JPS61110902A - 多層膜反射鏡 - Google Patents

多層膜反射鏡

Info

Publication number
JPS61110902A
JPS61110902A JP59232755A JP23275584A JPS61110902A JP S61110902 A JPS61110902 A JP S61110902A JP 59232755 A JP59232755 A JP 59232755A JP 23275584 A JP23275584 A JP 23275584A JP S61110902 A JPS61110902 A JP S61110902A
Authority
JP
Japan
Prior art keywords
film
zns
reflecting mirror
multilayer film
alternating layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59232755A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0139163B2 (fr
Inventor
森茂　誠
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Techno Glass Co Ltd
Original Assignee
Toshiba Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Glass Co Ltd filed Critical Toshiba Glass Co Ltd
Priority to JP59232755A priority Critical patent/JPS61110902A/ja
Publication of JPS61110902A publication Critical patent/JPS61110902A/ja
Publication of JPH0139163B2 publication Critical patent/JPH0139163B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Optical Elements Other Than Lenses (AREA)
JP59232755A 1984-11-05 1984-11-05 多層膜反射鏡 Granted JPS61110902A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59232755A JPS61110902A (ja) 1984-11-05 1984-11-05 多層膜反射鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59232755A JPS61110902A (ja) 1984-11-05 1984-11-05 多層膜反射鏡

Publications (2)

Publication Number Publication Date
JPS61110902A true JPS61110902A (ja) 1986-05-29
JPH0139163B2 JPH0139163B2 (fr) 1989-08-18

Family

ID=16944246

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59232755A Granted JPS61110902A (ja) 1984-11-05 1984-11-05 多層膜反射鏡

Country Status (1)

Country Link
JP (1) JPS61110902A (fr)

Also Published As

Publication number Publication date
JPH0139163B2 (fr) 1989-08-18

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term