JPS6111225Y2 - - Google Patents

Info

Publication number
JPS6111225Y2
JPS6111225Y2 JP4543181U JP4543181U JPS6111225Y2 JP S6111225 Y2 JPS6111225 Y2 JP S6111225Y2 JP 4543181 U JP4543181 U JP 4543181U JP 4543181 U JP4543181 U JP 4543181U JP S6111225 Y2 JPS6111225 Y2 JP S6111225Y2
Authority
JP
Japan
Prior art keywords
seal
roll
differential pressure
gas
flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4543181U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57162370U (2
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4543181U priority Critical patent/JPS6111225Y2/ja
Publication of JPS57162370U publication Critical patent/JPS57162370U/ja
Application granted granted Critical
Publication of JPS6111225Y2 publication Critical patent/JPS6111225Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Rolls And Other Rotary Bodies (AREA)
  • Physical Vapour Deposition (AREA)
JP4543181U 1981-04-01 1981-04-01 Expired JPS6111225Y2 (2)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4543181U JPS6111225Y2 (2) 1981-04-01 1981-04-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4543181U JPS6111225Y2 (2) 1981-04-01 1981-04-01

Publications (2)

Publication Number Publication Date
JPS57162370U JPS57162370U (2) 1982-10-13
JPS6111225Y2 true JPS6111225Y2 (2) 1986-04-09

Family

ID=29842323

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4543181U Expired JPS6111225Y2 (2) 1981-04-01 1981-04-01

Country Status (1)

Country Link
JP (1) JPS6111225Y2 (2)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6213571A (ja) * 1985-07-11 1987-01-22 Nisshin Steel Co Ltd 片面連続真空蒸着方法
JP7369014B2 (ja) * 2018-12-06 2023-10-25 株式会社カネカ シール装置、真空装置、成膜装置、及びフィルム製造方法
JP7336366B2 (ja) * 2019-11-20 2023-08-31 株式会社カネカ シール装置、真空装置、成膜装置及び多層フィルム製造方法

Also Published As

Publication number Publication date
JPS57162370U (2) 1982-10-13

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