JPS61120434U - - Google Patents
Info
- Publication number
- JPS61120434U JPS61120434U JP466885U JP466885U JPS61120434U JP S61120434 U JPS61120434 U JP S61120434U JP 466885 U JP466885 U JP 466885U JP 466885 U JP466885 U JP 466885U JP S61120434 U JPS61120434 U JP S61120434U
- Authority
- JP
- Japan
- Prior art keywords
- chuck
- electrostatic chuck
- opens
- electrostatic
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003989 dielectric material Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Jigs For Machine Tools (AREA)
Description
図は本考案による静電チヤツク装置の一実施例
を示す断面図である。
１……導電性基板、２……誘電材料、３……ホ
ルダ、４……ウエハ、５……電源、６……加圧気
体の噴出口、７……ホース。
The figure is a sectional view showing an embodiment of an electrostatic chuck device according to the present invention. DESCRIPTION OF SYMBOLS 1... Conductive substrate, 2... Dielectric material, 3... Holder, 4... Wafer, 5... Power source, 6... Pressurized gas outlet, 7... Hose.
Claims (1)
ク面に吸着された状態にあるウエハの被チヤツク
側面に向つて開口する加圧気体の噴出口を具備さ
せたことを特徴とする静電チヤツク装置。 ２ 噴出口がチヤツク面の外側に位置し、かつウ
コハの中心側と傾斜して開口していることを特徴
とする実用新案登録請求の範囲第１項記載の静電
チヤツク装置。[Claims for Utility Model Registration] 1. An electrostatic chuck device, characterized in that it is equipped with a pressurized gas outlet that opens toward the side of the chuck of a wafer that is attracted to the chuck surface of the device. Electrostatic chuck device. 2. The electrostatic chuck device according to claim 1, wherein the ejection port is located outside the chuck surface and opens at an angle to the center of the chuck.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP466885U JPS61120434U (en) | 1985-01-17 | 1985-01-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP466885U JPS61120434U (en) | 1985-01-17 | 1985-01-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61120434U true JPS61120434U (en) | 1986-07-29 |
Family
ID=30480460
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP466885U Pending JPS61120434U (en) | 1985-01-17 | 1985-01-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61120434U (en) |
-
1985
- 1985-01-17 JP JP466885U patent/JPS61120434U/ja active Pending