を製造する場合、まず第１図に示すように結晶化
ガラス絶縁筒１の上下の端部にシール金属２を溶着し、
次にしや閉筒３と固定接点４を有する支持柱５とを取付
けられた金属製上蓋６をシール金属２に取付けるととも
に〜可動接点７を有する支持柱８に一端を取付けた金属
べローズ９の池端を取付けられた金属製下蓋１０をシー
ル金属２に取付ける。各部材間の接合は１０‐５〜１０
‐６側Ｈｇ以下の圧力の真空中においてロー付け接合に
よって行う。しかるに、結晶化ガラス絶縁筒１は結晶化
ガラスが軟化するために８５０ｏｏ以上の熱負荷をかけ
ることができない。一方、シール金属２は結晶化ガラス
との接合性を良好にするために結晶化ガラスの熱膨張率
にほぼ等しい特殊ステンレス鋼を使用しており、９５０
ｏｏ以上で１０‐５〜１０‐６肋Ｈｇ以下の圧力の真空
中におけるロー付けでなければステンレス鋼表面の酸化
膜特に酸化クロムが除去されず、各蓋６，１０とのロー
付けができない。このため、シ−ル金属２の表面にニッ
ケルメッキを施すかあるいは８５０００禾満でロー付け
可能な金属をあらかじめ接合しておき、各部材のロー付
けを８５０℃未満１０‐５〜１０‐６柳Ｈｇ以下の圧力
の真空中で行つていた。しかしもニッケルメッキは厳重
な工程管理を必要とし「又メッキ被膜とステンレスを良
くなじませるとともに脱ガスしてロー付け時のふくれＥ
ｊ‐クや密着不良を防止するために約婁００００Ｇの温
度の水素ガス中でのシン夕−リングを必要としト作工数
が極めて増大し「 コスト高となった。This crystallized glass insulating cylinder is between the glass insulating cylinder and the alumina ceramic insulating cylinder in terms of mechanical strength and price, and has the advantage that it can be subjected to high-temperature heat loads of up to 85,000 ℃. When manufacturing vacuum equipment using the above crystallized glass insulating cylinder, first, as shown in FIG. 1, seal metals 2 are welded to the upper and lower ends of the crystallized glass insulating cylinder 1,
Next, the metal upper cover 6, to which the closed cylinder 3 and the support column 5 having the fixed contact 4 are attached, is attached to the seal metal 2, and the metal bellows 9, one end of which is attached to the support column 8 having the movable contact 7, is attached to the seal metal 2. The metal lower cover 10 with the edge attached is attached to the seal metal 2. The bond between each member is 10-5 to 10
-6 side Performed by brazing in a vacuum at a pressure below Hg. However, the crystallized glass insulating cylinder 1 cannot be subjected to a heat load of 850 oo or more because the crystallized glass becomes soft. On the other hand, the seal metal 2 is made of special stainless steel with a coefficient of thermal expansion approximately equal to that of crystallized glass in order to improve bonding properties with crystallized glass.
Unless brazing is carried out in a vacuum at a pressure of 10-5 to 10-6 Hg or more, the oxide film, especially the chromium oxide, on the stainless steel surface will not be removed, and the lids 6 and 10 cannot be brazed. For this reason, the surface of the seal metal 2 is plated with nickel or a metal that can be brazed at 85,000 yen is pre-bonded, and each member is brazed at a temperature of 10-5 to 10-6 below 850°C. It was carried out in a vacuum at a pressure below Hg. However, nickel plating requires strict process control, and the plating film and stainless steel must be blended well and degassed to avoid blistering during brazing.
In order to prevent j-k and poor adhesion, sintering in hydrogen gas at a temperature of about 10,000 G was required, which greatly increased the number of man-hours required for the production, resulting in high costs.
さらにも このシンターリングは約８５０ｏｏでも可能
であるが、シンターリング効果が充分でなくもロー付け
時に気密漏れを生じ易い。この欠点は１０００ｏｏのシ
ンターリングで完全に除去されるが、結晶化ガラスが１
０００００に耐えないためシール金属蟹を絶縁筒亀に溶
着した後ではシン夕−リングを行うことができない。従
って〜 シール金属率もこニッケルメッキをしシン夕−
リングを行った後にシール金属２を絶縁筒川ご気密に溶
着する必要があり又シール金属２の絶縁筒８との接合部
分は気密性を良好にするために適当に酸化させる必要が
あるため該接合部分はニッケルメッキ時にマスクする必
要があり〜作業が複雑となってやはりコスｆ高となった
。又「 シール金属２に８５０ｏｏ未満でロー付け可能
な金属をロー付けすることも作業性が悪〈ちコスト高と
なった。本発明は上記の欠点を除去して、真空機器の製
作を作業性良く安価に行うことができるとともに、真空
機器の真空気密性を向上することができる真空機器の製
造方法を提供することを目的とする。Furthermore, although this sintering is possible at approximately 850 oo, even if the sintering effect is not sufficient, airtight leakage is likely to occur during brazing. This defect can be completely removed by sintering of 1000 oo, but if crystallized glass
00000, it is not possible to carry out sintering after the seal metal crab is welded to the insulating shell. Therefore, the seal metal rate is also nickel plated and thin.
