JPS61154137A - テストプロ−ブ組立体 - Google Patents

テストプロ−ブ組立体

Info

Publication number: JPS61154137A
Authority: JP; Japan
Prior art keywords: probes; probe; holes; plates; transparent
Prior art date: 1984-12-27
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP59275777A

Other languages

English (en)

Japanese (ja)

Other versions

JPH0515067B2 (2

Inventor

Seiichiro Sogo

相合　征一郎

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Individual

Original Assignee

Individual

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1984-12-27

Filing date

1984-12-27

Publication date

1986-07-12

1984-12-27 Application filed by Individual filed Critical Individual

1984-12-27 Priority to JP59275777A priority Critical patent/JPS61154137A/ja

1986-07-12 Publication of JPS61154137A publication Critical patent/JPS61154137A/ja

1993-02-26 Publication of JPH0515067B2 publication Critical patent/JPH0515067B2/ja

Status Granted legal-status Critical Current

Links

Classifications

- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P74/00—Testing or measuring during manufacture or treatment of wafers, substrates or devices

Landscapes

Testing Or Measuring Of Semiconductors Or The Like (AREA)
Testing Of Individual Semiconductor Devices (AREA)
Measuring Leads Or Probes (AREA)

JP59275777A 1984-12-27 1984-12-27 テストプロ−ブ組立体 Granted JPS61154137A (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP59275777A JPS61154137A (ja)	1984-12-27	1984-12-27	テストプロ−ブ組立体

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP59275777A JPS61154137A (ja)	1984-12-27	1984-12-27	テストプロ−ブ組立体

Publications (2)

Publication Number	Publication Date
JPS61154137A true JPS61154137A (ja)	1986-07-12
JPH0515067B2 JPH0515067B2 (2)	1993-02-26

Family

ID=17560253

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP59275777A Granted JPS61154137A (ja)	1984-12-27	1984-12-27	テストプロ−ブ組立体

Country Status (1)

Country	Link
JP (1)	JPS61154137A (2)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS63262850A (ja) *	1987-04-21	1988-10-31	Tokyo Electron Ltd	プロ−ブカ−ド
JPH01276073A (ja) *	1988-04-28	1989-11-06	Tokyo Electron Ltd	プローブ装置

Citations (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS561314U (2) *	1979-06-18	1981-01-08
JPS5654096A (en) *	1979-10-05	1981-05-13	Nippon Electric Co	Device for inspecting printed board
JPS57115841A (en) *	1981-01-10	1982-07-19	Nec Corp	Probing method
JPS58148935U (ja) *	1982-03-31	1983-10-06	日本電子材料株式会社	プロ−ブカ−ド
JPS58173841A (ja) *	1982-04-03	1983-10-12	Nippon Denshi Zairyo Kk	プロ−ブカ−ド

1984
- 1984-12-27 JP JP59275777A patent/JPS61154137A/ja active Granted

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS561314U (2) *	1979-06-18	1981-01-08
JPS5654096A (en) *	1979-10-05	1981-05-13	Nippon Electric Co	Device for inspecting printed board
JPS57115841A (en) *	1981-01-10	1982-07-19	Nec Corp	Probing method
JPS58148935U (ja) *	1982-03-31	1983-10-06	日本電子材料株式会社	プロ−ブカ−ド
JPS58173841A (ja) *	1982-04-03	1983-10-12	Nippon Denshi Zairyo Kk	プロ−ブカ−ド

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS63262850A (ja) *	1987-04-21	1988-10-31	Tokyo Electron Ltd	プロ−ブカ−ド
JPH01276073A (ja) *	1988-04-28	1989-11-06	Tokyo Electron Ltd	プローブ装置

Also Published As

Publication number	Publication date
JPH0515067B2 (2)	1993-02-26

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