JPS61149339U - - Google Patents
Info
- Publication number
- JPS61149339U JPS61149339U JP3250585U JP3250585U JPS61149339U JP S61149339 U JPS61149339 U JP S61149339U JP 3250585 U JP3250585 U JP 3250585U JP 3250585 U JP3250585 U JP 3250585U JP S61149339 U JPS61149339 U JP S61149339U
- Authority
- JP
- Japan
- Prior art keywords
- reading device
- automatic
- semiconductor wafer
- storage means
- wafer prober
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 9
- 238000003384 imaging method Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3250585U JPS61149339U (da) | 1985-03-07 | 1985-03-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3250585U JPS61149339U (da) | 1985-03-07 | 1985-03-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61149339U true JPS61149339U (da) | 1986-09-16 |
Family
ID=30534080
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3250585U Pending JPS61149339U (da) | 1985-03-07 | 1985-03-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61149339U (da) |
-
1985
- 1985-03-07 JP JP3250585U patent/JPS61149339U/ja active Pending
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