After the ring is formed, it is necessary to weld the seal metal 2 to the insulating cylinder 8 in an airtight manner, and the joint part of the seal metal 2 to the insulating cylinder 8 needs to be appropriately oxidized to improve airtightness. The joint portion had to be masked during nickel plating, making the work complicated and resulting in high cost. Furthermore, "brazing the seal metal 2 with a metal that can be brazed at less than 850 ooodds also results in poor workability and high cost.The present invention eliminates the above drawbacks and makes the production of vacuum equipment easier. It is an object of the present invention to provide a method for manufacturing vacuum equipment that can be carried out efficiently and inexpensively and that can improve the vacuum tightness of the vacuum equipment.
近年、結晶化ガラスの原料中にあらかじめ金属を単体又
は酸化物として混入させておきしガラス生成後に還元処
理しもガラス表面にこの金属を膜状に析出させる技術が
考えられた。In recent years, a technique has been devised in which a metal is mixed in advance into the raw material of crystallized glass as a simple substance or an oxide, and after the glass is produced, a reduction treatment is performed to precipitate the metal in the form of a film on the surface of the glass.
本発明はこの技術を応用したものである。以下本発明の
実施例を図面とともに説明する。まず「第２図に示すよ
うに、結晶化ガラスの原料中に８５０ｑ○未満約６００
０Ｃ以上の温度で１０‐５〜１０‐６側Ｈｇ以下の圧力
の真空中でロー付け可能な粉末状の金属又は金属酸化物
例えば銅、縮合金、銀、銀合金を混入し溶融成形して絶
縁筒のシール部雷電を形成し「 このシール部１１を適
宜の熱処理により結晶化するとともに還元性雰囲気中で
の熱処理により表面に混入金属を膜状に析出する。小方
も結晶化ガラスの原料を溶融成形し適宜の熱処理により
結晶化して絶縁筒本体電′を形成する。そしても絶縁筒
本体富′の両端に表面に金属膜蟹傘を析出したシール部
電竜をガラス付け等により気密接合して絶縁筒を形成す
る。尚Ｌ この際「金属膜墓菱の絶縁筒本体雷′側部分
は再びシール都電亀内に拡散して消失する。次に金属膜
富乳こ８５０ＣＧ未満約６００００以上の温度で１０−
５〜１０‐６物Ｈｇ以下の圧力の真空中で前記と同様必
要部品を取付けられた各蓋８７ 富麗を夫々ロー付けし
て真空機器を製造する。尚〜金属膜包鷲の陣さままＩＱ
〜２Ｇミクロンで充分でありも結晶化ガラスの原料中に
混入する金属の重量％は数％で良い。The present invention is an application of this technology. Embodiments of the present invention will be described below with reference to the drawings. First, "As shown in Figure 2, the raw material for crystallized glass contains about 600 q<850 q○
A powdered metal or metal oxide that can be brazed in a vacuum at a temperature of 0C or more and a pressure of 10-5 to 10-6 side Hg or less, such as copper, condensation alloy, silver, or silver alloy, is mixed and melt-formed. A thunderbolt is formed at the seal part of the insulating cylinder, and this seal part 11 is crystallized by appropriate heat treatment, and the mixed metal is precipitated on the surface in the form of a film by heat treatment in a reducing atmosphere. The insulating cylindrical body is melt-molded and crystallized by appropriate heat treatment to form the insulating cylindrical body.Then, the seal parts with metal film crab umbrellas deposited on the surfaces of both ends of the insulating cylindrical body are hermetically sealed by glass attachment, etc. At this time, the part on the side of the main body of the insulating cylinder of the metal film tombstone will again diffuse into the seal Toden Kame and disappear. 10- at a temperature of
A vacuum device is manufactured by brazing each lid 87 with the necessary parts attached thereto in a vacuum at a pressure of 5 to 10-6 Hg or less. Furthermore, IQ of the metal film eagle
~2G microns is sufficient, but the weight percentage of the metal mixed in the raw material of crystallized glass may be a few percent.
以上のように本発明においては「結晶化ガラスの原料中
に８５０００未満約６００００以上の温度で１０‐５〜
弧‐６柳Ｈｇ以下の圧力の真空中でロー付け可能な金属
を混入し溶融成形してシール部を形成しもこのシール部
の表面に混入金属の金属艇を析出し〜結晶化ガラスの原
料から成る絶縁筒本体の両端にシール部を気密接合して
絶縁筒を形成しＬ金属膜に金属部材をロー付けして真空
機器を製造している。As mentioned above, in the present invention, "10-5 to
Arc-6 Yanagi A metal that can be brazed is mixed in a vacuum at a pressure of less than Hg, and a seal is formed by melting and forming, and a metal layer of the mixed metal is deposited on the surface of this seal ~ Raw material for crystallized glass Vacuum equipment is manufactured by airtightly sealing seal portions at both ends of an insulating cylinder main body consisting of an insulating cylinder, and by brazing a metal member to the L metal film.
