JPS61159110A - 質量流量制御装置 - Google Patents

質量流量制御装置

Info

Publication number: JPS61159110A
Authority: JP; Japan
Prior art keywords: flow rate; mass flow; heat; tube; tip
Prior art date: 1984-12-29
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Granted

Application number

JP59279116A

Other languages

English (en)

Japanese (ja)

Other versions

JPH0325724B2 (2

Inventor

Takashi Sudo

隆須藤

Isao Suzuki

勲鈴木

Takeshi Hamaguri

蛤　武史

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

NIPPON TAIRAN KK

Original Assignee

NIPPON TAIRAN KK

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1984-12-29

Filing date

1984-12-29

Publication date

1986-07-18

1984-12-29 Application filed by NIPPON TAIRAN KK filed Critical NIPPON TAIRAN KK

1984-12-29 Priority to JP59279116A priority Critical patent/JPS61159110A/ja

1986-07-18 Publication of JPS61159110A publication Critical patent/JPS61159110A/ja

1991-04-08 Publication of JPH0325724B2 publication Critical patent/JPH0325724B2/ja

Status Granted legal-status Critical Current

Links

238000001514 detection method Methods 0.000 abstract description 4
238000005259 measurement Methods 0.000 abstract description 4
230000007423 decrease Effects 0.000 abstract description 3
230000035945 sensitivity Effects 0.000 abstract description 3
239000007789 gas Substances 0.000 description 17
238000010438 heat treatment Methods 0.000 description 17
235000006693 Cassia laevigata Nutrition 0.000 description 15
241000522641 Senna Species 0.000 description 15
229940124513 senna glycoside Drugs 0.000 description 15
230000000694 effects Effects 0.000 description 4
239000000945 filler Substances 0.000 description 4
238000010586 diagram Methods 0.000 description 3
229910052751 metal Inorganic materials 0.000 description 3
239000002184 metal Substances 0.000 description 3
230000003247 decreasing effect Effects 0.000 description 2
229910000838 Al alloy Inorganic materials 0.000 description 1
238000010521 absorption reaction Methods 0.000 description 1
238000004519 manufacturing process Methods 0.000 description 1
239000000463 material Substances 0.000 description 1
238000000034 method Methods 0.000 description 1
239000004065 semiconductor Substances 0.000 description 1
238000011144 upstream manufacturing Methods 0.000 description 1
239000011800 void material Substances 0.000 description 1

Landscapes

Measuring Volume Flow (AREA)
Flow Control (AREA)

JP59279116A 1984-12-29 1984-12-29 質量流量制御装置 Granted JPS61159110A (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP59279116A JPS61159110A (ja)	1984-12-29	1984-12-29	質量流量制御装置

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP59279116A JPS61159110A (ja)	1984-12-29	1984-12-29	質量流量制御装置

Publications (2)

Publication Number	Publication Date
JPS61159110A true JPS61159110A (ja)	1986-07-18
JPH0325724B2 JPH0325724B2 (2)	1991-04-08

Family

ID=17606642

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP59279116A Granted JPS61159110A (ja)	1984-12-29	1984-12-29	質量流量制御装置

Country Status (1)

Country	Link
JP (1)	JPS61159110A (2)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS6286513U (2) *	1985-11-20	1987-06-02
JPH0214029U (2) *	1988-07-11	1990-01-29
US9527138B2 (en)	2013-01-23	2016-12-27	Hainbuch Gmbh Spannende Technik	Clamping device

1984
- 1984-12-29 JP JP59279116A patent/JPS61159110A/ja active Granted

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS6286513U (2) *	1985-11-20	1987-06-02
JPH0214029U (2) *	1988-07-11	1990-01-29
US9527138B2 (en)	2013-01-23	2016-12-27	Hainbuch Gmbh Spannende Technik	Clamping device

Also Published As

Publication number	Publication date
JPH0325724B2 (2)	1991-04-08

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Legal Events

Date	Code	Title	Description
2004-04-13	R250	Receipt of annual fees	Free format text: JAPANESE INTERMEDIATE CODE: R250
2004-12-29	EXPY	Cancellation because of completion of term