JPS61105805U - - Google Patents

Info

Publication number
JPS61105805U
JPS61105805U JP19122284U JP19122284U JPS61105805U JP S61105805 U JPS61105805 U JP S61105805U JP 19122284 U JP19122284 U JP 19122284U JP 19122284 U JP19122284 U JP 19122284U JP S61105805 U JPS61105805 U JP S61105805U
Authority
JP
Japan
Prior art keywords
wavelength interference
intensity detector
light intensity
light
laser length
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19122284U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19122284U priority Critical patent/JPS61105805U/ja
Publication of JPS61105805U publication Critical patent/JPS61105805U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一実施例を示すブロツク図、
第２図は上記実施例の動作説明図、第３図は既存
の装置構成を示すブロツク図、第４図及び第５図
はそれぞれ上記第３図の動作を説明するための各
部の信号波形図、第６図は上記第３図の装置構成
に於いて被測定ワークの台上への浮きが生じた際
の動作説明図である。 １…２波長光源、２，１５…スキヤニング反射
鏡、３，１４，１７…半透明鏡、４，５，１８，
２０…センターミラー、６，１６，１９…全反射
鏡、７…固定ワーク、８…被測定ワーク、９，１
０，２１，２２…集光レンズ、１１…光強度検出
器Ａ、１２…光強度検出器Ｂ、６…増幅回路、７
…２乗回路、８…フイルタ回路、１３…演算処理
回路、２３…光強度検出器Ｃ、２４…光強度検出
器Ｄ、２５…ワーク台。

Claims (1)

    【実用新案登録請求の範囲】
  1. ２波長干渉レーザ測長装置に於いて、光学系を
    ２系統有して、測定対象の両面部よりレーザ光を
    あて、上記各系統毎の反射光をそれぞれ固有の光
    強度検出器で検出し、その位相差から光路差を求
    めることを特徴とした２波長干渉レーザ測長装置
    。
JP19122284U 1984-12-17 1984-12-17 Pending JPS61105805U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19122284U JPS61105805U (ja) 1984-12-17 1984-12-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19122284U JPS61105805U (ja) 1984-12-17 1984-12-17

Publications (1)

Publication Number Publication Date
JPS61105805U true JPS61105805U (ja) 1986-07-05

Family

ID=30748662

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19122284U Pending JPS61105805U (ja) 1984-12-17 1984-12-17

Country Status (1)

Country Link
JP (1) JPS61105805U (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010131337A1 (ja) * 2009-05-13 2010-11-18 Koyama Naoyuki レーザ測距方法及びレーザ測距装置
WO2010131339A1 (ja) * 2009-05-13 2010-11-18 Koyama Naoyuki レーザ測距方法及びレーザ測距装置
WO2011070656A1 (ja) * 2009-12-09 2011-06-16 Koyama Naoyuki 測距方法及びレーザ測距装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5316652A (en) * 1976-07-29 1978-02-15 Oki Electric Ind Co Ltd Thickness measuring apparatus of plate form objects

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5316652A (en) * 1976-07-29 1978-02-15 Oki Electric Ind Co Ltd Thickness measuring apparatus of plate form objects

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010131337A1 (ja) * 2009-05-13 2010-11-18 Koyama Naoyuki レーザ測距方法及びレーザ測距装置
WO2010131339A1 (ja) * 2009-05-13 2010-11-18 Koyama Naoyuki レーザ測距方法及びレーザ測距装置
WO2011070656A1 (ja) * 2009-12-09 2011-06-16 Koyama Naoyuki 測距方法及びレーザ測距装置

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