従って、従来のようなシール金属は不要となりもシンタ
ーリングも不要となる。このためも真空機器の製造に際
して作業性が良くなり「 コストダウンすることができ
る。又〜絶縁筒本体とシール部は共に基本的には結晶化
ガラスから成っているのでその結合は良好で〜又金属膜
はシール部の内部から析出したものであるためこの両者
の結合は強固で気密性が良く〜 さらに金属膜と金属部
材は金属間接合でやはり気密性が良い。このため〜真空
機器の真空気密性を向上することができる。Therefore, there is no need for a conventional seal metal or sintering. This also improves work efficiency and reduces costs when manufacturing vacuum equipment.Also, since both the insulating cylinder body and the sealing part are basically made of crystallized glass, their bonding is good. Since the metal film is deposited from inside the sealing part, the bond between the two is strong and airtight.Furthermore, the metal film and metal member are metal-to-metal bonded and have good airtightness.For this reason, the vacuum of vacuum equipment Airtightness can be improved.
第電図は従来の真空機器の縦断正面図Ｌ第２図は本発明
に係る真空機器の縦断正面図。
富′……絶縁筒本体〜 ６……金属製上蓋「 富鶴……
金属製下蓋、富奪……シール部〜 １２・…。
・金属膜。餓鬼図
灘２図FIG. 2 is a longitudinal sectional front view of a conventional vacuum device. FIG. 2 is a longitudinal sectional front view of a vacuum device according to the present invention. Tomi'...Insulating cylinder body ~ 6...Metal top cover "Tomizuru...
Metal lower lid, wealth usurpation...Seal part ~ 12...・Metal film. Gaki Zu Nada 2
Claims (1)
上の温度で１０＾−＾５〜１０＾−＾６ｍｍＨｇ以下の
圧力の真空中でロー付け可能な粉末状の金属又は金属酸
化物を混入し溶融成形して絶縁筒のシール部を形成し、
このシール部を適宜の熱処理により結晶化するとともに
還元処理して表面に混入金属を膜状に析出し、このシー
ル部を結晶化ガラスの原料を溶融成形し適宜の熱処理に
より結晶化して成る絶縁筒本体の両端にガラス付け等に
より気密接合して絶縁筒を形成し、前記析出した金属膜
に８５０℃未満６００℃以上の温度で１０＾−＾５〜１
０＾−＾６ｍｍＨｇ以下の圧力の真空中で金属部材をロ
ー付けすることにより真空機器を製造することを特徴と
する真空機器の製造方法。1 Mixing a powdered metal or metal oxide that can be brazed in a vacuum at a temperature of less than 850°C and more than about 600°C and a pressure of 10^-^5 to 10^-^6 mmHg or less into the raw material of crystallized glass. and melt-molded to form the seal part of the insulating cylinder.
This seal part is crystallized by an appropriate heat treatment and reduced, so that the mixed metal is deposited on the surface in the form of a film, and this seal part is formed by melting and forming the raw material of crystallized glass and crystallizing it by an appropriate heat treatment. An insulating cylinder is formed by airtightly joining both ends of the main body by attaching glass or the like, and the precipitated metal film is heated to 10^-^5 to 1 at a temperature of less than 850 °C and 600 °C or more.
A method for manufacturing a vacuum device, comprising manufacturing the vacuum device by brazing metal members in a vacuum at a pressure of 0^-^6 mmHg or less.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12840280A JPS608568B2 (en) | 1980-09-16 | 1980-09-16 | Vacuum equipment manufacturing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12840280A JPS608568B2 (en) | 1980-09-16 | 1980-09-16 | Vacuum equipment manufacturing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56123634A JPS56123634A (en) | 1981-09-28 |
| JPS608568B2 true JPS608568B2 (en) | 1985-03-04 |
Family
ID=14983897
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12840280A Expired JPS608568B2 (en) | 1980-09-16 | 1980-09-16 | Vacuum equipment manufacturing method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS608568B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10954647B2 (en) | 2017-07-04 | 2021-03-23 | Takeuchi Construction Co., Ltd. | Foundation structure for building, and construction method therefor |
| US11566394B2 (en) | 2019-12-02 | 2023-01-31 | Takeuchi Construction Co., Ltd. | Building foundation structure, and construction method therefor |
-
1980
- 1980-09-16 JP JP12840280A patent/JPS608568B2/en not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10954647B2 (en) | 2017-07-04 | 2021-03-23 | Takeuchi Construction Co., Ltd. | Foundation structure for building, and construction method therefor |
| US11566394B2 (en) | 2019-12-02 | 2023-01-31 | Takeuchi Construction Co., Ltd. | Building foundation structure, and construction method therefor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56123634A (en) | 1981-09-28 |
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