JPH0139163B2 - - Google Patents
Info
- Publication number
- JPH0139163B2 JPH0139163B2 JP59232755A JP23275584A JPH0139163B2 JP H0139163 B2 JPH0139163 B2 JP H0139163B2 JP 59232755 A JP59232755 A JP 59232755A JP 23275584 A JP23275584 A JP 23275584A JP H0139163 B2 JPH0139163 B2 JP H0139163B2
- Authority
- JP
- Japan
- Prior art keywords
- zns
- thin film
- mgf
- sio
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010409 thin film Substances 0.000 claims description 19
- 239000000758 substrate Substances 0.000 claims description 18
- 239000011521 glass Substances 0.000 claims description 16
- 239000010408 film Substances 0.000 claims description 15
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 13
- 230000001681 protective effect Effects 0.000 claims description 4
- 239000000463 material Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 229910052736 halogen Inorganic materials 0.000 description 2
- 150000002367 halogens Chemical class 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000002648 laminated material Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 1
Landscapes
- Optical Elements Other Than Lenses (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59232755A JPS61110902A (ja) | 1984-11-05 | 1984-11-05 | 多層膜反射鏡 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59232755A JPS61110902A (ja) | 1984-11-05 | 1984-11-05 | 多層膜反射鏡 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61110902A JPS61110902A (ja) | 1986-05-29 |
| JPH0139163B2 true JPH0139163B2 (fr) | 1989-08-18 |
Family
ID=16944246
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59232755A Granted JPS61110902A (ja) | 1984-11-05 | 1984-11-05 | 多層膜反射鏡 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61110902A (fr) |
-
1984
- 1984-11-05 JP JP59232755A patent/JPS61110902A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61110902A (ja) | 1986-05-29 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |